Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Gregor Hlawacek, Vasilisa Veligura, Stefan Lorbek, Tijs F. Mocking, Antony George, Raoul van Gastel, Harold J. W. Zandvliet and Bene Poelsema

Beilstein J. Nanotechnol. 2012, 3, 507–512. https://doi.org/10.3762/bjnano.3.58

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