Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment

• Ann-Kathrin Kleinschmidt,
• Lars Barzen,
• Johannes Strassner,
• Christoph Doering,
• Henning Fouckhardt,
• Wolfgang Bock,
• Michael Wahl and
• Michael Kopnarski

Beilstein J. Nanotechnol. 2016, 7, 1783–1793, doi:10.3762/bjnano.7.171

• -etching is an essential step of many lithographic processes, e.g., in semiconductor device fabrication, and offers several advantages over wet-etching as for instance the opportunity to achieve anisotropic etching and vertical etch flanks [10][11]. As the requirements for accuracy in microfabrication

Nano- and microstructured materials for in vitro studies of the physiology of vascular cells

• Alexandra M. Greiner,
• Adria Sales,
• Hao Chen,
• Sarah A. Biela,
• Dieter Kaufmann and
• Ralf Kemkemer

Beilstein J. Nanotechnol. 2016, 7, 1620–1641, doi:10.3762/bjnano.7.155

• desired surface feature size. In particular, some methods are not suited for structuring surface topographies in the nanometer range. 1.2 Microfabrication techniques Microfabrication techniques are mainly used to generate surface structures in the micrometer range, which is the size scale of cells. In

• order to give an overview of different microfabrication techniques, relevant examples for different approaches such as optical (photolithography [49]), mechanical (hot embossing [50] and surface cracking [51][52]) or chemical (replica molding [53][54], phase separation micromolding [55][56][57], gas

• nanostructures of few tens of nanometers, for example (Figure 4B) [53] After further modifications, the elastomer substrate can be used for cell experiments. Phase separation micromolding is an alternative, less common microfabrication technique for structured substrates. This technique consists of separating a

A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

• Tobias Meier,
• Alexander Förste,
• Ali Tavassolizadeh,
• Karsten Rott,
• Dirk Meyners,
• Roland Gröger,
• Günter Reiss,
• Eckhard Quandt,
• Thomas Schimmel and
• Hendrik Hölscher

Beilstein J. Nanotechnol. 2015, 6, 451–461, doi:10.3762/bjnano.6.46

• ]. Micro-machined cantilevers on the other hand are more versatile and can be mass-produced [21]. Additionally, cantilevers produced by silicon-based microfabrication methods allow for the integration of multiple additional features such as doping for better electrical conductance or the integration of

Poly(styrene)/oligo(fluorene)-intercalated fluoromica hybrids: synthesis, characterization and self-assembly

• Giuseppe Leone,
• Francesco Galeotti,
• William Porzio,
• Guido Scavia,
• Luisa Barba,
• Gianmichele Arrighetti,
• Giovanni Ricci,
• Chiara Botta and
• Umberto Giovanella

Beilstein J. Nanotechnol. 2014, 5, 2450–2458, doi:10.3762/bjnano.5.254

• microfabrication system. Such patterns hold great promise for several up-to-date applications, including nanostructures for optoelectronic devices [28][29][30], microfiltration membranes [31][32], and plasmonic sensors [33]. In a recently published study [11], we applied the BF pattering technique to a hybrid

Purification of ethanol for highly sensitive self-assembly experiments

• Kathrin Barbe,
• Martin Kind,
• Christian Pfeiffer and
• Andreas Terfort

Beilstein J. Nanotechnol. 2014, 5, 1254–1260, doi:10.3762/bjnano.5.139

• modification [4], e.g., as etch resist for microfabrication [5][6], as support for molecular systems like metal-organic frameworks or biomolecules [7], or for the tuning of electronic properties of metal surfaces [8][9][10][11][12], to mention just a few. One reason for the popularity of SAMs is their ease of

Highly NO₂ sensitive caesium doped graphene oxide conductometric sensors

• Carlo Piloto,
• Marco Notarianni,
• Mahnaz Shafiei,
• Elena Taran,
• Dilini Galpaya,
• Cheng Yan and
• Nunzio Motta

Beilstein J. Nanotechnol. 2014, 5, 1073–1081, doi:10.3762/bjnano.5.120

• Strategy to provide nano and microfabrication facilities for Australia’s researchers.

qPlus magnetic force microscopy in frequency-modulation mode with millihertz resolution

• Maximilian Schneiderbauer,
• Daniel Wastl and
• Franz J. Giessibl

Beilstein J. Nanotechnol. 2012, 3, 174–178, doi:10.3762/bjnano.3.18

• , magnetically coated silicon cantilevers are used. These cantilevers are produced in large quantity by microfabrication techniques. Typical probe features are spring constants on the order of 10 Nm−1 and resonance frequencies of about 100 kHz. Another type of force sensor is made from a quartz (SiO2) tuning

Fabrication of multi-parametric platforms based on nanocone arrays for determination of cellular response

• Lindarti Purwaningsih,
• Tobias Schoen,
• Tobias Wolfram,
• Claudia Pacholski and
• Joachim P. Spatz

Beilstein J. Nanotechnol. 2011, 2, 545–551, doi:10.3762/bjnano.2.58

• both [7] have been conducted, which has led to the accumulation of basic knowledge concerning cell morphology changes. However, long-term cellular response to nanostructures has not been understood due to the lack of material integrity. In addition, mainly standard microfabrication techniques including

Magnetic nanoparticles for biomedical NMR-based diagnostics

• Huilin Shao,
• Tae-Jong Yoon,
• Monty Liong,
• Ralph Weissleder and
• Hakho Lee

Beilstein J. Nanotechnol. 2010, 1, 142–154, doi:10.3762/bjnano.1.17

• nanomaterials, bioconjugation chemistry and microfabrication. As a novel technique, DMR offers a number of unique advantages, such as high detection sensitivity, rapid target measurement from minimal sample volumes, and the ability to profile a wide range of targets in a multiplexed manner. With new

Sensing surface PEGylation with microcantilevers

• Natalija Backmann,
• Natascha Kappeler,
• Thomas Braun,
• François Huber,
• Hans-Peter Lang,
• Christoph Gerber and
• Roderick Y. H. Lim

Beilstein J. Nanotechnol. 2010, 1, 3–13, doi:10.3762/bjnano.1.2

• ) and the Swiss National Science Foundation. We would like to gratefully acknowledge the Cleven Becker Foundation. We also express our thanks to IBM Research (IBM Zurich Research GmbH) for microfabrication support.