Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

Nico Klingner, Gregor Hlawacek, Paul Mazarov, Wolfgang Pilz, Fabian Meyer and Lothar Bischoff
Beilstein J. Nanotechnol. 2020, 11, 1742–1749. https://doi.org/10.3762/bjnano.11.156

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Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources
Nico Klingner, Gregor Hlawacek, Paul Mazarov, Wolfgang Pilz, Fabian Meyer and Lothar Bischoff
Beilstein J. Nanotechnol. 2020, 11, 1742–1749. https://doi.org/10.3762/bjnano.11.156

How to Cite

Klingner, N.; Hlawacek, G.; Mazarov, P.; Pilz, W.; Meyer, F.; Bischoff, L. Beilstein J. Nanotechnol. 2020, 11, 1742–1749. doi:10.3762/bjnano.11.156

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