Search for "PE-ALD" in Full Text gives 4 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2020, 11, 899–910, doi:10.3762/bjnano.11.75
Beilstein J. Nanotechnol. 2019, 10, 746–759, doi:10.3762/bjnano.10.74
Beilstein J. Nanotechnol. 2017, 8, 467–474, doi:10.3762/bjnano.8.50
Beilstein J. Nanotechnol. 2013, 4, 732–742, doi:10.3762/bjnano.4.83