The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Rachel M. Thorman, Ragesh Kumar T. P., D. Howard Fairbrother and Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926. https://doi.org/10.3762/bjnano.6.194

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Focused particle beam-induced processing

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