8 article(s) from Hlawacek, Gregor
- Full Research Paper
- Published 11 Dec 2020
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Figure 1: (a) Schematic representation of the STIM experiment. (b) Picture of the inner part of the chamber. ...
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Figure 2: Micrographs of lacey carbon on carbon film. (a) Secondary electron imaging mode, (b) bright-field S...
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Figure 3: Bright-field image showing contrast due to the dependence of the exit angle on the material and the...
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Figure 4: Helium ion microscopy images of the nanoporous polycrystalline silicon membrane. (a) SE image. (b) ...
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Figure 5: Thallium chloride evaporated on a TEM grid. (a) Secondary electron image. Inset of (a) shows the re...
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Figure 6: STIM images of a single-crystalline silicon ⟨100⟩ membrane in (a) bright-field with θ ≤ 1.09°, and ...
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- Full Research Paper
- Published 18 Nov 2020
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Figure 1: Comparison of the spot size (imaging resolution) as a function of the ion beam current for differen...
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Figure 2: Mass spectrum of a Ga33Bi57Li10 LMAIS at an acceleration potential of 10 kV scanned by the ExB volt...
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Figure 3: Examples using different ions: a) 30 keV He+, field of view (FOV): 1.5 × 1.5 µm2, trench width: 4 n...
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Figure 4: Summary of the imaging resolution (80/20), experimentally achieved trench width, and simulated mini...
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Figure 5: SRIM simulation [39] of the sputter profile from a 30 keV point-like beam in a gold substrate as a func...
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Figure 6: Comparison of the normalized ion beam profiles (normalized half profiles = beam radius) obtained fr...
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- Full Research Paper
- Published 26 Aug 2020
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Figure 1: AFM assembly and integration inside a Zeiss ORION NanoFab helium ion microscope. a) Simplified CAD ...
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Figure 2: Correlative imaging in process on silicon pillars. a) Optical image showing how the AFM cantilever ...
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Figure 3: AFM height images of poly(methyl methacrylate) after exposure to a) 1 × 1013 and b) 3 × 1013 He ion...
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- Full Research Paper
- Published 07 Aug 2019
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Figure 1: Schematic of the transmission helium ion microscope (THIM).
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Figure 2: For a BN sample, the voltage of Lens 2 was decreased from (A) to (E). A) A shadow image, B) a highe...
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Figure 3: Examples of overfocus bright outline deflection patterns (A and D), underfocus spot patterns (B and...
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Figure 4: A) HIM SE image with charge compensation by electron flooding and B) HIM SE image without charge co...
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Figure 5: A) A THIM through-focus series of the MgO sample (coated with 10 nm Au on both sides) produced by d...
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Supp. Info
- Full Research Paper
- Published 16 Nov 2018
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Figure 1: Cross-sectional Si plasmon-loss TEM images showing the Si NC formation in buried SiO2 layers of (a)...
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Figure 2: Computer simulation of broad-beam ion mixing and nanocluster formation by thermal decomposition in ...
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Figure 3: Comparison of different irradiation and thermal treatment conditions. In (a) and (b) low (85 Si+ nm...
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Figure 4: Static TRIDYN-based simulation of the mixing efficiency for broad (a) and focused (b) beam irradiat...
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Figure 5: Simulation of the formation of a single row of Si NCs by line irradiation. The sample is composed o...
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Figure 6: Detection of a single Si NC in SiO2. (a) Si plasmon-loss filtered TEM image. A single Si NC (white)...
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- Full Research Paper
- Published 24 Jul 2013
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Figure 1: HIM SE image of a Au{111} surface, exposed to a He+ beam with a fluence of 8.4 × 1017 cm−2 at diffe...
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Figure 2: HIM SE images of the pattern that develops on the Au{111} surface as a function of ion fluence. Num...
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Figure 3: (a) Two blisters created by the 35 keV He+ beam on grains with different azimuthal orientation. FOV...
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Figure 4: Dependence of the Au{111} average pattern periodicity on helium fluence for 15 keV (red circles), 2...
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Figure 5: (a) Surface profiles after different ion fluences delivered by a 35 keV beam. The surface is evenly...
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- Full Research Paper
- Published 12 Jul 2012
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Figure 1: HIM images with a FoV of 20 μm of thin organic layers on Si{001}. Data was recorded with a PE of 15...
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Figure 2: HIM images of single-layer 6P islands on Si{001}, recorded with PE of 20 keV and an ion dose of 3.2...
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Figure 3: Co-containing nanocrystals on Ge{001} (FoV: 1 μm) (a) High-resolution ET image obtained with a PE o...
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Figure 4: Simulation of dechanneling contrast for clean and carbon-covered Si. The graphs show the opaque fra...
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- Full Research Paper
- Published 10 Jul 2012
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Figure 1: HIM SE images of the hydrogen-flame-annealed polycrystalline Au{111} film taken with a PE of 15 keV...
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Figure 2: HIM BSHe images of the hydrogen-flame-annealed polycrystalline Au{111} film. A PE of 20 keV and an ...
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Figure 3: Comparison of contrast evolution in a standard HV and the used UHV HIM. The SE yield, which is prop...
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Figure 4: SE yield and opaque fraction for a polar angle of 35° with respect to the (111) plane. The azimutha...
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Figure 5: Calculated map of channeling directions for an fcc crystal. The lines connecting the nodes at low-i...
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Figure 6: Color-coded orientation map of a polycrystalline gold film. The colors indicate the azimuthal angle...
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