Beilstein J. Nanotechnol.2025,16, 1873–1882, doi:10.3762/bjnano.16.130
fulfills the specific requirements of the application. The latter is indeed the case for forcesensing in atomic force microscopy (AFM). Force transduction at maximum sensitivity requires detecting the position of a “test mass”, while minimizing the added noise introduced by the detection itself [14][15
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Figure 1:
(a–c) Scanning electron micrograph of the probe, featuring a Si–N triangular cantilever released fr...
Beilstein J. Nanotechnol.2024,15, 242–255, doi:10.3762/bjnano.15.23
-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor’s operation as an electromechanical transducer of force.
Keywords: atomic force microscopy; forcesensing
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Figure 1:
(a) Scanning electron microscope (SEM) image of a fabricated sensor seen from an angled topside vie...