Supporting Information
| Supporting Information File 1: Additional experimental data. | ||
| Format: PDF | Size: 2.9 MB | Download |
Cite the Following Article
The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich and Katja Höflich
Beilstein J. Nanotechnol. 2021, 12, 304–318.
https://doi.org/10.3762/bjnano.12.25
How to Cite
Deinhart, V.; Kern, L.-M.; Kirchhof, J. N.; Juergensen, S.; Sturm, J.; Krauss, E.; Feichtner, T.; Kovalchuk, S.; Schneider, M.; Engel, D.; Pfau, B.; Hecht, B.; Bolotin, K. I.; Reich, S.; Höflich, K. Beilstein J. Nanotechnol. 2021, 12, 304–318. doi:10.3762/bjnano.12.25
Download Citation
Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window
below.
Citation data in RIS format can be imported by all major citation management software, including EndNote,
ProCite, RefWorks, and Zotero.
Presentation Graphic
| Picture with graphical abstract, title and authors for social media postings and presentations. | ||
| Format: PNG | Size: 11.5 MB | Download |
Citations to This Article
Up to 20 of the most recent references are displayed here.
Scholarly Works
- Córdoba, R. Additive nanofabrication using focused ion and electron beams. Encyclopedia of Condensed Matter Physics; Elsevier, 2024; pp 448–464. doi:10.1016/b978-0-323-90800-9.00035-4
- Höflich, K.; Hobler, G.; Allen, F. I.; Wirtz, T.; Rius, G.; McElwee-White, L.; Krasheninnikov, A. V.; Schmidt, M.; Utke, I.; Klingner, N.; Osenberg, M.; Córdoba, R.; Djurabekova, F.; Manke, I.; Moll, P.; Manoccio, M.; De Teresa, J. M.; Bischoff, L.; Michler, J.; De Castro, O.; Delobbe, A.; Dunne, P.; Dobrovolskiy, O. V.; Frese, N.; Gölzhäuser, A.; Mazarov, P.; Koelle, D.; Möller, W.; Pérez-Murano, F.; Philipp, P.; Vollnhals, F.; Hlawacek, G. Roadmap for focused ion beam technologies. Applied Physics Reviews 2023, 10. doi:10.1063/5.0162597
- Yu, Y.; Kirchhof, J. N.; Tsarapkin, A.; Deinhart, V.; Yücel, O.; Höfer, B.; Höflich, K.; Bolotin, K. I. Towards tunable graphene phononic crystals. 2D Materials 2023, 10, 45012–045012. doi:10.1088/2053-1583/acec58
- Kirchhof, J. N.; Bolotin, K. I. Mechanically-tunable bandgap closing in 2D graphene phononic crystals. npj 2D Materials and Applications 2023, 7. doi:10.1038/s41699-023-00374-4
- Feilhauer, J.; Zelent, M.; Zhang, Z.; Christensen, J.; Mruczkiewicz, M. Unidirectional spin-wave edge modes in magnonic crystal. APL Materials 2023, 11. doi:10.1063/5.0134099
- Semple, M.; Scheuer, K. G.; DeCorby, R. G.; Iyer, A. K. Complex 10-nm resolution nanogap and nanowire geometries for plasmonic metasurface miniaturization. Optics express 2022, 30, 42480. doi:10.1364/oe.471884
- Litvin, I. A.; Reich, S. Plasmonic nanolaser based on a single oligomer. Optics express 2022, 30, 41399. doi:10.1364/oe.472812
- Mosberg, A. B.; Godfrey, I.; Ramasse, Q. Taking Full Control: Leveraging Software Customizability and Open-Source Hardware to Tailor FIB Instrument Controls. Microscopy and Microanalysis 2022, 28, 20–21. doi:10.1017/s1431927622000988
- Kovalchuk, S.; Kirchhof, J. N.; Bolotin, K. I.; Harats, M. G. Non‐Uniform Strain Engineering of 2D Materials. Israel Journal of Chemistry 2022, 62. doi:10.1002/ijch.202100115
- Semple, M.; Hryciw, A. C.; Li, P.; Flaim, E.; Iyer, A. K. Patterning of Complex, Nanometer-Scale Features in Wide-Area Gold Nanoplasmonic Structures Using Helium Focused Ion Beam Milling. ACS applied materials & interfaces 2021, 13, 43209–43220. doi:10.1021/acsami.1c09295
- Heilmann, M.; Deinhart, V.; Tahraoui, A.; Höflich, K.; Lopes, J. M. J. Spatially controlled epitaxial growth of 2D heterostructures via defect engineering using a focused He ion beam. npj 2D Materials and Applications 2021, 5, 1–7. doi:10.1038/s41699-021-00250-z
- Allen, F. I. A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope. Beilstein journal of nanotechnology 2021, 12, 633–664. doi:10.3762/bjnano.12.52
- Lid, M. J.; Afif, A. B.; Torgersen, J.; Prinz, F. B. Finish-pass strategy to improve sidewall angle and processing time in FIB milled structures. Procedia Structural Integrity 2021, 34, 266–273. doi:10.1016/j.prostr.2021.12.038
