Evaluating metal-organic precursors for focused ion beam-induced deposition through solid-layer decomposition analysis

• Benedykt R. Jany,
• Katarzyna Madajska,
• Aleksandra Butrymowicz-Kubiak,
• Franciszek Krok and
• Iwona B. Szymańska

Beilstein J. Nanotechnol. 2025, 16, 1942–1951, doi:10.3762/bjnano.16.135

• irradiation differs from gas-phase deposition, we think that our method can be employed to optimize pre-screen and score new potential precursors for FIB applications by significantly reducing the time required and conserving valuable resources. Keywords: backscattered electrons (BSE); carboxylates; energy

Sidewall angle tuning in focused electron beam-induced processing

• Sangeetha Hari,
• Willem F. van Dorp,
• Johannes J. L. Mulders,
• Piet H. F. Trompenaars,
• Pieter Kruit and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2024, 15, 447–456, doi:10.3762/bjnano.15.40

• typically has a Gaussian shape with long tails. This is caused by a combination of the Gaussian current distribution in the primary electron (PE) beam and the spatial distribution of scattered electrons, consisting of backscattered electrons (BSE) and secondary electrons originating from the PE beam (SE1

Formation of nanoflowers: Au and Ni silicide cores surrounded by SiO_x branches

• Feitao Li,
• Siyao Wan,
• Dong Wang and
• Peter Schaaf

Beilstein J. Nanotechnol. 2023, 14, 133–140, doi:10.3762/bjnano.14.14

• signals from secondary electrons and backscattered electrons (BSE) to minimize charging effects due to the bad electrical conductivity of the SiO2 layer. In addition, the composition information related to the Z-contrast was obtained by the BSE detector because the areas rich in elements with higher

Gas-assisted silver deposition with a focused electron beam

• Luisa Berger,
• Katarzyna Madajska,
• Iwona B. Szymanska,
• Katja Höflich,
• Mikhail N. Polyakov,
• Jakub Jurczyk,
• Carlos Guerra-Nuñez and
• Ivo Utke

Beilstein J. Nanotechnol. 2018, 9, 224–232, doi:10.3762/bjnano.9.24

• radial density distribution (black) of backscattered electrons (BSE) generated at the surface of a silicon bulk substrate by a Gaussian primary electron (PE) beam of 25 keV and 400 nm FWHM was simulated with the CASINO Monte Carlo software (v3.3) and is displayed in Figure 1c. The central part of both

Electron-beam induced deposition and autocatalytic decomposition of Co(CO)₃NO

• Florian Vollnhals,
• Martin Drost,
• Fan Tu,
• Esther Carrasco,
• Andreas Späth,
• Rainer H. Fink,
• Hans-Peter Steinrück and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2014, 5, 1175–1185, doi:10.3762/bjnano.5.129

• enhanced yield of backscattered electrons (BSE) and thereby induced secondary electrons. Indeed, Monte-Carlo simulations using the software CASINO (v. 2.42) [27] show an increase in the BSE emission coefficient by more than 20% for a 5 nm layer of Co0.51O0.24N0.14C0.11 (composition reported by Gazzadi et