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Beilstein J. Nanotechnol. 2025, 16, 1873–1882, doi:10.3762/bjnano.16.130
Figure 1: (a–c) Scanning electron micrograph of the probe, featuring a Si–N triangular cantilever released fr...
Figure 2: (a) Detector output noise equivalent displacement PSD and individual contributions. (b) Noise contr...
Figure 3: (a) Magnitude and (b) phase of the microwave resonator’s reflection coefficient S11 measured during...
Figure 4: (a) AM-AFM imaging of the calibration grating over a 1 µm × 1 µm scan area containing a single vert...
Figure 5: (a) FM-AFM imaging (trace) of the calibration grating over a 1 µm × 0.8 µm scan area. (b, c) Averag...
Figure 6: (a) SEM image of the second test sample. The zoomed inset highlights the area imaged with FM-AFM in...
Beilstein J. Nanotechnol. 2024, 15, 242–255, doi:10.3762/bjnano.15.23
Figure 1: (a) Scanning electron microscope (SEM) image of a fabricated sensor seen from an angled topside vie...
Figure 2: (a) Distribution of longitudinal strain at the surface for displacement in the z direction, εxx(x, y...
Figure 3: (a) Microwave simulations of the normalized current density of the first electromagnetic eigenfrequ...
Figure 4: (a) Simulated quality factors Qtot, Qext, and Qint and (b) coupling parameter η = Qint/(Qint + Qext...
Figure 5: (a–h) Illustration of the main fabrication steps for one device (not to scale). Details of each ste...
Figure 6: (a) An SEM image of a top-tilted view of an electron-beam deposited platinum tip on the released Si...
Figure 7: Mechanical resonant frequency ωm of a long cantilever as a function of the radial distance D from t...
Figure 8: (a) Schematic of the measurement setup. The excitation signal is band-pass filtered at room tempera...
Figure 9: Temperature-dependent (a) magnitude and (b) phase response of the microwave resonator as functions ...
Figure 10: (a) Illustration of the pump-drive scheme for phase-sensitive detection of the mechanical oscillati...