Beilstein J. Nanotechnol.2012,3, 852–859, doi:10.3762/bjnano.3.96
chemisorbed on the surface, and a small portion will be ionized (required energy Te: 13.6 eV). The atomic ionimplantation may also hydrogenate the other side of the surface layer and even some other subsurface layers. The 3.5 eV plasma used in this work results in an ion impact energy (εi) of 12.6 eV on the
PDF
Figure 1:
The two-dimensional material consisting of carbon atoms in honeycomb orientation, graphene (a), los...
Beilstein J. Nanotechnol.2012,3, 579–585, doi:10.3762/bjnano.3.67
the lamella. The purpose of this exposure geometry was to produce a wedge shape of silicon within the lamella so that we could observe the minimum thickness dimensions which can be fabricated by HIM. It also allows us to analyze the subsurface modification effects due to helium ionimplantation. All
PDF
Figure 1:
(a) SEM image of the silicon lamella (sample 1) after FIB preparation. (b) HAADF TEM image of the s...