Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications

• August K. Roos,
• Ermes Scarano,
• Elisabet K. Arvidsson,
• Erik Holmgren and
• David B. Haviland

Beilstein J. Nanotechnol. 2024, 15, 242–255, doi:10.3762/bjnano.15.23

• first spin a thin layer of an adhesion promoter (AR 300–80) before spinning a roughly 170 nm thick layer of the electron-beam resist ARP–6200–09 (CSAR 09), baking at 150 °C for 1 min. We expose with a dose of 110 μC/cm2 in a Voyager EBL system from Raith Nanofabrication and etch the Nb-Ti-N film using

Ion beam processing of DNA origami nanostructures

• Leo Sala,
• Agnes Zerolová,
• Violaine Vizcaino,
• Alain Mery,
• Alicja Domaracka,
• Hermann Rothard,
• Philippe Boduch,
• Dominik Pinkas and
• Jaroslav Kocišek

Beilstein J. Nanotechnol. 2024, 15, 207–214, doi:10.3762/bjnano.15.20

• unperturbed. Present stability and nature of damages on DNA origami nanostructures enable fusion of DNA origami advantages such as shape and positioning control into novel ion beam nanofabrication approaches. Keywords: DNA nanotechnology; DNA origami; FIB; heavy ions; Introduction Ion beam interaction with

• method for nanofabrication such as FIB, which also happens to cover the low-energy interaction regime. The method is widely available as a complement to scanning electron microscopes. Focused ion beams allow for both subtractive and additive nanoscale manufacturing [31] and can also be used for chemical

• nanometer scale and the nanometric precision of DNA origami-based assembly open possibilities in more precise tuning and control of nanofabrication. Here we analyze the consequences of ion beam irradiation on 2D DNA origami nanotriangles deposited on Si as a model substrate and resulting nanostructure

In situ optical sub-wavelength thickness control of porous anodic aluminum oxide

• Aleksandrs Dutovs,
• Raimonds Popļausks,
• Oskars Putāns,
• Vladislavs Perkanuks,
• Aušrinė Jurkevičiūtė,
• Tomas Tamulevičius,
• Uldis Malinovskis,
• Iryna Olyshevets,
• Donats Erts and
• Juris Prikulis

Beilstein J. Nanotechnol. 2024, 15, 126–133, doi:10.3762/bjnano.15.12

• , Latvia Faculty of Physics, Mathematics and Optometry, University of Latvia, 3 Jelgavas Str., Riga LV-1004, Latvia 10.3762/bjnano.15.12 Abstract Porous anodic aluminum oxide (PAAO), sometimes referred to as nanoporous anodic alumina, serves as a cost-effective template for nanofabrication in many fields

• applications in many fields of science and technology, including nanofabrication [1], optical coatings [2], sensing [3][4][5], and others [6]. Many synthesis protocols have been developed for precise control of the pore structure of PAAO [7], which allow for the creation of nanoscale patterns for various types

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

• Joshua Williams,
• Michael I. Faley,
• Joseph Vimal Vas,
• Peng-Han Lu and
• Rafal E. Dunin-Borkowski

Beilstein J. Nanotechnol. 2024, 15, 1–12, doi:10.3762/bjnano.15.1

• imaging; nanodisk; nanofabrication; permalloy; Introduction The ability to study the spatial distribution of magnetization in ferromagnetic nanostructures is important for developing nanoelectronics, particularly for data storage and information processing. A vortex spin configuration has been observed

Industrial perspectives for personalized microneedles

• Remmi Danae Baker-Sediako,
• Benjamin Richter,
• Matthias Blaicher,
• Michael Thiel and
• Martin Hermatschweiler

Beilstein J. Nanotechnol. 2023, 14, 857–864, doi:10.3762/bjnano.14.70

• that can overcome these challenges [27]. Specifically, light-based 3D printing techniques such as stereolithography (SLA), digital light processing (DLP), and two-photon polymerization (2PP) simplify the rapid prototyping workflow when compared to traditional micro- and nanofabrication methods [28][29

Nanoarchitectonics for advanced applications in energy, environment and biology: Method for everything in materials science

• Katsuhiko Ariga

Beilstein J. Nanotechnol. 2023, 14, 738–740, doi:10.3762/bjnano.14.60

• in the creation of new materials by extracting and processing natural resources, and using these resources in nanofabrication. In order to establish a methodology to generate new materials which takes advantage of the properties of nanostructures, it is necessary to integrate science and technology

• - and nanofabrication sectors as well as in bio-related sciences [9]. Nanoarchitectonics bridges the worlds of nanotechnology and materials science integrating all related scientific fields in between. Fundamentally, all materials are composed of atoms and molecules, so nanoarchitectonics is applicable

SERS performance of GaN/Ag substrates fabricated by Ag coating of GaN platforms

• Magdalena A. Zając,
• Bogusław Budner,
• Malwina Liszewska,
• Bartosz Bartosewicz,
• Łukasz Gutowski,
• Jan L. Weyher and
• Bartłomiej J. Jankiewicz

Beilstein J. Nanotechnol. 2023, 14, 552–564, doi:10.3762/bjnano.14.46

• : GaN/Ag; magnetron sputtering; nanofabrication; pulsed laser deposition; SERS substrates; surface-enhanced Raman spectroscopy (SERS); Introduction Surface-enhanced Raman spectroscopy (SERS) is a highly sensitive and specific technique with multiplexing capabilities [1][2][3][4]. It is considered for

Formation of nanoflowers: Au and Ni silicide cores surrounded by SiO_x branches

• Feitao Li,
• Siyao Wan,
• Dong Wang and
• Peter Schaaf

Beilstein J. Nanotechnol. 2023, 14, 133–140, doi:10.3762/bjnano.14.14

• to developing different kinds of nanofabrication methods during the past decades. For example, silicon oxide (SiOx) nanostructures can be grown by the catalyzing effect of Au nanoparticles based on the vapor–liquid–solid (VLS) mechanism [1][2][3][4]. Au–SiOx nanoflowers consisting of Au nanoparticles

• substrate at higher temperatures in oxygen-deficient environment [3][4]. Another cost-effective nanofabrication method, thin film dewetting, driven by the reduction of the surface energy and the interface energy has also been profusely studied because it provides a straightforward and fast way to produce

Application of nanoarchitectonics in moist-electric generation

• Jia-Cheng Feng and
• Hong Xia

Beilstein J. Nanotechnol. 2022, 13, 1185–1200, doi:10.3762/bjnano.13.99

• , photolithography, embossing, deposition, and sol–gel nanofabrication, all of which can provide high specific surface areas [19][24][25][26][27][28]. Nanomaterials can also be divided into inorganic nanomaterials and organic nanomaterials. In inorganic nanomaterials, metal nanomaterials and carbon nanomaterials

Investigation of electron-induced cross-linking of self-assembled monolayers by scanning tunneling microscopy

• Patrick Stohmann,
• Sascha Koch,
• Yang Yang,
• Christopher David Kaiser,
• Julian Ehrens,
• Jürgen Schnack,
• Niklas Biere,
• Dario Anselmetti,
• Armin Gölzhäuser and
• Xianghui Zhang

Beilstein J. Nanotechnol. 2022, 13, 462–471, doi:10.3762/bjnano.13.39

• tailor surface properties [13][14][15][16][17][18][19][20]. These monolayers can be modified with lithographic tools, such as scanning probes [21], UV light, X-rays, ions, or electron beams [22][23][24]. A particularly versatile nanofabrication scheme utilizes electron irradiation of aromatic SAMs to

Thermal oxidation process on Si(113)-(3 × 2) investigated using high-temperature scanning tunneling microscopy

• Hiroya Tanaka,
• Shinya Ohno,
• Kazushi Miki and
• Masatoshi Tanaka

Beilstein J. Nanotechnol. 2022, 13, 172–181, doi:10.3762/bjnano.13.12

• . Funding This work was supported by JSPS KAKENHI (25286016 to M. Tanaka,17H02777 to K. Miki) and the NIMS Nanofabrication Platform in the Nanotechnology Platform Project from the Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT).

Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF₃)₄

• Alexey Prosvetov,
• Alexey V. Verkhovtsev,
• Gennady Sushko and
• Andrey V. Solov’yov

Beilstein J. Nanotechnol. 2021, 12, 1151–1172, doi:10.3762/bjnano.12.86

• fragmentation and the related mechanism of nanostructure formation and growth using FEBID, which are essential for the further advancement of FEBID-based nanofabrication. The developed computational methodology is general and applicable to different precursor molecules, substrate types, and irradiation regimes

• . The methodology can also be adjusted to simulate the nanostructure formation by other nanofabrication techniques using electron beams, such as direct electron beam lithography. In the present study, the methodology is applied to the IDMD simulation of the FEBID of Pt(PF3)4, a widely studied precursor

• of the fabricated nanostructures is still a technological challenge [7], mainly originating from the lack of molecular-level understanding of the irradiation-driven chemistry (IDC) underlying formation and growth of nanostructures. Further advances in FEBID-based nanofabrication require a deeper

Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?

• Annalena Wolff

Beilstein J. Nanotechnol. 2021, 12, 965–983, doi:10.3762/bjnano.12.73

• century [1]. From its beginnings as primarily an imaging tool [2][3][4][5][6][7][8][9] it was established as a key tool in nanofabrication [10][11][12][13][14][15], defect engineering [16][17], and recently for material analysis [18][19]. The extended range of applications in which the second-generation

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

• multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This

• irradiation effects, such as defect formation and ion implantation, are used to locally change the properties of the material, and at higher doses, nanofabrication is performed using localized material removal (by sputtering) or addition (by gas-assisted deposition). Sometimes, lower-dose irradiation effects

• also lead to a nanofabrication outcome. For example, localized swelling by ion implantation can be used to pattern nanoscale surface topographies, ion-induced collisional mixing can restructure buried interfaces, and ion-induced chemical changes can be used for resist-based lithography. In the

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o

• nanometer range is heavily sought after. One promising candidate for ultraprecise nanofabrication is focused ion beam (FIB) machining. Focused ion beams locally remove material based on physical sputtering with a large degree of flexibility due to advanced beam control. FIB patterning is a direct single

• ranging from several days to one or two months. For imaging and nanofabrication, only one of the three atoms is selected. This nearly ideal point source allows not only for high-resolution imaging but also for the milling of smallest geometric features [5][6][7]. Furthermore, large-area machining is

Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

• Cristiano Glessi,
• Aya Mahgoub,
• Cornelis W. Hagen and
• Mats Tilset

Beilstein J. Nanotechnol. 2021, 12, 257–269, doi:10.3762/bjnano.12.21

• −. Keywords: Au(I) precursors; focused electron beam-induced deposition (FEBID); gold-NHC; gold precursors; nanofabrication; N-heterocyclic carbene; Introduction Focused electron beam-induced deposition (FEBID) is a nanofabrication technique that allows for the growth of three-dimensional free-standing

• nanostructures [1][2][3][4]. This mask-less nanofabrication technique uses gaseous molecules as precursors. The gas molecules are introduced in the specimen chamber of a scanning electron microscope (SEM), adsorb onto a substrate, and dissociate upon electron irradiation, leaving a solid deposit on the substrate

Scanning transmission helium ion microscopy on carbon nanomembranes

• Daniel Emmrich,
• Annalena Wolff,
• Nikolaus Meyerbröker,
• Jörg K. N. Lindner,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 222–231, doi:10.3762/bjnano.12.18

• established as a key nanofabrication tool for milling [7][8][9], defect engineering [10][11], and resist-based lithography [12][13], overcoming the resolution limitations of other FIB techniques [14][15]. Both bulk samples as well as thin membranes have been structured using the HIM. On membranes, the sputter

Imaging of SARS-CoV-2 infected Vero E6 cells by helium ion microscopy

• Natalie Frese,
• Patrick Schmerer,
• Martin Wortmann,
• Matthias Schürmann,
• Matthias König,
• Michael Westphal,
• Friedemann Weber,
• Holger Sudhoff and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 172–179, doi:10.3762/bjnano.12.13

• of its sub-nanometer imaging and ion-beam nanofabrication capabilities in materials science and engineering [1]. Although HIM soon proved to be a promising tool in the life sciences, the examination of biological samples by HIM proceeded at a much slower pace. In recent years, it has been used in the

Bio-imaging with the helium-ion microscope: A review

• Matthias Schmidt,
• James M. Byrne and
• Ilari J. Maasilta

Beilstein J. Nanotechnol. 2021, 12, 1–23, doi:10.3762/bjnano.12.1

• study regarding biological HIM imaging of a whole variety of biological samples, including plants, bacteria, cancer cells, and a nematode worm, Pristionchus pacificus. The imaging of that worm will be discussed later in the section “Nanofabrication” regarding its innovative use of the combination of

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

• Eduardo Serralta,
• Nico Klingner,
• Olivier De Castro,
• Michael Mousley,
• Santhana Eswara,
• Serge Duarte Pinto,
• Tom Wirtz and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2020, 11, 1854–1864, doi:10.3762/bjnano.11.167

• microscopy; scanning transmission ion microscopy; Introduction The helium ion microscope (HIM) is an instrument that has already proven its value for high-resolution imaging, compositional analysis, nanofabrication, and materials modification [1][2]. It generates a focused helium (or neon) ion beam with sub

Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

• Aya Mahgoub,
• Hang Lu,
• Rachel M. Thorman,
• Konstantin Preradovic,
• Titel Jurca,
• Lisa McElwee-White,
• Howard Fairbrother and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2020, 11, 1789–1800, doi:10.3762/bjnano.11.161

• -dispersive X-ray spectroscopy (EDX); focused electron beam-induced deposition (FEBID); nanofabrication; platinum precursors; scanning electron microscopy (SEM); thermogravimetric analysis (TGA); Introduction Focused electron beam-induced deposition (FEBID) is a direct-write nanopatterning technique. FEBID

Direct observation of the Si(110)-(16×2) surface reconstruction by atomic force microscopy

• Tatsuya Yamamoto,
• Ryo Izumi,
• Kazushi Miki,
• Takahiro Yamasaki,
• Yasuhiro Sugawara and
• Yan Jun Li

Beilstein J. Nanotechnol. 2020, 11, 1750–1756, doi:10.3762/bjnano.11.157

• ) Phase A shows an actual phase relationship of the 16×2 reconstruction. (b) In phase B, pentagon pairs on the lower terrace are shifted by a half cycle (16×1) along the zig-zag row. Acknowledgements A part of this study was supported by NIMS Nanofabrication Platform in Nanotechnology Platform Project

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• irradiation-induced mechanical strain in the patterning process are elaborated and discussed. Keywords: direct patterning; focused helium ion beam; out-of-plane nanopatterning; polymers; thin films; Introduction Micro- and nanofabrication with focused ion beams (FIBs) is currently a subject of strong

Optically and electrically driven nanoantennas

• Monika Fleischer,
• Dai Zhang and
• Alfred J. Meixner

Beilstein J. Nanotechnol. 2020, 11, 1542–1545, doi:10.3762/bjnano.11.136

• , Germany 10.3762/bjnano.11.136 Keywords: active plasmonics; electrically driven nanoantenna; gap antenna; nanoantenna; nanofabrication; nanospectroscopy; nano-photonics; optical antenna; second harmonic generation; sensing; scanning tip; surface-enhanced infrared absorption (SEIRA); surface-enhanced Raman

• , etc. (a few nanometers to below 1 nm). Nanoantennas have been under examination for the past few decades in view of their attractive fundamental properties, while the rapid development of nanofabrication techniques has opened up possibilities to create more and more sophisticated shapes and

A wideband cryogenic microwave low-noise amplifier

• Boris I. Ivanov,
• Dmitri I. Volkhin,
• Ilya L. Novikov,
• Dmitri K. Pitsun,
• Dmitri O. Moskalev,
• Ilya A. Rodionov,
• Evgeni Il’ichev and
• Aleksey G. Vostretsov

Beilstein J. Nanotechnol. 2020, 11, 1484–1491, doi:10.3762/bjnano.11.131

• coupled to a single qubit. The sample was made at the BMSTU Nanofabrication Facility (FMN Laboratory, FMNS REC, ID 74300) using Al technology [29][30]. The X-mon qubit was made of two Al/AlxOy/Al parallel Josephson junctions forming a SQUID-type structure coupled to the main ground plane. The standard