Sustainable fabrication of 2D-based devices through reuse of substrates with microfabricated electrodes

• Ying Zhang,
• Yigit Sozen,
• Esteban Zamora-Amo,
• Thomas Pucher,
• Nuria Jiménez-Arévalo,
• Zdenek Sofer,
• Yong Xie and
• Andres Castellanos-Gomez

Beilstein J. Nanotechnol. 2026, 17, 818–827, doi:10.3762/bjnano.17.58

• . Keywords: 2D device fabrication; microfabricated electrode; N-methyl-2-pyrrolidone; substrate reuse; ultrasonic cleaning; Introduction Nanoscience research often needs the fabrication of proof-of-concept devices to demonstrate applications of novel nanomaterials or to study their fundamental properties [1

• reliable method for cleaning and reusing these devices would be valuable for achieving more cost-effective 2D material-based device fabrication. Several recent studies have explored substrate reuse strategies to mitigate fabrication costs and improve sustainability in device prototyping [16][17][18]. For

• the substrate surface, allowing for their application in reusable biosensors [21]. A different approach to reuse the substrates was reported by Paupy et al. by developing wafer-scale detachable monocrystalline germanium nanomembranes for III–V material growth and substrate reuse, significantly