Continuum models of focused electron beam induced processing

Milos Toth, Charlene Lobo, Vinzenz Friedli, Aleksandra Szkudlarek and Ivo Utke
Beilstein J. Nanotechnol. 2015, 6, 1518–1540.

Cite the Following Article

Continuum models of focused electron beam induced processing
Milos Toth, Charlene Lobo, Vinzenz Friedli, Aleksandra Szkudlarek and Ivo Utke
Beilstein J. Nanotechnol. 2015, 6, 1518–1540.

How to Cite

Toth, M.; Lobo, C.; Friedli, V.; Szkudlarek, A.; Utke, I. Beilstein J. Nanotechnol. 2015, 6, 1518–1540. doi:10.3762/bjnano.6.157

Download Citation

Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window below.
Citation data in RIS format can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Zotero.

Citations to This Article

Up to 20 of the most recent references are displayed here.

Scholarly Works

  • Höflich, K.; Hobler, G.; Allen, F. I.; Wirtz, T.; Rius, G.; McElwee-White, L.; Krasheninnikov, A. V.; Schmidt, M.; Utke, I.; Klingner, N.; Osenberg, M.; Córdoba, R.; Djurabekova, F.; Manke, I.; Moll, P.; Manoccio, M.; De Teresa, J. M.; Bischoff, L.; Michler, J.; De Castro, O.; Delobbe, A.; Dunne, P.; Dobrovolskiy, O. V.; Frese, N.; Gölzhäuser, A.; Mazarov, P.; Koelle, D.; Möller, W.; Pérez-Murano, F.; Philipp, P.; Vollnhals, F.; Hlawacek, G. Roadmap for focused ion beam technologies. Applied Physics Reviews 2023, 10. doi:10.1063/5.0162597
  • Mason, N. J.; Pintea, M.; Csarnovics, I.; Fodor, T.; Szikszai, Z.; Kertész, Z. Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition. ACS omega 2023, 8, 24233–24246. doi:10.1021/acsomega.3c00793
  • Castillo-Robles, S.; Ponce-Pérez, R.; Paez-Ornelas, J.; Hoat, D.; Reyes-Serrato, A.; Guerrero-Sanchez, J. Furfural adsorption on the g-C3N4 monolayer: A DFT analysis. Materials Today Communications 2023, 35, 106288. doi:10.1016/j.mtcomm.2023.106288
  • Jurczyk, J.; Höflich, K.; Madajska, K.; Berger, L.; Brockhuis, L.; Edwards, T. E. J.; Kapusta, C.; Szymańska, I. B.; Utke, I. Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition. Nanomaterials (Basel, Switzerland) 2023, 13, 1516. doi:10.3390/nano13091516
  • Priebe, A.; Michler, J. Review of Recent Advances in Gas-Assisted Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS). Materials (Basel, Switzerland) 2023, 16, 2090. doi:10.3390/ma16052090
  • Kuprava, A.; Huth, M. Fast and Efficient Simulation of the FEBID Process with Thermal Effects. Nanomaterials (Basel, Switzerland) 2023, 13, 858. doi:10.3390/nano13050858
  • Prosvetov, A.; Verkhovtsev, A. V.; Sushko, G.; Solov'yov, A. V. Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me$$_2$$Au(tfac). The European Physical Journal D 2023, 77. doi:10.1140/epjd/s10053-023-00598-5
  • Gökırmak Söğüt, E.; Gülcan, M. Adsorption: basics, properties, and classification. Adsorption through Advanced Nanoscale Materials; Elsevier, 2023; pp 3–21. doi:10.1016/b978-0-443-18456-7.00001-8
  • Dobrovolskiy, O. V.; Pylypovskyi, O. V.; Skoric, L.; Fernández-Pacheco, A.; Van Den Berg, A.; Ladak, S.; Huth, M. Complex-Shaped 3D Nanoarchitectures for Magnetism and Superconductivity. Topics in Applied Physics; Springer International Publishing, 2022; pp 215–268. doi:10.1007/978-3-031-09086-8_5
  • Prosvetov, A.; Verkhovtsev, A. V.; Sushko, G.; Solov'yov, A. V. Atomistic simulation of the FEBID-driven growth of iron-based nanostructures. Physical chemistry chemical physics : PCCP 2022, 24, 10807–10819. doi:10.1039/d2cp00809b
  • Utke, I.; Swiderek, P.; Höflich, K.; Madajska, K.; Jurczyk, J.; Martinović, P.; Szymańska, I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coordination Chemistry Reviews 2022, 458, 213851. doi:10.1016/j.ccr.2021.213851
  • Bilgilisoy, E.; Yu, J.-C.; Preischl, C.; McElwee-White, L.; Steinrück, H.-P.; Marbach, H. Nanoscale Ruthenium-Containing Deposits from Ru(CO)4I2 via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond. ACS Applied Nano Materials 2022, 5, 3855–3865. doi:10.1021/acsanm.1c04481
  • Elbadawi, C.; Kianinia, M.; Bendavid, A.; Lobo, C. J. Charged Particle Induced Etching and Functionalization of Two-Dimensional Materials. ECS Journal of Solid State Science and Technology 2022, 11, 35011–035011. doi:10.1149/2162-8777/ac5eb2
  • Huth, M.; Porrati, F.; Barth, S. Living up to its potential—Direct-write nanofabrication with focused electron beams. Journal of Applied Physics 2021, 130, 170901. doi:10.1063/5.0064764
  • Pablo-Navarro, J.; Sangiao, S.; Magén, C.; de Teresa, J. M. Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology. Magnetochemistry 2021, 7, 140. doi:10.3390/magnetochemistry7100140
  • Prosvetov, A.; Verkhovtsev, A. V.; Sushko, G. B.; Solov’yov, A. V. Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF3)4. Beilstein journal of nanotechnology 2021, 12, 1151–1172. doi:10.3762/bjnano.12.86
  • Winkler, R.; Fowlkes, J. D.; Rack, P. D.; Kothleitner, G.; Plank, H. Shape evolution and growth mechanisms of 3D-printed nanowires. Additive Manufacturing 2021, 46, 102076. doi:10.1016/j.addma.2021.102076
  • Dyck, O.; Lupini, A. R.; Rack, P. D.; Fowlkes, J. D.; Jesse, S. Controlling hydrocarbon transport and electron beam induced deposition on single layer graphene: Toward atomic scale synthesis in the scanning transmission electron microscope. Nano Select 2021, 3, 643–654. doi:10.1002/nano.202100188
  • Hinum-Wagner, J. W.; Kuhness, D.; Kothleitner, G.; Winkler, R.; Plank, H. FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality. Nanomaterials (Basel, Switzerland) 2021, 11, 1527. doi:10.3390/nano11061527
  • Gale, A.; Fröch, J. E.; Kianinia, M.; Bishop, J. W.; Aharonovich, I.; Toth, M. Recoil implantation using gas-phase precursor molecules. Nanoscale 2021, 13, 9322–9327. doi:10.1039/d1nr00850a
Other Beilstein-Institut Open Science Activities