Fabrication of carbon nanomembranes by helium ion beam lithography

Scholarly Works

• Stohmann, P.; Koch, S.; Yang, Y.; Kaiser, C. D.; Ehrens, J.; Schnack, J.; Biere, N.; Anselmetti, D.; Gölzhäuser, A.; Zhang, X. Investigation of electron-induced cross-linking of self-assembled monolayers by scanning tunneling microscopy. Beilstein journal of nanotechnology 2022, 13, 462–471. doi:10.3762/bjnano.13.39
• Allen, F. I. A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope. Beilstein journal of nanotechnology 2021, 12, 633–664. doi:10.3762/bjnano.12.52
• Ciganė, U.; Palevicius, A.; Janusas, G. Review of nanomembranes: materials, fabrications and applications in tissue engineering (bone and skin) and drug delivery systems. Journal of Materials Science 2021, 56, 13479–13498. doi:10.1007/s10853-021-06164-x
• Neumann, C.; Wilhelm, R. A.; Küllmer, M.; Turchanin, A. Low-energy electron irradiation induced synthesis of molecular nanosheets: influence of the electron beam energy. Faraday discussions 2020, 227, 61–79. doi:10.1039/c9fd00119k
• Ferreiro-Vila, E.; Bugallo, D.; Magén, C.; Rivadulla, F.; de Teresa, J. M. Topotactic transformation in SrFeO3−δ triggered by low-dose Ga+ focused ion irradiation. Applied Physics Letters 2020, 116, 163103. doi:10.1063/1.5141154
• Backes, C.; Abdelkader, A. M.; Alonso, C.; Andrieux-Ledier, A.; Arenal, R.; Azpeitia, J.; Balakrishnan, N.; Banszerus, L.; Barjon, J.; Bartali, R.; Bellani, S.; Berger, C.; Berger, R.; Ortega, M. B.; Bernard, C.; Beton, P. H.; Beyer, A.; Bianco, A.; Bøggild, P.; Bonaccorso, F.; Barin, G. B.; Botas, C.; Bueno, R. A.; Carriazo, D.; Castellanos-Gomez, A.; Christian, M.; Ciesielski, A.; Ciuk, T.; Cole, M. T.; Coleman, J. N.; Coletti, C.; Crema, L.; Cun, H.; Dasler, D.; De Fazio, D.; Díez, N.; Drieschner, S.; Duesberg, G. S.; Fasel, R.; Feng, X.; Fina, A.; Forti, S.; Galiotis, C.; Garberoglio, G.; Garcia, J. M.; Garrido, J. A.; Gibertini, M.; Gölzhäuser, A.; Gómez, J.; Greber, T.; Hauke, F.; Hemmi, A.; Hernández-Rodríguez, I.; Hirsch, A.; Hodge, S. A.; Huttel, Y.; Jepsen, P. U.; Jimenez, I.; Kaiser, U.; Kaplas, T.; Kim, H.; Kis, A.; Papagelis, K.; Kostarelos, K.; Krajewska, A.; Lee, K.; Li, C.; Lipsanen, H.; Liscio, A.; Lohe, M. R.; Loiseau, A.; Lombardi, L.; López, M. F.; Martin, O.; Martín, C.; Martínez, L.; Martín-Gago, J. A.; Martínez, J. I.; Marzari, N.; Mayoral, A.; McManus, J. B.; Melucci, M.; Méndez, J.; Merino, C.; Merino, P.; Meyer, A.; Miniussi, E.; Miseikis, V.; Mishra, N.; Morandi, V.; Munuera, C.; Muñoz, R.; Nolan, H.; Ortolani, L.; Ott, A. K.; Palacio, I.; Palermo, V.; Parthenios, J.; Pasternak, I.; Patanè, A.; Prato, M.; Prevost, H.; Prudkovskiy, V.; Pugno, N. M.; Rojo, T.; Rossi, A.; Ruffieux, P.; Samorì, P.; Schué, L.; Setijadi, E. J.; Seyller, T.; Speranza, G.; Stampfer, C.; Stenger, I.; Strupinski, W.; Svirko, Y.; Taioli, S.; Teo, K. B. K.; Testi, M.; Tomarchio, F.; Tortello, M.; Treossi, E.; Turchanin, A.; Vázquez, E.; Villaro, E.; Whelan, P. R.; Xia, Z.; Yakimova, R.; Yang, S.; Yazdi, G. R.; Yim, C.; Yoon, D.; Zhang, X.; Zhuang, X.; Colombo, L.; Ferrari, A. C.; García-Hernández, M. Production and processing of graphene and related materials. 2D Materials 2020, 7, 022001–022282. doi:10.1088/2053-1583/ab1e0a
• de Teresa, J. M.; Orús, P.; Córdoba, R.; Philipp, P. Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions. Micromachines 2019, 10, 799. doi:10.3390/mi10120799
• Hartl, H.; East, C. P.; Xu, Y.; Yambem, S. D.; Fairfull-Smith, K. E.; MacLeod, J. Direct-write crosslinking in vacuum-deposited small-molecule films using focussed ion and electron beams. Nanotechnology 2019, 30, 335301. doi:10.1088/1361-6528/ab1b86
• Bassim, N.; Notte, J. A. Focused Ion Beam Instruments. Materials Characterization; ASM International, 2019; pp 635–670. doi:10.31399/asm.hb.v10.a0006677
• Zhang, X.; Marschewski, E.; Penner, P.; Weimann, T.; Hinze, P.; Beyer, A.; Gölzhäuser, A. Large-Area All-Carbon Nanocapacitors from Graphene and Carbon Nanomembranes. ACS nano 2018, 12, 10301–10309. doi:10.1021/acsnano.8b05490
• Zhang, X.; Mainka, M.; Paneff, F.; Hachmeister, H.; Beyer, A.; Gölzhäuser, A.; Huser, T. R. Surface-Enhanced Raman Spectroscopy of Carbon Nanomembranes from Aromatic Self-Assembled Monolayers. Langmuir : the ACS journal of surfaces and colloids 2018, 34, 2692–2698. doi:10.1021/acs.langmuir.7b03956
• Koch, S.; Kaiser, C. D.; Penner, P.; Barclay, M.; Frommeyer, L.; Emmrich, D.; Stohmann, P.; Abu-Husein, T.; Terfort, A.; Fairbrother, D. H.; Ingólfsson, O.; Gölzhäuser, A. Amplified cross-linking efficiency of self-assembled monolayers through targeted dissociative electron attachment for the production of carbon nanomembranes. Beilstein journal of nanotechnology 2017, 8, 2562–2571. doi:10.3762/bjnano.8.256
• Turchanin, A. Graphene Growth by Conversion of Aromatic Self-Assembled Monolayers. Annalen der Physik 2017, 529, 1700168. doi:10.1002/andp.201700168
• Zhang, X.; Marschewski, E.; Penner, P.; Beyer, A.; Gölzhäuser, A. Investigation of electronic transport through ultrathin carbon nanomembrane junctions by conductive probe atomic force microscopy and eutectic Ga–In top contacts. Journal of Applied Physics 2017, 122, 055103. doi:10.1063/1.4995533
• Stanford, M. G.; Lewis, B. B.; Mahady, K.; Fowlkes, J. D.; Rack, P. D. Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2017, 35, 030802. doi:10.1116/1.4981016
• Gölzhäuser, A. Helium Ion Microscopy of Carbon Nanomembranes. Helium Ion Microscopy 2016, 18, 225–244. doi:10.1007/978-3-319-41990-9_10
• Turchanin, A.; Gölzhäuser, A. Carbon Nanomembranes. Advanced materials (Deerfield Beach, Fla.) 2016, 28, 6075–6103. doi:10.1002/adma.201506058
• Huth, M.; Gölzhäuser, A. Focused particle beam-induced processing. Beilstein journal of nanotechnology 2015, 6, 1883–1885. doi:10.3762/bjnano.6.191
• Petrov, Y. V.; Vyvenko, O. Scanning reflection ion microscopy in a helium ion microscope. Beilstein journal of nanotechnology 2015, 6, 1125–1137. doi:10.3762/bjnano.6.114
• Jeyachandran, Y. L.; Meyerbröker, N.; Terfort, A.; Zharnikov, M. Maskless Ultraviolet Projection Lithography with a Biorepelling Monomolecular Resist. The Journal of Physical Chemistry C 2014, 119, 494–501. doi:10.1021/jp510809a

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