Cite the Following Article
Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources
Nico Klingner, Gregor Hlawacek, Paul Mazarov, Wolfgang Pilz, Fabian Meyer and Lothar Bischoff
Beilstein J. Nanotechnol. 2020, 11, 1742–1749.
https://doi.org/10.3762/bjnano.11.156
How to Cite
Klingner, N.; Hlawacek, G.; Mazarov, P.; Pilz, W.; Meyer, F.; Bischoff, L. Beilstein J. Nanotechnol. 2020, 11, 1742–1749. doi:10.3762/bjnano.11.156
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