1 article(s) from Kennedy, Noel
Schematic depicting MLD processing applied to silicon on insulator wafers. It shows monolayer forma...
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Electrochemical capacitance–voltage profile showing the impact of applying a SiO2 capping layer for...
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AFM images of (a) as received SOI (b) SOI after MLD processing.
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ECV plot of active carrier concentrations in a 66 nm SOI after MLD using a 50 nm sputtered SiO2 cap...
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ECV plot of active carrier concentrations using bulk silicon samples to analyse the variation of th...
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X-ray photoelectron spectroscopy (XPS) study showing that there is a degree of surface oxidation af...
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Secondary ion mass spectrometry analysis of a P-MLD-doped 66 nm silicon on insulator substrate. Blu...
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Beilstein J. Nanotechnol. 2018, 9, 2106–2113, doi:10.3762/bjnano.9.199
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