A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Scholarly Works

• Jany, B. R.; Madajska, K.; Butrymowicz-Kubiak, A.; Krok, F.; Szymańska, I. B. Evaluating metal-organic precursors for focused ion beam-induced deposition through solid-layer decomposition analysis. Beilstein Journal of Nanotechnology 2025, 16, 1942–1951. doi:10.3762/bjnano.16.135
• Taghinejad, H.; Taghinejad, M.; Abdollahramezani, S.; Li, Q.; Woods, E. V.; Tian, M.; Eftekhar, A. A.; Lyu, Y.; Zhang, X.; Ajayan, P. M.; Cai, W.; Brongersma, M. L.; Analytis, J. G.; Adibi, A. Ion-Assisted Nanoscale Material Engineering in Atomic Layers. Nano letters 2025, 25, 10123–10130. doi:10.1021/acs.nanolett.5c02040
• Strohauer, S.; Wietschorke, F.; Döblinger, M.; Schmid, C.; Grotowski, S.; Zugliani, L.; Jonas, B.; Müller, K.; Finley, J. J. Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation. APL Quantum 2025, 2. doi:10.1063/5.0259935
• Kaufmann, J.; Ciesielski, R.; Freiberg, K.; Walther, M.; Fernández Herrero, A.; Lippmann, S.; Soltwisch, V.; Siefke, T.; Zeitner, U. Fabrication of shallow EUV gratings on silicon by irradiation with helium ions. Nanotechnology 2025, 36, 185301. doi:10.1088/1361-6528/adc4ec
• Strohauer, S.; Wietschorke, F.; Schmid, C.; Grotowski, S.; Zugliani, L.; Jonas, B.; Müller, K.; Finley, J. J. Current crowding-free superconducting nanowire single-photon detectors. Science advances 2025, 11, eadt0502. doi:10.1126/sciadv.adt0502
• Yao, Y.; Lin, P.; Ye, D.; Miao, H.; Cao, L.; Zhang, P.; Xu, J.; Dai, L. Enhanced Long-Term Antibacterial and Osteogenic Properties of Silver-Loaded Titanium Dioxide Nanotube Arrays for Implant Applications. International journal of nanomedicine 2025, 20, 3749–3764. doi:10.2147/ijn.s493754
• Yang, Z.; Abas, A.; Cao, Y. Research of ultra-low concentration ion implantation on chip substrates using film delamination method combined with semiconductor simulation technology. Innovation and Emerging Technologies 2025, 12. doi:10.1142/s273759942550001x
• Guan, J.; Gupta, P.; He, Z.; Rosli, Z.; Kennedy, J.; Gao, W.; Wang, Z. Non-Fourier thermal spike effect on nanocrystalline Cu phase engineering. Applied Surface Science 2025, 684, 161910. doi:10.1016/j.apsusc.2024.161910
• Byrne, D. O.; Allen, F. I. Atomic Engineering of Triangular Nanopores in Monolayer hBN for Membrane Applications: A Decoupled Seeding and Growth Approach. ACS Applied Nano Materials 2025, 8, 4565–4572. doi:10.1021/acsanm.4c06998
• Mo, S.; Byrne, D. O.; Allen, F. I. Focused helium ion beam nanofabrication by near-surface swelling. Journal of Vacuum Science & Technology B 2025, 43. doi:10.1116/6.0004100
• Li, Q.; Liu, Z.; Lin, X.; Lin, X.; Xing, Y.; Zhou, Z. A combined transport-defect evolution model of microstructure damage in silicon carbide induced by precise irradiation of focused helium ion beams. Vacuum 2024, 230, 113656. doi:10.1016/j.vacuum.2024.113656
• Abdel-Rahman, M. K.; Eckhert, P. M.; Chaudhary, A.; Johnson, J. M.; Yu, J.-C.; McElwee-White, L.; Fairbrother, D. H. Ion-induced surface reactions and deposition from Pt(CO)2Cl2 and Pt(CO)2Br2. Beilstein journal of nanotechnology 2024, 15, 1427–1439. doi:10.3762/bjnano.15.115
• Bruevich, V.; Kasaei, L.; Feldman, L. C.; Podzorov, V. Direct Writing of Metal Nanostructures with Focused Helium Ion Beams. Electronic Materials 2024, 5, 293–302. doi:10.3390/electronicmat5040018
• Bredol, P.; David, F.; Jagtap, N. S.; Klaß, Y. S.; Astakhov, G. V.; Erbe, A.; Weig, E. M. Effect of helium-ion implantation on 3C -SiC nanomechanical string resonators. Physical Review Applied 2024, 22. doi:10.1103/physrevapplied.22.034036
• Shabelnikova, Y. L.; Zaitsev, S. I. Ion-Beam Lithography: Modelling and Analytical Description of the Deposited in Resist Energy. Technical Physics 2024, 69, 386–391. doi:10.1134/s1063784224010353
• Zhou, H.; Li, S.; Huang, Y.; Liu, W.; Zhang, H.; Wu, Y.; Zhang, W.; Chen, E.; Zhang, C.; Wang, X.; Liu, D.; Lin, J. Large-area superconducting nanowires fabricated based on laser exposure on photoresist. Nano Research 2024, 17, 8220–8225. doi:10.1007/s12274-024-6851-7
• Byrne, D. O.; Ciston, J.; Allen, F. I. Probing Defectivity Beneath the Hydrocarbon Blanket in 2D hBN Using TEM-EELS. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 2024, 30, 650–659. doi:10.1093/mam/ozae064
• Howarth, J.; Vaklinova, K.; Grzeszczyk, M.; Baldi, G.; Hague, L.; Potemski, M.; Novoselov, K. S.; Kozikov, A.; Koperski, M. Electroluminescent vertical tunneling junctions based on WSe2 monolayer quantum emitter arrays: Exploring tunability with electric and magnetic fields. Proceedings of the National Academy of Sciences of the United States of America 2024, 121, e2401757121. doi:10.1073/pnas.2401757121
• Hassan, N. A.; Hassan, H. S.; Elkady, M. F. Advanced Physical and Chemical Techniques for Sensor Surface Treatment. Handbook of Nanosensors; Springer Nature Switzerland, 2024; pp 167–202. doi:10.1007/978-3-031-47180-3_72
• Ma, X.-P.; Wang, N.-N.; Wang, W.-T.; Nie, J.-Z.; Gao, W.-L.; Sun, S.-S.; Li, J.; Tian, H.-F.; Xia, T.-L.; Cheng, J.-G.; Li, J.-Q.; Yang, H.-X. Microstructure and structural modulation of lutetium dihydride LuH2 as seen via transmission electron microscopy. Scripta Materialia 2024, 245, 116022. doi:10.1016/j.scriptamat.2024.116022

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