Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr and Stefan E. Schulz
Beilstein J. Nanotechnol. 2023, 14, 951–963. https://doi.org/10.3762/bjnano.14.78

Supporting Information

Supporting Information File 1: Additional figures with XPS and ellipsometry raw data.
Format: PDF Size: 1001.1 KB Download

Cite the Following Article

Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor
Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr and Stefan E. Schulz
Beilstein J. Nanotechnol. 2023, 14, 951–963. https://doi.org/10.3762/bjnano.14.78

How to Cite

Franz, M.; Safian Jouzdani, M.; Kaßner, L.; Daniel, M.; Stahr, F.; Schulz, S. E. Beilstein J. Nanotechnol. 2023, 14, 951–963. doi:10.3762/bjnano.14.78

Download Citation

Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window below.
Citation data in RIS format can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Zotero.

Presentation Graphic

Picture with graphical abstract, title and authors for social media postings and presentations.
Format: PNG Size: 9.1 MB Download
Other Beilstein-Institut Open Science Activities