Laser processing of thin-film multilayer structures: comparison between a 3D thermal model and experimental results

• Babak B. Naghshine and
• Amirkianoosh Kiani

Beilstein J. Nanotechnol. 2017, 8, 1749–1759, doi:10.3762/bjnano.8.176

• can have many potential applications including patterning the cell growth for biomedical applications and controlling the grain size in fabrication of polycrystalline silicon (poly-Si) thin-film transistors (TFTs). Keywords: 3D transient modelling; heat transfer; laser materials processing

• application is finding the best laser parameters and layer thickness for controlling the size of heat affected zone and ablated zone for patterning the cell, as mentioned in the previous paragraph. Despite the necessity for thermal modelling of this process, there have been very few efforts in this area so

• . However, the molten zone is very small for gold coated samples, which means the deeper holes created on the gold coated surface are mainly caused by the lower plasma absorption. The results presented in this paper can be manipulated for cell patterning applications. Figure 3 depicts that, the size and

Effect of the fluorination technique on the surface-fluorination patterning of double-walled carbon nanotubes

• Lyubov G. Bulusheva,
• Yuliya V. Fedoseeva,
• Emmanuel Flahaut,
• Jérémy Rio,
• Christopher P. Ewels,
• Victor O. Koroteev,
• Gregory Van Lier,
• Denis V. Vyalikh and
• Alexander V. Okotrub

Beilstein J. Nanotechnol. 2017, 8, 1688–1698, doi:10.3762/bjnano.8.169

• possibility of different patterning of carbon surfaces through choosing the fluorination method. Keywords: double-walled carbon nanotubes; fluorination; NEXAFS; quantum-chemical modeling; Introduction Even after surface chemical functionalization, due to their inner shell double-walled carbon nanotubes

• , gaseous BrF3 at room temperature, and CF4 plasma under mild working conditions. It was found that the resultant composition and fluorination patterning of the sample depend on the fluorination method. In the case of two latter samples, Raman spectroscopy unambiguously indicated a fluorination of the outer

Fixation mechanisms of nanoparticles on substrates by electron beam irradiation

• Daichi Morioka,
• Tomohiro Nose,
• Taiki Chikuta,
• Kazutaka Mitsuishi and
• Masayuki Shimojo

Beilstein J. Nanotechnol. 2017, 8, 1523–1529, doi:10.3762/bjnano.8.153

• -1 Sengen, Tsukuba, 305-0047, Japan 10.3762/bjnano.8.153 Abstract For applications such as the fabrication of plasmonic waveguides we developed a patterning technique to fabricate an array of nanoparticles on a substrate using focused electron beams (Noriki, T.; Abe, S.;.Kajikawa, K.; Shimojo, M

• -scattering leads to an increase in line width and thus reduces the resolution of this patterning technique. Keywords: accelerating voltage; electron beam; gold; Monte Carlo simulation; nanoparticle array; Introduction Techniques to fabricate assemblies or arrays of nanostructures on a desired area have

Micro- and nano-surface structures based on vapor-deposited polymers

• Hsien-Yeh Chen

Beilstein J. Nanotechnol. 2017, 8, 1366–1374, doi:10.3762/bjnano.8.138

• such as light-directed patterning and direct-writing approaches. The limitations for patterning on non-flat surfaces are resolution and cost. With the requirement of chemical control and/or precise accessibility to the linkage with functional molecules, chemically and topographically defined interfaces

• have recently attracted considerable attention. The multifunctional, gradient, and/or synergistic activities of using such interfaces are also discussed. Finally, an emerging discovery of selective deposition of polymer coatings and the bottom-up patterning approach by using the selective deposition

• technology is demonstrated. Keywords: multifunctional; polymer coating; surface modification; surface patterning; vapor deposition; Review Introduction Vapor-based processes of polymer coating/deposition combine many unique attributes in a dry, solvent-free process, and the deposition protocols as well as

Nanotopographical control of surfaces using chemical vapor deposition processes

• Meike Koenig and
• Joerg Lahann

Beilstein J. Nanotechnol. 2017, 8, 1250–1256, doi:10.3762/bjnano.8.126

• is the structured coating of the substrate by initiator molecules in surface-initiated vapor-deposition polymerization. With this method, the polymer only grows on those locations on the surface equipped with predeposited initiator molecules. The patterning of the initiator can be achieved using

• ]. Due to secondary adsorption on deactivated monomers, the authors found a maximum thickness of selectively grown polymer depending on the metal and the monomer type. Iron was found to be the most efficient inhibitor for the investigated polymers. By patterning iron molecules via photolithography or

• results in the deactivation of the reactive monomer species on the surface. Patterning was realized by placing conducting aluminum metal channels on a nonconductive glass surface [24]. The selective growth of various polymers was also found for surfaces equipped with different functional groups. This

A top-down approach for fabricating three-dimensional closed hollow nanostructures with permeable thin metal walls

• Carlos Angulo Barrios and
• Víctor Canalejas-Tejero

Beilstein J. Nanotechnol. 2017, 8, 1231–1237, doi:10.3762/bjnano.8.124

• is typically required to create integrated systems based on multifunctional devices on a chip. For the latter purpose, top-down approaches based on fabrication methods used in the microelectronics industry are particularly well-suited because of the patterning design flexibility and controllability

• thick walls on planar substrates is presented. The method consists of three sequential, standard microelectronic processes: 1) lithographic patterning of an organic polymer resist film; 2) deposition of a thin film of metal on all surfaces of the nanopattern resist; and 3) removal of the polymer resist

Preparation of thick silica coatings on carbon fibers with fine-structured silica nanotubes induced by a self-assembly process

• Benjamin Baumgärtner,
• Hendrik Möller,
• Thomas Neumann and
• Dirk Volkmer

Beilstein J. Nanotechnol. 2017, 8, 1145–1155, doi:10.3762/bjnano.8.116

• of the fiber with LPEI aggregates can be obtained which serves as both catalyst and template in the following mineralization step. The nature of LPEI enables access to a nanostructured patterning of the resulting silica shell. LPEI/silica composite particles and their immobilization on carbon fibers

• mediated by LPEI (inset: surface patterning of the neat carbon fiber) and b) close-up image of a silica shell fragment. Scanning electron micrographs of mineralized LPEI aggregates modified by copper nitrate addition, a) disk-like morphology of a complete particle, b) close-up image of the linear

CVD transfer-free graphene for sensing applications

• Chiara Schiattarella,
• Sten Vollebregt,
• Tiziana Polichetti,
• Brigida Alfano,
• Ettore Massera,
• Maria Lucia Miglietta,
• Girolamo Di Francia and
• Pasqualina Maria Sarro

Beilstein J. Nanotechnol. 2017, 8, 1015–1022, doi:10.3762/bjnano.8.102

• advantage of the absence of damage or contamination of the synthesized graphene, because there is no need for the transfer onto a substrate. Moreover, a proper pre-patterning of the Mo catalyst allows one to obtain graphene films with different shapes and dimensions. The sensing properties of the material

• of conductometric devices in which multilayer graphene films have been directly synthesized on insulating SiO2 substrates by means of a transfer-free CVD method mediated by Mo. The pre-patterning of the Mo layer allows the graphene to be shaped in the desired form by means of standard lithography

• made as thin as 50 nm without any segregation at the graphene CVD temperature (≈1000 °C), because of the higher melting point of Mo (2623 °C) compared to that of other conventional catalysts such as Cu (1085 °C) or Ni (1455 °C). Moreover, this allows a pre-patterning the film for the selective growth

Near-field surface plasmon field enhancement induced by rippled surfaces

• Mario D’Acunto,
• Francesco Fuso,
• Ruggero Micheletto,
• Makoto Naruse,
• Francesco Tantussi and
• Maria Allegrini

Beilstein J. Nanotechnol. 2017, 8, 956–967, doi:10.3762/bjnano.8.97

• processes or self-organization have been demonstrated to be an excellent and relatively low-cost alternative, allowing maskless patterning of macroscopic surface areas [18]. Many of such techniques lead to typical patterns including fractal surfaces. Regular, or nearly regular, nanoscale ripples have width

• ) that we will use in the SIE picture. Here, we are using the notation that , where and are unit vectors along the x and y directions. Since many patterning techniques, including ballistic deposition processes (such as molecular beam epitaxy or IBS) or plasma etching, are characterized by dynamic

• growth processes subsequent to deposition rates as, for example, with the IBS technique or other equivalent patterning methods is a nonequilibrium process where a two-dimensional surface is defined by the height function h(x,y,t), whose evolution in time is monitored. The physics of the growth and of the

Triptycene-terminated thiolate and selenolate monolayers on Au(111)

• Jinxuan Liu,
• Martin Kind,
• Björn Schüpbach,
• Daniel Käfer,
• Stefanie Winkler,
• Wenhua Zhang,
• Andreas Terfort and
• Christof Wöll

Beilstein J. Nanotechnol. 2017, 8, 892–905, doi:10.3762/bjnano.8.91

• defined border between zones with and without the molecules on the substrate. Occasionally, using sophisticated patterning methods, height differences between two different SAMs have been determined [33]. Ellipsometry is suitable to measure thicknesses of monomolecular films, in principle, but the

Relationships between chemical structure, mechanical properties and materials processing in nanopatterned organosilicate fins

• Gheorghe Stan,
• Richard S. Gates,
• Qichi Hu,
• Kevin Kjoller,
• Craig Prater,
• Kanwal Jit Singh,
• Ebony Mays and
• Sean W. King

Beilstein J. Nanotechnol. 2017, 8, 863–871, doi:10.3762/bjnano.8.88

• curing to create a 33% nanoporous organosilicate material with a nominal Young’s modulus of 5 GPa [36]. The pitch quarter patterning process consisted of first depositing on the nanoporous organosilicate a quad-layer film stack consisting of a backbone layer, an anti-reflection coating, a second backbone

• fins. After completion of fin formation, some samples were exposed to a standard silylation treatment in an attempt to restore some of the terminal organic groups removed from the nanoporous organosilicate by the patterning process. The details of the silylation treatment are described elsewhere [37

• properties of the nanoporous organosilicate induced by the pitch division patterning process as a function of feature size, we utilized the resonance enhanced mode of AFM-IR (Figure 1c) [32] and CR-AFM (Figure 1d) [34], respectively. In the resonance-enhanced AFM-IR technique, a tunable IR laser is pulsed

3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

• Brett B. Lewis,
• Robert Winkler,
• Xiahan Sang,
• Pushpa R. Pudasaini,
• Michael G. Stanford,
• Harald Plank,
• Raymond R. Unocic,
• Jason D. Fowlkes and
• Philip D. Rack

Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83

• . While standard patterning of the electron beam has resulted in complex 2D deposits of arbitrary shape, care must be taken as subtle proximity effects can be minimized or exacerbated in some electron beam [32], gas flux and patterning [33], and temperature regimes [34]. Moreover, while several examples

• to gold sputtering, to promote adhesion between the gold contacts and the underlying, insulating SiO2 film (290 nm). The original photolithographically defined spacing between electrical contacts was 20 µm. EBL was performed using a Raith ELPHY Quantum patterning engine equipped on the FEI NovaLab

• 600 dual beam. The contact spacing was reduced to 500 nm using EBL. The EBL contact extensions were 20 nm thick gold with a 3 nm titanium adhesion layer. After patterning, the substrate was cleaned via sonication for 5 minutes in an acetone bath. EBID was then used to construct a 3D bridge across the

Phospholipid arrays on porous polymer coatings generated by micro-contact spotting

• Sylwia Sekula-Neuner,
• Monica de Freitas,
• Lea-Marie Tröster,
• Tobias Jochum,
• Pavel A. Levkin,
• Michael Hirtz and
• Harald Fuchs

Beilstein J. Nanotechnol. 2017, 8, 715–722, doi:10.3762/bjnano.8.75

• of ink fluidity under humidity controlled conditions [11][12]. Using quill-like pens (SPTs, short for surface patterning tool [13]) for lipid ink deposition permitted the reduction of the volume of phospholipids needed for array generation, as compared to other spotting techniques like ink jet

• the therapeutic treatment for breast and prostate cancer patients. Keeping in mind previous applications of HEMA polymer in creating superhydrophilic–superhydrophobic micropatterned surfaces for cell patterning [28] and cell-screening applications [29][30], the addition of lipid arraying to the

• polymer nanoglobules with pores of around 150 nm. Microcontact spotting The patterning of lipid arrays was performed on a NLP 2000 system (NanoInk, USA) with oxygen plasma activated (0.2 mbar O2, 2 min) SPT probes (SPT-S-C10S, BioForce Nanosciences, USA). All lipids were purchased from Avanti Polar Lipids

Ion beam profiling from the interaction with a freestanding 2D layer

• Ivan Shorubalko,
• Kyoungjun Choi,
• Michael Stiefel and
• Hyung Gyu Park

Beilstein J. Nanotechnol. 2017, 8, 682–687, doi:10.3762/bjnano.8.73

• , Department of Mechanical and Process Engineering, Eidgenössische Technische Hochschule (ETH) Zürich, Tannenstrasse 3, CH-8092 Zürich, Switzerland 10.3762/bjnano.8.73 Abstract Recent years have seen a great potential of the focused ion beam (FIB) technology for the nanometer-scale patterning of a

• cascades, featured by no interaction volume. Thus, the patterning resolution is directly set by the beam diameters. Here, we demonstrate pattern resolution beyond the beam size and precise profiling of the focused ion beams. We find out that FIB exposure time of individual pixels can influence the

• . FIBs interaction with such a self-suspending layer brings no collision cascade. Instead, atoms of the 2D membrane material are sputtered only by direct binary collision events with incident ions. Thus, the patterning resolution is directly set by the beam diameters. In fact, it was shown that FIB

Silicon microgrooves for contact guidance of human aortic endothelial cells

• Sara Fernández-Castillejo,
• Pilar Formentín,
• Úrsula Catalán,
• Josep Pallarès,
• Lluís F. Marsal and
• Rosa Solà

Beilstein J. Nanotechnol. 2017, 8, 675–681, doi:10.3762/bjnano.8.72

• adhesion, morphology (alignment, circularity and filopodia presence) and proliferation. Moreover, these structures exerted no cytotoxic effect. Conclusion: The results suggest that topographical patterning influences cell response. Silicon groove substrates can be used in developing medical devices with

• < 0.05). On the one hand, cells cultured on V15 presented no proliferation. On the other hand, cells proliferated when cultured on S15, S40 and V40 and this proliferation was different accordingly to the patterning. That is to say, proliferation was greater in S15 and lower in S40 and V40, when compared

• silicon structures consisting of repeated ridges and grooves patterning modify the behaviour of endothelial cells. Microscopy analysis revealed differences between flat silicon and patterned substrates. Firstly, the number of attached cells was higher when cells were cultured on V-shaped substrates

Anodization-based process for the fabrication of all niobium nitride Josephson junction structures

• Massimiliano Lucci,
• Ivano Ottaviani,
• Matteo Cirillo,
• Fabio De Matteis,
• Roberto Francini,
• Vittorio Merlo and
• Ivan Davoli

Beilstein J. Nanotechnol. 2017, 8, 539–546, doi:10.3762/bjnano.8.58

• overall fabrication recipe with existing processes and literature. Along with the optimal and controlled film growth we also carried out an investigation of the anodization of these films since this technique is necessary for the most of the procedures leading to the patterning of tunnel junctions. The

• growth of the oxide film and the voltage during the anodization as a method to control its thickness up to few angstroms per second. The properties and the quality of Josephson junctions obtained using our patterning based on lift-off lithography on cold substrates and the anodization of NbN for defining

Advances in the fabrication of graphene transistors on flexible substrates

• Gabriele Fisichella,
• Stella Lo Verso,
• Silvestra Di Marco,
• Vincenzo Vinciguerra,
• Emanuela Schilirò,
• Salvatore Di Franco,
• Raffaella Lo Nigro,
• Fabrizio Roccaforte,
• Amaia Zurutuza,
• Alba Centeno,
• Sebastiano Ravesi and
• Filippo Giannazzo

Beilstein J. Nanotechnol. 2017, 8, 467–474, doi:10.3762/bjnano.8.50

• was also confirmed (43 ± 1 nm) by the local step height measure reported in Figure 1b for a patterned Al2O3. The dielectric patterning was obtained by depositing the oxide on a silicon wafer masked by a negative profile resist and then removing the resist by an ultrasonic hot chemical bath. This

• exploited on Si during the dielectric layer testing, and patterning by a lift-off approach. The metal morphology is reported in Figure 3a, revealing an RMS of ≈9.8 nm, consistent with the roughness of the underlying substrate. Figure 3b reports the schematic illustration of the patterned Al pads on the

• smoother substrates. However, it is still possible to identify wrinkles, as indicated by the dashed green circle in Figure 4a. A schematic illustration of the graphene channel fabricated over the FET gate contact is reported in Figure 4b. After patterning the graphene channel, the source and drain contacts

Annealing-induced recovery of indents in thin Au(Fe) bilayer films

• Anna Kosinova,
• Ruth Schwaiger,
• Leonid Klinger and
• Eugen Rabkin

Beilstein J. Nanotechnol. 2016, 7, 2088–2099, doi:10.3762/bjnano.7.199

• their subsequent dissolution. The application of the processes uncovered in this work show great potential for the patterning of thin films. Keywords: annealing; diffusion; dislocation loops; nanoindenation; thin films; Introduction The intentional introduction of defects into bulk metallic material

• patterning with the aid of nanoindentation imprints is quite obvious, we demonstrated that a thermo-mechanical treatment of the film, i.e., nanoindentation followed by annealing, can result in the formation of ordered arrays of hillocks. While the parameters of the naturally formed hillocks can hardly be

Active and fast charge-state switching of single NV centres in diamond by in-plane Al-Schottky junctions

• Christoph Schreyvogel,
• Vladimir Polyakov,
• Sina Burk,
• Helmut Fedder,
• Andrej Denisenko,
• Felipe Fávaro de Oliveira,
• Ralf Wunderlich,
• Jan Meijer,
• Verena Zuerbig,
• Jörg Wrachtrup and
• Christoph E. Nebel

Beilstein J. Nanotechnol. 2016, 7, 1727–1735, doi:10.3762/bjnano.7.165

• initialization, processing and read-out as well as single 13C atoms for storage of quantum information. This could be realised with a suitable patterning of the Al-gates, such that single NV centres could be addressed individually. Furthermore, a control of the spectral emission properties of NVs as a single

Nano- and microstructured materials for in vitro studies of the physiology of vascular cells

• Alexandra M. Greiner,
• Adria Sales,
• Hao Chen,
• Sarah A. Biela,
• Dieter Kaufmann and
• Ralf Kemkemer

Beilstein J. Nanotechnol. 2016, 7, 1620–1641, doi:10.3762/bjnano.7.155

• masks for subsequent etching or sputtering processes. It is a low-cost technique that does not require complex equipment since the pattern can be obtained by spin-coating the surface or by dipping it in the colloidal solution. Moreover, this technique allows for large surface patterning. The size of the

• defined coating over longer time periods. Control of the spatial distribution and density of molecules is for many biological investigations an interesting option. Such patterning with adhesive molecules can be realized by several techniques. Commonly used are microcontact printing [53][155] dry lift-off

Photothermal effect of gold nanostar patterns inkjet-printed on coated paper substrates with different permeability

• Mykola Borzenkov,
• Anni Määttänen,
• Petri Ihalainen,
• Maddalena Collini,
• Elisa Cabrini,
• Giacomo Dacarro,
• Piersandro Pallavicini and
• Giuseppe Chirico

Beilstein J. Nanotechnol. 2016, 7, 1480–1485, doi:10.3762/bjnano.7.140

• effect; Introduction Due to advantages over other patterning techniques, inkjet printing technology has met important challenges to pattern a broad range of functional materials with promising biomedical application [1][2][3][4][5][6][7]. Inks based on metal nanoparticles are widely used in inkjet

Effect of tetramethylammonium hydroxide/isopropyl alcohol wet etching on geometry and surface roughness of silicon nanowires fabricated by AFM lithography

• Siti Noorhaniah Yusoh and
• Khatijah Aisha Yaacob

Beilstein J. Nanotechnol. 2016, 7, 1461–1470, doi:10.3762/bjnano.7.138

• parameters, such as applied voltage, writing speed and humidity, play important roles in the patterning of the oxide mask [27]. This study adopted parameters reported by Yusoh and Yaacob [27]. They found that use of a contact mode AFM tip coated with Au with 9 V of applied voltage and 0.3 µm/s writing speed

Direct formation of gold nanorods on surfaces using polymer-immobilised gold seeds

• Majid K. Abyaneh,
• Pietro Parisse and
• Loredana Casalis

Beilstein J. Nanotechnol. 2016, 7, 809–816, doi:10.3762/bjnano.7.72

• . Secondly, the synthesis protocol applied in this work can be broadened to produce 1D nanostructures other than GNRs. Thirdly, applying direct growth of NRs on the surface makes this method perfectly suited for many applications such as optical data storage [23], optical laser writing and patterning [24

Magnetic switching of nanoscale antidot lattices

• Ulf Wiedwald,
• Joachim Gräfe,
• Kristof M. Lebecki,
• Maxim Skripnik,
• Felix Haering,
• Gisela Schütz,
• Paul Ziemann,
• Eberhard Goering and
• Ulrich Nowak

Beilstein J. Nanotechnol. 2016, 7, 733–750, doi:10.3762/bjnano.7.65

• magnetized thin films provide strong out-of-plane demagnetizing fields. These are the origin of the often-observed labyrinth like domain patterns. Patterning reduced the effect of the demagnetizing field in a similar way as discussed above for in-plane fields, based on an effective local demagnetisation

Fabrication and properties of luminescence polymer composites with erbium/ytterbium oxides and gold nanoparticles

• Julia A. Burunkova,
• Ihor Yu. Denisiuk,
• Dmitri I. Zhuk,
• Lajos Daroczi,
• Attila Csik,
• István Csarnovics and
• Sándor Kokenyesi

Beilstein J. Nanotechnol. 2016, 7, 630–636, doi:10.3762/bjnano.7.55

• SiO2-Au-REO NP complexes randomly distributed in polymer matrix falls within tens of nanometers, where the influence of plasmon fields on RE ion excitation is efficient. Based on the earlier data on direct surface patterning in polymer nanocomposites [10][11][12] the in situ formation of two