Throughout the last decade, the helium ion microscope (HIM) has emerged as a versatile tool, supporting research across a broad range of applications. From its initial beginnings as an imaging tool, the HIM quickly established itself as an instrument of choice not only for nanoscale imaging but also for nanofabrication, due to its sub-10 nm structuring capability. Today multiple ion species (He, Ne, Ga) as well as different gas chemistries are available. The recent addition of a secondary ion mass spectrometer has expanded the HIM’s capabilities with ion-beam-based nanoscale analytics, allowing the analysis of elements and isotopes with a lateral resolution as low as 10 nm. These new capabilities allow the HIM to excel in the fields of nanoscale imaging and chemical analysis (secondary ion mass spectroscopy), nanopatterning and nanolithography, as well as irradiation and defect engineering.

In this thematic issue we would like to highlight applications and technical developments that have contributed to the HIM’s success within the first decade of its operation. We cordially invite contributions discussing the broad range of HIM applications and instrumental developments. The submitted works may feature, but are not limited to, the following topics:

• Imaging of insulating materials with charge compensation
• Surface sensitive imaging
• Semiconductors Ion-beam-based analysis in the HIM
• SIMS and HIM: In-situ and in-operando experiments
• Bioimaging, Nanofabrication, Helium ion lithography
• Materials engineering using He/Ne/Ga, defect engineering, ion–solid interactions
• Technique development: Analysis of geological and biological samples
• SQUIDS and plasmonics fabrication
• Modification of electric and magnetic properties with focused He and Ne ions Modification of 2D materials

Download all of the current publications in this thematic issue by clicking on "Download Issue".