A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Frances I. Allen
Beilstein J. Nanotechnol. 2021, 12, 633–664. https://doi.org/10.3762/bjnano.12.52

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A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope
Frances I. Allen
Beilstein J. Nanotechnol. 2021, 12, 633–664. https://doi.org/10.3762/bjnano.12.52

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Allen, F. I. Beilstein J. Nanotechnol. 2021, 12, 633–664. doi:10.3762/bjnano.12.52

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