New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures

• Bartosz Pruchnik,
• Krzysztof Kwoka,
• Ewelina Gacka,
• Dominik Badura,
• Piotr Kunicki,
• Andrzej Sierakowski,
• Paweł Janus,
• Tomasz Piasecki and
• Teodor Gotszalk

Beilstein J. Nanotechnol. 2024, 15, 1273–1282, doi:10.3762/bjnano.15.103

• the material parameters provided by the “MEMS” library. The geometry of the model was defined by the technological design. Microfabrication artefacts were not taken into account. The model was analysed in the steady-state study. The solid mechanics and heat transfer modules were used together with the

• (GIS) for the supply of precursors required in the FEBID processes. In the experiments carried out, trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPtMe3) was used to deposit the Pt(C) material. Microfabrication of nanostructures and modification of opMEMS, both mechanically and electrically, is

N-Heterocyclic carbene-based gold etchants

• Robert B. Chevalier,
• Justin Pantano,
• Matthew K. Kiesewetter and
• Jason R. Dwyer

Beilstein J. Nanotechnol. 2023, 14, 865–871, doi:10.3762/bjnano.14.71

• but also the potential for deliberate etching, with the outcome determined by choice of chemically synthesized organic species and solvent. Keywords: gold etchant; microfabrication; N-heterocyclic carbenes; self-assembled monolayer (SAM); thin films; Introduction Self-assembled monolayers (SAMs) are

Industrial perspectives for personalized microneedles

• Remmi Danae Baker-Sediako,
• Benjamin Richter,
• Matthias Blaicher,
• Michael Thiel and
• Martin Hermatschweiler

Beilstein J. Nanotechnol. 2023, 14, 857–864, doi:10.3762/bjnano.14.70

• their efforts on one-size-fits-all designs for transdermal drug delivery, regardless of patient demographic and injection site. In this perspective article, we briefly review current microneedle designs, microfabrication methods, and industrialization strategies. We also provide an outlook where

• microneedles may become personalized according to a patient’s demographic in order to increase drug delivery efficiency and reduce healing times for patient-centric care. Keywords: 3D printing; microfabrication; microneedles; personalized medicine; transdermal drug delivery; two-photon polymerization

• joint-pain management, the microneedle patches will experience dynamic loads and may dislodge before delivering drugs. Thus, microneedles need to be engineered to bear the dynamic loads to last for the duration of treatment. Recent advances in microfabrication readily enable complex microneedle designs

Silver-based SERS substrates fabricated using a 3D printed microfluidic device

• Phommachith Sonexai,
• Minh Van Nguyen,
• Bui The Huy and
• Yong-Ill Lee

Beilstein J. Nanotechnol. 2023, 14, 793–803, doi:10.3762/bjnano.14.65

• separate microreactor [12][22]. A traditional approach to producing microfluidic devices involves a three-step microfabrication process of (i) creating a channel mold using photolithography, (ii) fabricating the channels by casting the mold through soft lithography, and (iii) bonding the channel device to

Microneedle patches – the future of drug delivery and vaccination?

• Zahra Faraji Rad,
• Philip D. Prewett and
• Graham J. Davies

Beilstein J. Nanotechnol. 2023, 14, 494–495, doi:10.3762/bjnano.14.40

• dedicated to MN patch vaccination are already established. The key to the future of MN patches is the development and commercial availability of reliable, inexpensive, and biocompatible MNs with regulatory approval for clinical use. The earliest MNs were made by adapting microfabrication technology

Molecular nanoarchitectonics: unification of nanotechnology and molecular/materials science

• Katsuhiko Ariga

Beilstein J. Nanotechnol. 2023, 14, 434–453, doi:10.3762/bjnano.14.35

• ordering by external fields or forces, nano/microfabrication, and material modification using biological phenomena are selected and combined. These processes include both equilibrium and nonequilibrium processes. The structures created by combining these processes or by working on them step by step are

Frequency-dependent nanomechanical profiling for medical diagnosis

• Santiago D. Solares and
• Alexander X. Cartagena-Rivera

Beilstein J. Nanotechnol. 2022, 13, 1483–1489, doi:10.3762/bjnano.13.122

• already available (e.g., microfabrication and micro-robotics). While we have focused specifically on healthcare treatments of mechanically relevant diseases, similar technology adoption paths can be envisioned for other fields, such as tissue engineering, for which frequency-dependent characterization

Optimizing PMMA solutions to suppress contamination in the transfer of CVD graphene for batch production

• Chun-Da Liao,
• Andrea Capasso,
• Tiago Queirós,
• Telma Domingues,
• Fatima Cerqueira,
• Nicoleta Nicoara,
• Jérôme Borme,
• Paulo Freitas and
• Pedro Alpuim

Beilstein J. Nanotechnol. 2022, 13, 796–806, doi:10.3762/bjnano.13.70

• ) AMW (at 4 wt %), commonly used for microfabrication processes as an e-beam resist, was used for further comparison (see Experimental section, “Graphene transfer“). Optical microscopy analysis was carried out to visually evaluate the presence of PMMA residues after the transfer process of graphene

• , PMMA-950k A4) at 4 wt % is commonly used for microfabrication processes and was chosen for comparison. The optimized PMMA mixture (coded B2) was made by mixing PMMA-550k and PMMA-15k in anisole at a 2:1 ratio (3 wt %). The solutions were stirred at 1000 rpm for 24 h. The graphene transfer process is

Fabrication and testing of polymer microneedles for transdermal drug delivery

• Vahid Ebrahiminejad,
• Zahra Faraji Rad,
• Philip D. Prewett and
• Graham J. Davies

Beilstein J. Nanotechnol. 2022, 13, 629–640, doi:10.3762/bjnano.13.55

• . Acknowledgements This work was performed in part at the Queensland node of the Australian National Fabrication Facility, a company established under the National Collaborative Research Infrastructure Strategy to provide nano and microfabrication facilities for Australia’s researchers. This research was undertaken

An overview of microneedle applications, materials, and fabrication methods

• Zahra Faraji Rad,
• Philip D. Prewett and
• Graham J. Davies

Beilstein J. Nanotechnol. 2021, 12, 1034–1046, doi:10.3762/bjnano.12.77

• methods has been constrained by the limitations and high cost of microfabrication technology. Additive manufacturing processes such as 3D printing and two-photon polymerization fabrication are promising transformative technologies developed in recent years. The present article provides an overview of

• microneedle systems applications, designs, material selection, and manufacturing methods. Keywords: drug delivery; microelectromechanical systems (MEMS); microfabrication; microneedles; point-of-care diagnostics; Introduction The concept of microneedle structures to penetrate painlessly the outermost layer

• of the skin, the stratum corneum (SC), was first introduced in 1976 [1]. However, the lack of microfabrication technologies delayed the experimental research of the concept until the 1990s when developments in microfabrication tools facilitated the manufacturing of microstructures and

Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater

• Dinesh Rotake,
• Anand Darji and
• Nitin Kale

Beilstein J. Nanotechnol. 2020, 11, 1242–1253, doi:10.3762/bjnano.11.108

• capture Cd(II) at the picomolar level and the verification of the experimental results using energy-dispersive X-ray spectroscopy (EDX). Fabrication and Calibration of the Piezoresistive Device Previously, a polysilicon-based piezoresistive sensor was fabricated using a standard microfabrication process

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

• Nahid Hosseini,
• Matthias Neuenschwander,
• Oliver Peric,
• Santiago H. Andany,
• Jonathan D. Adams and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2019, 10, 2357–2363, doi:10.3762/bjnano.10.226

• ., silicon, silicon nitride and silicon oxide), polymer cantilevers have gained attention due to their ease of fabrication, their versatility [15][16][17][18][19] and their potential for fabricating low spring constant cantilevers [20]. For instance, the microfabrication process of SU8 cantilevers has a high

• . Acknowledgements We thank the center of micronanotechnology (CMI) at EPFL for their help during the microfabrication. We also acknowledge funding from the European Union FP7/2007-2013/ERC under Grant Agreement No. 307338-NaMic, the ERC-2017-CoG; InCell; Project number 773091, and the Swiss National Science

The importance of design in nanoarchitectonics: multifractality in MACE silicon nanowires

• Stefania Carapezzi and
• Anna Cavallini

Beilstein J. Nanotechnol. 2019, 10, 2094–2102, doi:10.3762/bjnano.10.204

• . From a technological point of view, it is essential to explore the possibilities of a large-scale fabrication of NWs. The top-down approach [8] represents the main route to achieve this goal, because it allows for wafer-scale growth by an easy adaptation of microfabrication equipment already available

• nanoarchitectures generated by NWs or other elemental nanobjects the self-assembly/self-organization mechanisms are pivotal to generate the assembled structures. In fact, the direct fabrication of such structures by microfabrication or even nanofabrication approaches would be challenging or impossible, given the

Review of advanced sensor devices employing nanoarchitectonics concepts

• Katsuhiko Ariga,
• Tatsuyuki Makita,
• Masato Ito,
• Taizo Mori,
• Shun Watanabe and
• Jun Takeya

Beilstein J. Nanotechnol. 2019, 10, 2014–2030, doi:10.3762/bjnano.10.198

• advancements in sensor technology are no longer limited by progress in microfabrication and nanofabrication of device structures – opening a new avenue for highly engineered, high performing sensor systems through the application of nanoarchitectonics concepts. Keywords: interface; molecular recognition

• on advancements in microfabrication and nanofabrication of device structures. These so-called nanotechnological advancements enable us to prepare sensing devices with various advantageous features with an ultrasmall device size (thus requiring an ultrasmall amount of the target sample), highly

• be process integration of top down microfabrication and bottom up self-organization to bridge materials and systems over a wide scale range. To combine all of these techniques and functional materials, the concept of nanoarchitectonics becomes a crucial bridge in this roadmap. Outline of the

Materials nanoarchitectonics at two-dimensional liquid interfaces

• Katsuhiko Ariga,
• Michio Matsumoto,
• Taizo Mori and
• Lok Kumar Shrestha

Beilstein J. Nanotechnol. 2019, 10, 1559–1587, doi:10.3762/bjnano.10.153

• microfabrication and other techniques at microscopic and macroscopic levels, the nanoarchitectonics procedures have to take into account several uncertainties such as thermal fluctuations, quantum effects, and uncontrolled mutual interactions at the nanoscale [95][96]. Because of its general applicability

Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors

• Jimena Olivares,
• Teona Mirea,
• Lorena Gordillo-Dagallier,
• Bruno Marco,
• José Miguel Escolano,
• Marta Clement and
• Enrique Iborra

Beilstein J. Nanotechnol. 2019, 10, 975–984, doi:10.3762/bjnano.10.98

• graphene transfer methods, all the technological processes proposed to achieve the final device are compatible with conventional microfabrication technologies, which offers an easy and inexpensive method for the mass production of biosensors. Results and Discussion Characterization of graphene grown on

Bidirectional biomimetic flow sensing with antiparallel and curved artificial hair sensors

• Claudio Abels,
• Antonio Qualtieri,
• Toni Lober,
• Alessandro Mariotti,
• Lily D. Chambers,
• Massimo De Vittorio,
• William M. Megill and
• Francesco Rizzi

Beilstein J. Nanotechnol. 2019, 10, 32–46, doi:10.3762/bjnano.10.4

• principle, realised by using an efficient microfabrication process which combines surface micromachining and a 3D assembly method [28]. Two support beams, each being 2.7 μm thick, elevate the thermal wire out of the plane up to only 1 mm, hence reducing interference to the flow. The thermal wire is made of

Near-infrared light harvesting of upconverting NaYF₄:Yb³⁺/Er³⁺-based amorphous silicon solar cells investigated by an optical filter

• Daiming Liu,
• Qingkang Wang and
• Qing Wang

Beilstein J. Nanotechnol. 2018, 9, 2788–2793, doi:10.3762/bjnano.9.260

• Daiming Liu Qingkang Wang Qing Wang College of Physics and Lab of New Fibre Materials and Modern Textile Growing Base for State Key Laboratory, Qingdao University, Qingdao 266071, P.R. China Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, School of Electronic

Surface characterization of nanoparticles using near-field light scattering

• Eunsoo Yoo,
• Yizhong Liu,
• Chukwuazam A. Nwasike,
• Sebastian R. Freeman,
• Brian C. DiPaolo,
• Bernardo Cordovez and
• Amber L. Doiron

Beilstein J. Nanotechnol. 2018, 9, 1228–1238, doi:10.3762/bjnano.9.114

• PEG-SPIOs and IPC-SPIOs, so we measured these particles in water. Waveguide and microfluidic chip As previously described by Kong et al., the microfluidic chips are 1 cm2 silicon substrates with silicon nitride (Si3N4) waveguides patterned by standard microfabrication techniques [38]. The waveguide is

Optimisation of purification techniques for the preparation of large-volume aqueous solar nanoparticle inks for organic photovoltaics

• Furqan Almyahi,
• Thomas R. Andersen,
• Nathan A. Cooling,
• Natalie P. Holmes,
• Matthew J. Griffith,
• Krishna Feron,
• Xiaojing Zhou,
• Warwick J. Belcher and
• Paul C. Dastoor

Beilstein J. Nanotechnol. 2018, 9, 649–659, doi:10.3762/bjnano.9.60

• node of the Australian National Fabrication Facility, a company established under the National Collaborative Research Infrastructure Strategy to provide nano- and microfabrication facilities for Australia’s researchers. The authors thank the University of Newcastle Electron Microscopy and X-ray Unit.

Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

• Liga Jasulaneca,
• Jelena Kosmaca,
• Raimonds Meija,
• Jana Andzane and
• Donats Erts

Beilstein J. Nanotechnol. 2018, 9, 271–300, doi:10.3762/bjnano.9.29

• nanostructures (nanowires, nanotubes, nanorods, graphene) with a good uniformity and desired properties. The microfabrication routine may be supplemented with some bottom-up approaches. Dielectrophoresis [33], controlled nanomaterial growth [34], and nanomanipulation [9] have been demonstrated as useful methods

• microfabrication process to configure the NEM switch, posing challenges for large-scale production. To facilitate the fabrication of graphene-based devices, direct growth of nanocrystalline graphene on insulating substrates using regular thin film process techniques (example of growth process is shown in Figure

Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement

• Steven Ian Moore,
• Michael G. Ruppert and
• Yuen Kuan Yong

Beilstein J. Nanotechnol. 2017, 8, 358–371, doi:10.3762/bjnano.8.38

• methods, piezoelectric transduction seems to be the only one capable of simultaneously serving as an actuator and a sensor even with a single active layer [39][40]. A set of cantilever designs exist which integrate a piezoelectric transducer onto the cantilever as part of the microfabrication process [41

• designs are shown in Figure 2m–p. The cantilevers are fabricated using the PiezoMUMPs microfabrication process available from the company MEMSCAP Inc [54]. The device layer is a 10 μm thick layer of single-crystal-silicon deposited on a (100) oriented wafer. A 0.5 μm layer of AlN and a 1 μm layer of

• microfabrication process used to fabricate the cantilevers requires the two piezoelectric transducers share a common terminal [54]. The common terminal has to be grounded to electrically isolate them from each other. Therefore, the actuation and sensing circuits are applied to a grounded load. Two instrumentation

Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment

• Ann-Kathrin Kleinschmidt,
• Lars Barzen,
• Johannes Strassner,
• Christoph Doering,
• Henning Fouckhardt,
• Wolfgang Bock,
• Michael Wahl and
• Michael Kopnarski

Beilstein J. Nanotechnol. 2016, 7, 1783–1793, doi:10.3762/bjnano.7.171

• -etching is an essential step of many lithographic processes, e.g., in semiconductor device fabrication, and offers several advantages over wet-etching as for instance the opportunity to achieve anisotropic etching and vertical etch flanks [10][11]. As the requirements for accuracy in microfabrication

Nano- and microstructured materials for in vitro studies of the physiology of vascular cells

• Alexandra M. Greiner,
• Adria Sales,
• Hao Chen,
• Sarah A. Biela,
• Dieter Kaufmann and
• Ralf Kemkemer

Beilstein J. Nanotechnol. 2016, 7, 1620–1641, doi:10.3762/bjnano.7.155

• desired surface feature size. In particular, some methods are not suited for structuring surface topographies in the nanometer range. 1.2 Microfabrication techniques Microfabrication techniques are mainly used to generate surface structures in the micrometer range, which is the size scale of cells. In

• order to give an overview of different microfabrication techniques, relevant examples for different approaches such as optical (photolithography [49]), mechanical (hot embossing [50] and surface cracking [51][52]) or chemical (replica molding [53][54], phase separation micromolding [55][56][57], gas

• nanostructures of few tens of nanometers, for example (Figure 4B) [53] After further modifications, the elastomer substrate can be used for cell experiments. Phase separation micromolding is an alternative, less common microfabrication technique for structured substrates. This technique consists of separating a

A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

• Tobias Meier,
• Alexander Förste,
• Ali Tavassolizadeh,
• Karsten Rott,
• Dirk Meyners,
• Roland Gröger,
• Günter Reiss,
• Eckhard Quandt,
• Thomas Schimmel and
• Hendrik Hölscher

Beilstein J. Nanotechnol. 2015, 6, 451–461, doi:10.3762/bjnano.6.46

• ]. Micro-machined cantilevers on the other hand are more versatile and can be mass-produced [21]. Additionally, cantilevers produced by silicon-based microfabrication methods allow for the integration of multiple additional features such as doping for better electrical conductance or the integration of