Calibration of piezo actuators and systems by dynamic interferometry

Knarik Khachatryan and Michael Reichling
Beilstein J. Nanotechnol. 2025, 16, 2086–2091. https://doi.org/10.3762/bjnano.16.143

Cite the Following Article

Calibration of piezo actuators and systems by dynamic interferometry
Knarik Khachatryan and Michael Reichling
Beilstein J. Nanotechnol. 2025, 16, 2086–2091. https://doi.org/10.3762/bjnano.16.143

How to Cite

Khachatryan, K.; Reichling, M. Beilstein J. Nanotechnol. 2025, 16, 2086–2091. doi:10.3762/bjnano.16.143

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