Supporting Information
SRIM simulations of collision and ionization in 5 nm Pt60Pd40/200 nm PMMA samples irradiated with He+, Ne+, and Ga+ FIBs.
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Cite the Following Article
Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams
Serguei Chiriaev, Luciana Tavares, Vadzim Adashkevich, Arkadiusz J. Goszczak and Horst-Günter Rubahn
Beilstein J. Nanotechnol. 2020, 11, 1693–1703.
https://doi.org/10.3762/bjnano.11.151
How to Cite
Chiriaev, S.; Tavares, L.; Adashkevich, V.; Goszczak, A. J.; Rubahn, H.-G. Beilstein J. Nanotechnol. 2020, 11, 1693–1703. doi:10.3762/bjnano.11.151
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