Calibration of piezo actuators and systems by dynamic interferometry

• Knarik Khachatryan and
• Michael Reichling

Beilstein J. Nanotechnol. 2025, 16, 2086–2091, doi:10.3762/bjnano.16.143

• oscillation amplitude calibration under conditions of various amounts of tube piezo contraction and extension. The merits and limits of accuracy for such type of calibration are discussed. Keywords: cantilever excitation; fiber interferometer; NC-AFM; piezo calibration; non-contact atomic force microscopy

• control over the interferometer cavity. Measurements involve the expansion and contraction of the piezo tube by an amount of the order of 100 nm, raising the issues of piezo nonlinearity [19], hysteresis [20], and creep [21]. Therefore, we address systematic errors in tube piezo calibration and explore to

• tube piezo (L = 31.8 mm and h = 1.40 mm), we deduce a nominal fiber tube piezo calibration factor of = −2.15 nm/V relating the extension or contraction ΔL of the tube piezo to the applied voltage. Fiber tube piezo calibration In our measurements, the fiber is mounted at α = 15° so that it is directed

Understanding interferometry for micro-cantilever displacement detection

• Alexander von Schmidsfeld,
• Tobias Nörenberg,
• Matthias Temmen and
• Michael Reichling

Beilstein J. Nanotechnol. 2016, 7, 841–851, doi:10.3762/bjnano.7.76

• calibrate the sensitivity of the tube piezo in y- and z-direction. We calibrate by measuring the distance between a local maximum and the (n + 1)-th maximum along the y- and z-directions and use λ as a length standard to obtain the piezo calibration factors Cy and Cz: The quantities ΔVy and ΔVz denote the