High sensitivity and high resolution element 3D analysis by a combined SIMS–SPM instrument

Yves Fleming and Tom Wirtz

Beilstein J. Nanotechnol. 2015, 6, 1091–1099. https://doi.org/10.3762/bjnano.6.110

Supporting Information

The archive in Supporting Information File 1 contains two videos (MPEG II) in which a sputtering experiment and a data reconstruction are shown. One video, TiCN_12C14N_16colors_mpeg2video.mpg, shows the “live sputtering” of Ti(C,N) cermet: The cermet’s domains consisting of Ti and carbon containing grains on one hand and Co binder material on the other hand are sputtered at different rates during continued Cs+ bombardment. During the analysis, consisting of 160 SIMS mappings, the 12C14N sputtered ion intensity is measured in cps. The field of view covers an area of 10 × 10 µm2. The other video, Mg_nanoparticles_video_mpeg2video.mpg, shows a 3D reconstruction. This reconstruction makes use of the information from SIMS and SPM and shows the accurate distribution of Mg(OH)2 nano-clusters located in the sputtered volume (field of view: 11.1 × 10.9 × 0.46 µm3). The recorded 24Mg16O intensity is shown in cps.

Supporting Information File 1: Animated videos of sputter experiment and data reconstruction.
Format: ZIP Size: 11.1 MB Download
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