Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone

Kristjan Kalam, Peeter Ritslaid, Tanel Käämbre, Aile Tamm and Kaupo Kukli
Beilstein J. Nanotechnol. 2023, 14, 1085–1092. https://doi.org/10.3762/bjnano.14.89

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Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone
Kristjan Kalam, Peeter Ritslaid, Tanel Käämbre, Aile Tamm and Kaupo Kukli
Beilstein J. Nanotechnol. 2023, 14, 1085–1092. https://doi.org/10.3762/bjnano.14.89

How to Cite

Kalam, K.; Ritslaid, P.; Käämbre, T.; Tamm, A.; Kukli, K. Beilstein J. Nanotechnol. 2023, 14, 1085–1092. doi:10.3762/bjnano.14.89

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