A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Scholarly Works

• Ji, X.; Luo, G.-n.; Fan, C.; Zhou, H. Surface morphology changes in helium‑implanted single‑crystalline tungsten after high‑temperature annealing. Journal of Nuclear Materials 2026, 632, 156912. doi:10.1016/j.jnucmat.2026.156912
• Yan, W.; Wang, Y.; Zheng, Z.; Gao, C.; Fu, Z.; Fang, P.; Guo, L.; Tang, Y.; Jin, S.; Xiong, Y.; Zhang, W.; Zeng, W. Dose-Dependent Defect Engineering and Electronic Structure Regulation of CdS Nanowires by He⁺ Irradiation for Enhanced Photoelectrochemical Performance. Journal of Alloys and Compounds 2026, 191577. doi:10.1016/j.jallcom.2026.191577
• Wang, L.; Sun, Y.; Kannan, K.; Im, S.; Fu, G.; Wang, R.; Zhang, H. Defect Engineering in Two‐Dimensional Materials: Writing, Characterization, and Device Function. Small Structures 2026, 7. doi:10.1002/sstr.70602
• Sun, W.; Zhou, J.; Xu, H.; Yuan, X.; Zheng, S.; Wang, R.; Wu, T.; Liu, Y.; Hao, Y.; Han, G. He + -Ion Implantation for Defect-Engineered Ferroelectric AlScN. IEEE Electron Device Letters 2026, 47, 1767–1770. doi:10.1109/led.2026.3708120
• Pourbahari, B.; Chi, L.; Osofsky, M.; Bassim, N. Patterning nanoscale silicon using ion beam implantation into a metal carrier thin film. Applied Surface Science 2026, 752, 168261. doi:10.1016/j.apsusc.2026.168261
• Ghorbani, M.; Kamaliya, B.; Tolchin, M. J.; Spangler, R. W.; Kim, Y.; Caldwell, J. D.; Maria, J.; Bassim, N. D. Dopant Distribution in Ga‐Implanted CdO—A Correlative Microscopy and Molecular Dynamics Study. Advanced Functional Materials 2026, 36. doi:10.1002/adfm.77441
• Basak, R. Artificial Antiferromagnetic Pattern Formation in Nickelate Thin Films. Springer Theses; Springer Nature Switzerland, 2026; pp 53–120. doi:10.1007/978-3-032-19199-1_3
• Mery, M. An analytical framework for quantifying radiation-enhanced diffusion coefficients of H and He in nanometric freestanding membranes under high-radiation environments. Journal of Membrane Science Letters 2026, 6, 100118. doi:10.1016/j.memlet.2026.100118
• Han 韩, Y. 颖.; Yin 殷, D. 大.; Cai 蔡, X. 欣.; Zhang 张, Y. 焱.; Wang 王, Y. 越.; Tian 田, L. 利.; Gan 甘, Z. 子. Vortex matching effects and flux dynamics manipulation in MgB 2 thin films via He-FIB-induced periodic artificial pinning centers. Chinese Physics B 2026, 35, 67405–067405. doi:10.1088/1674-1056/ae3c8d
• Storey, A. C. G.; Boodram, S.; Sabouri, A.; Perez-Martinez, C. S. Irradiation effects of filtered beams of ionic liquid ion sources on semiconductor materials. Journal of Applied Physics 2026, 139. doi:10.1063/5.0322936
• Chen, J.; Yu, H.; Gallardo, R.; Landeros, P.; Gubbiotti, G. Magnon confinement and trapping at the nanoscale. Physics Reports 2026, 1176, 1–85. doi:10.1016/j.physrep.2026.02.002
• Park, J.; Lee, M.; Choi, W.; Kim, D.; Chung, K.-J. Development and characterization of a ribbon-type ion beam source test bench for ion implantation applications. Journal of the Korean Physical Society 2026, 89, 462–471. doi:10.1007/s40042-026-01650-4
• Zeng, W.; Chen, W.; Wang, Z.; Fang, R.; Guo, Y.; Zhang, Y.; Zhang, C.; Zhang, B.; Li, H.; Tenger, B. Opening a new chapter in in-situ research on microscopic mechanisms of shale organic matter pore evolution. Science China Earth Sciences 2026, 69, 1486–1497. doi:10.1007/s11430-025-1828-4
• 曾, 文.; 陈, 维.; 王, 梓.; 方, 镕.; 郭, 毅.; 张, 远.; 张, 聪.; 张, 斌.; 李, 浩.; 腾, 格. 开启原位研究页岩有机质分子结构及孔隙形成演化微观机制的新篇章. SCIENTIA SINICA Terrae 2026, 56, 1523–1534. doi:10.1360/n072025-0366
• Allen, F. I. New Directions in Focused Ion Beam Induced Deposition for the Nanoprinting of Functional 3D Heterostructures. Advanced Materials Technologies 2026, 11. doi:10.1002/admt.202502542
• Park, J.; Lee, M.; Choi, W.; Kim, D.; Chung, K.-J. Development and Characterization of a Ribbon-Type Ion Beam Source Test Bench for Ion Implantation Applications. Springer Science and Business Media LLC 2026. doi:10.21203/rs.3.rs-8477349/v1
• Ji, X.; Luo, G.-N.; Fan, C.; Zhou, H. Surface morphology changes in helium‐implanted single‐crystalline tungsten after high‐temperature annealing. Elsevier BV 2026. doi:10.2139/ssrn.6953468
• Duarte, J. M.; Ferreira, D. F. S.; da Silva, C. A. B.; Del Nero, J. 2D chiral and armchair edges carbon allotrope nanoribbons: robust metallicity and tunable negative differential resistance in net-τ. Nanoscale 2025, 17, 27382–27406. doi:10.1039/d5nr03423j
• Chowdhury, I.; Ali, M. Y.; Howlader, M. M. Advances in etching of 2D nanomaterials: Research challenges and advanced devices. Progress in Engineering Science 2025, 2, 100154. doi:10.1016/j.pes.2025.100154
• Bektas, U.; Liedke, M. O.; Liu, H.; Ganss, F.; Butterling, M.; Klingner, N.; Hübner, R.; Makkonen, I.; Wagner, A.; Hlawacek, G. Defect Analysis of the β – to γ –Ga 2 O 3 Phase Transition. Advanced Functional Materials 2025, 36. doi:10.1002/adfm.202509688

Explore citations to this article at