The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Scholarly Works

• Mészáros, D.; Matejčík, Š.; Papp, P. Formation of negative ions from cobalt tricarbonyl nitrosyl Co(CO)3NO clusters. Physical chemistry chemical physics : PCCP 2024, 26, 7522–7533. doi:10.1039/d3cp05601e
• Butrymowicz-Kubiak, A.; Luba, W.; Madajska, K.; Muzioł, T.; Szymańska, I. B. Pivalate complexes of copper(ii) with aliphatic amines as potential precursors for depositing nanomaterials from the gas phase. New Journal of Chemistry 2024. doi:10.1039/d3nj04959k
• Pandey, M.; Antony, B. Calculations of electron scattering cross sections from tungsten precursors used in FEBID. Journal of Electron Spectroscopy and Related Phenomena 2024, 271, 147430. doi:10.1016/j.elspec.2024.147430
• Gacka, E.; Pruchnik, B. C.; Tamulewicz-Szwajkowska, M.; Badura, D.; Rangelow, I.; Gotszalk, T. P. Fabrication of Focused Ion Beam-Deposited Nanowire Probes for Conductive Atomic Force Microscopy. Elsevier BV 2024. doi:10.2139/ssrn.4697037
• Piasecki, T.; Kwoka, K.; Gacka, E.; Kunicki, P.; Gotszalk, T. Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices. Nanotechnology 2023, 35, 115502. doi:10.1088/1361-6528/ad13c0
• Bilgilisoy, E.; Kamali, A.; Gentner, T. X.; Ballmann, G.; Harder, S.; Steinrück, H.-P.; Marbach, H.; Ingólfsson, O. A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2. Beilstein journal of nanotechnology 2023, 14, 1178–1199. doi:10.3762/bjnano.14.98
• Höflich, K.; Hobler, G.; Allen, F. I.; Wirtz, T.; Rius, G.; McElwee-White, L.; Krasheninnikov, A. V.; Schmidt, M.; Utke, I.; Klingner, N.; Osenberg, M.; Córdoba, R.; Djurabekova, F.; Manke, I.; Moll, P.; Manoccio, M.; De Teresa, J. M.; Bischoff, L.; Michler, J.; De Castro, O.; Delobbe, A.; Dunne, P.; Dobrovolskiy, O. V.; Frese, N.; Gölzhäuser, A.; Mazarov, P.; Koelle, D.; Möller, W.; Pérez-Murano, F.; Philipp, P.; Vollnhals, F.; Hlawacek, G. Roadmap for focused ion beam technologies. Applied Physics Reviews 2023, 10. doi:10.1063/5.0162597
• Winkler, R.; Brugger-Hatzl, M.; Porrati, F.; Kuhness, D.; Mairhofer, T.; Seewald, L. M.; Kothleitner, G.; Huth, M.; Plank, H.; Barth, S. Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition. Nanomaterials (Basel, Switzerland) 2023, 13, 2907. doi:10.3390/nano13212907
• Kopyra, J.; Abdoul-Carime, H. Fragmentation of metal(II) bis(acetylacetonate) complexes induced by slow electrons. Beilstein journal of nanotechnology 2023, 14, 980–987. doi:10.3762/bjnano.14.81
• Kamali, A.; Carden, W. G.; Johnson, J. V.; McElwee-White, L.; Ingólfsson, O. Dissociative electron attachment and dissociative ionization of CF3AuCNC(CH3)3, a potential FEBID precursor for gold deposition. The European Physical Journal D 2023, 77. doi:10.1140/epjd/s10053-023-00721-6
• Abdulzahra, N. Z. Non-Distractive Testing and Alloying by Nanosecond Nd: Yag Laser Technique as Alternative Method to Find Nano -ZnO/Al Different Properties. Lasers in Manufacturing and Materials Processing 2023, 10, 522–547. doi:10.1007/s40516-023-00218-5
• Fallica, R.; Mahne, N.; Conard, T.; Vanleenhove, A.; de Simone, D.; Nannarone, S. Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV. ACS applied materials & interfaces 2023, 15, 35483–35494. doi:10.1021/acsami.3c05884
• Mason, N. J.; Pintea, M.; Csarnovics, I.; Fodor, T.; Szikszai, Z.; Kertész, Z. Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition. ACS omega 2023, 8, 24233–24246. doi:10.1021/acsomega.3c00793
• Pintea, M.; Mason, N.; Peiró-Franch, A.; Clark, E.; Samanta, K.; Glessi, C.; Schmidtke, I. L.; Luxford, T. Dissociative electron attachment to gold(I)-based compounds: 4,5-dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I). Frontiers in chemistry 2023, 11, 1028008. doi:10.3389/fchem.2023.1028008
• Andreides, B.; Verkhovtsev, A. V.; Fedor, J.; Solov'yov, A. V. Role of the Molecular Environment in Quenching the Irradiation-Driven Fragmentation of Fe(CO)5: A Reactive Molecular Dynamics Study. The journal of physical chemistry. A 2023, 127, 3757–3767. doi:10.1021/acs.jpca.2c08756
• Martinović, P.; Barnewitz, L.; Rohdenburg, M.; Swiderek, P. Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation. Journal of Vacuum Science & Technology A 2023, 41. doi:10.1116/6.0002306
• Hliavitskaya, T.; Plisko, T.; Bildyukevich, A.; Liubimova, A.; Shumskaya, A.; Mikchalko, A.; Rogachev, A. A.; Melnikova, G. B.; Pratsenko, S. A. Novel Hydrophobic Ultrafiltration Membranes for Treatment of Oil-Contaminated Wastewater. Membranes 2023, 13, 402. doi:10.3390/membranes13040402
• Abdoul-Carime, H.; Mounier, F.; Charlieux, F.; André, H. Correlated ion-(ion/neutral) time of flight mass spectrometer. The Review of scientific instruments 2023, 94. doi:10.1063/5.0141540
• Prosvetov, A.; Verkhovtsev, A. V.; Sushko, G.; Solov'yov, A. V. Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me$$_2$$Au(tfac). The European Physical Journal D 2023, 77. doi:10.1140/epjd/s10053-023-00598-5
• Fowlkes, J. D.; Winkler, R.; Rack, P. D.; Plank, H. 3D Nanoprinting Replication Enhancement Using a Simulation-Informed Analytical Model for Electron Beam Exposure Dose Compensation. ACS omega 2023, 8, 3148–3175. doi:10.1021/acsomega.2c06596

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