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Search for "nanofabrication" in Full Text gives 124 result(s) in Beilstein Journal of Nanotechnology.

Missing links in nanomaterials research impacting productivity and perceptions

  • Santosh K. Tiwari and
  • Nannan Wang

Beilstein J. Nanotechnol. 2025, 16, 2168–2176, doi:10.3762/bjnano.16.149

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  • examination of unique nanostructures, nanoscale characterization, metrology to nanoelectronics, nanophotonics, nanobiotechnology, nanomedicine, nanofabrication, and nanomanufacturing [4][5]. These new developments catalyzed the initiation of numerous new experimental and theoretical areas in different
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Published 03 Dec 2025

Laser ablation in liquids for shape-tailored synthesis of nanomaterials: status and challenges

  • Natalie Tarasenka

Beilstein J. Nanotechnol. 2025, 16, 1963–1997, doi:10.3762/bjnano.16.137

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  • liquids; laser irradiation; nanofabrication; nanoparticles; shape control; Perspective 1 Introduction: Mechanisms and key parameters influencing the morphology of laser-produced NPs The precise control and tailoring of NP parameters has long been an aim of the laser ablation synthesis in liquids
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Published 10 Nov 2025

Evaluating metal-organic precursors for focused ion beam-induced deposition through solid-layer decomposition analysis

  • Benedykt R. Jany,
  • Katarzyna Madajska,
  • Aleksandra Butrymowicz-Kubiak,
  • Franciszek Krok and
  • Iwona B. Szymańska

Beilstein J. Nanotechnol. 2025, 16, 1942–1951, doi:10.3762/bjnano.16.135

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  • promising precursor materials and could accelerate the development of metal-organic precursors specifically tailored for FIB, offering a cost-effective route to novel nanofabrication applications. (a) SEM secondary electron images showing thickness and morphology of the precursor layers of 1–4. (b) Infrared
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Published 04 Nov 2025

Crystalline and amorphous structure selectivity of ignoble high-entropy alloy nanoparticles during laser ablation in organic liquids is set by pulse duration

  • Robert Stuckert,
  • Felix Pohl,
  • Oleg Prymak,
  • Ulrich Schürmann,
  • Christoph Rehbock,
  • Lorenz Kienle and
  • Stephan Barcikowski

Beilstein J. Nanotechnol. 2025, 16, 1141–1159, doi:10.3762/bjnano.16.84

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Published 17 Jul 2025

Soft materials nanoarchitectonics: liquid crystals, polymers, gels, biomaterials, and others

  • Katsuhiko Ariga

Beilstein J. Nanotechnol. 2025, 16, 1025–1067, doi:10.3762/bjnano.16.77

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  • evaluate the physical properties of these nanostructures and nanospaces [110][111][112][113][114]. Concurrently, significant developments in the fabrication of functional materials and devices through microfabrication and nanofabrication have also contributed to technological innovation [115][116][117][118
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Published 04 Jul 2025

Focused ion and electron beams for synthesis and characterization of nanomaterials

  • Aleksandra Szkudlarek

Beilstein J. Nanotechnol. 2025, 16, 613–616, doi:10.3762/bjnano.16.47

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  • Aleksandra Szkudlarek Academic Centre for Materials and Nanotechnology, AGH University of Krakow, av. Mickiewicza 30, 30-059, Krakow, Poland 10.3762/bjnano.16.47 Keywords: deposition; etching; focused electron beams; focused ion beams; lithography; milling; nanofabrication; 3D nanostructures; It
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Published 02 May 2025

Fabrication and evaluation of BerNPs regarding the growth and development of Streptococcus mutans

  • Tuyen Huu Nguyen,
  • Hong Thanh Pham,
  • Kieu Kim Thanh Nguyen,
  • Loan Hong Ngo,
  • Anh Ngoc Tuan Mai,
  • Thu Hoang Anh Lam,
  • Ngan Thi Kim Phan,
  • Dung Tien Pham,
  • Duong Thuy Hoang,
  • Thuc Dong Nguyen and
  • Lien Thi Xuan Truong

Beilstein J. Nanotechnol. 2025, 16, 308–315, doi:10.3762/bjnano.16.23

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  • materials with novel properties. The development of substances and methods with enhanced water dispersibility and bioavailability from materials such as berberine and curcumin is a current trend. Several studies on the nanofabrication of berberine aimed at improving its bioavailability and evaluating its
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Published 27 Feb 2025

Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition

  • Alexander Kuprava and
  • Michael Huth

Beilstein J. Nanotechnol. 2025, 16, 35–43, doi:10.3762/bjnano.16.4

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  • substantially smaller than the sticking coefficients previously assumed for Me3CpPtMe (1.0). Furthermore, depositions performed at different substrate temperatures indicate a temperature dependence of the sticking coefficient. Keywords: adsorption; continuum model; FEBID; nanofabrication; sticking coefficient
  • is needed and can be obtained based on a simulation of the FEBID process using the so-called continuum model that can be of great assistance for the nanofabrication process optimization [2][3]. Here again, sufficiently accurate knowledge of the values for the model-dependent set of precursor
  • dynamics of larger precursor molecules. Methods A dual-beam microscope Nova 600 (FEI Company, the Netherlands) at Goethe University Frankfurt was used for the nanofabrication process. Structures were deposited on a 500 nm thick Au surface on top of a SiO2-terminated Si substrate in order to prevent
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Published 13 Jan 2025

Ion-induced surface reactions and deposition from Pt(CO)2Cl2 and Pt(CO)2Br2

  • Mohammed K. Abdel-Rahman,
  • Patrick M. Eckhert,
  • Atul Chaudhary,
  • Johnathon M. Johnson,
  • Jo-Chi Yu,
  • Lisa McElwee-White and
  • D. Howard Fairbrother

Beilstein J. Nanotechnol. 2024, 15, 1427–1439, doi:10.3762/bjnano.15.115

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  • Focused ion beam-induced deposition (FIBID) and focused electron beam-induced deposition (FEBID) are vacuum-based, charged-particle bottom-up nanofabrication techniques that directly fabricate metal containing nanostructures as a consequence of the reactions between ions or electrons and organometallic
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Published 19 Nov 2024

Water-assisted purification during electron beam-induced deposition of platinum and gold

  • Cristiano Glessi,
  • Fabian A. Polman and
  • Cornelis W. Hagen

Beilstein J. Nanotechnol. 2024, 15, 884–896, doi:10.3762/bjnano.15.73

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  • microscope using commercially available components and chemicals, which paves the way for a broader application of direct etching-assisted FEBID to obtain pure metallic structures. Keywords: FEBID; gold; nanofabrication; platinum; purification; Introduction Focused electron beam-induced deposition (FEBID
  • ) is a nanofabrication technique that allows for the direct writing of three-dimensional nanostructures [1][2][3]. In FEBID, a gaseous precursor, often an organometallic compound, is injected in the vacuum chamber of a scanning electron microscope (SEM), adsorbed on a substrate, and dissociated by a
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Published 18 Jul 2024

Electron-induced ligand loss from iron tetracarbonyl methyl acrylate

  • Hlib Lyshchuk,
  • Atul Chaudhary,
  • Thomas F. M. Luxford,
  • Miloš Ranković,
  • Jaroslav Kočišek,
  • Juraj Fedor,
  • Lisa McElwee-White and
  • Pamir Nag

Beilstein J. Nanotechnol. 2024, 15, 797–807, doi:10.3762/bjnano.15.66

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  • the interaction with free electrons. The motivation comes from the possible use of this molecule as a nanofabrication precursor and from the corresponding need to understand its elementary reactions fundamental to the electron-induced deposition. We utilize two complementary electron collision setups
  • not visible in the linear scale of Figure 3a, which was also recorded on the CLUB setup at low electron energies). Conclusion We report on electron-induced fragmentation of Fe(CO)4MA with a view of its possible use as a nanofabrication precursor. Dissociative ionization of this molecule leads to
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Published 03 Jul 2024

Level set simulation of focused ion beam sputtering of a multilayer substrate

  • Alexander V. Rumyantsev,
  • Nikolai I. Borgardt,
  • Roman L. Volkov and
  • Yuri A. Chaplygin

Beilstein J. Nanotechnol. 2024, 15, 733–742, doi:10.3762/bjnano.15.61

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  • semiconductor heterostructures [13]. Metal and dielectric layers can be used as hard masks for achieving high resolution and throughput of the FIB nanofabrication process [14]. Modification of integrated circuits [15] is an industrially relevant application of multilayer structure processing. Effective
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Published 24 Jun 2024

Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications

  • August K. Roos,
  • Ermes Scarano,
  • Elisabet K. Arvidsson,
  • Erik Holmgren and
  • David B. Haviland

Beilstein J. Nanotechnol. 2024, 15, 242–255, doi:10.3762/bjnano.15.23

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  • first spin a thin layer of an adhesion promoter (AR 300–80) before spinning a roughly 170 nm thick layer of the electron-beam resist ARP–6200–09 (CSAR 09), baking at 150 °C for 1 min. We expose with a dose of 110 μC/cm2 in a Voyager EBL system from Raith Nanofabrication and etch the Nb-Ti-N film using
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Published 15 Feb 2024

Ion beam processing of DNA origami nanostructures

  • Leo Sala,
  • Agnes Zerolová,
  • Violaine Vizcaino,
  • Alain Mery,
  • Alicja Domaracka,
  • Hermann Rothard,
  • Philippe Boduch,
  • Dominik Pinkas and
  • Jaroslav Kocišek

Beilstein J. Nanotechnol. 2024, 15, 207–214, doi:10.3762/bjnano.15.20

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  • unperturbed. Present stability and nature of damages on DNA origami nanostructures enable fusion of DNA origami advantages such as shape and positioning control into novel ion beam nanofabrication approaches. Keywords: DNA nanotechnology; DNA origami; FIB; heavy ions; Introduction Ion beam interaction with
  • method for nanofabrication such as FIB, which also happens to cover the low-energy interaction regime. The method is widely available as a complement to scanning electron microscopes. Focused ion beams allow for both subtractive and additive nanoscale manufacturing [31] and can also be used for chemical
  • nanometer scale and the nanometric precision of DNA origami-based assembly open possibilities in more precise tuning and control of nanofabrication. Here we analyze the consequences of ion beam irradiation on 2D DNA origami nanotriangles deposited on Si as a model substrate and resulting nanostructure
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Published 12 Feb 2024

In situ optical sub-wavelength thickness control of porous anodic aluminum oxide

  • Aleksandrs Dutovs,
  • Raimonds Popļausks,
  • Oskars Putāns,
  • Vladislavs Perkanuks,
  • Aušrinė Jurkevičiūtė,
  • Tomas Tamulevičius,
  • Uldis Malinovskis,
  • Iryna Olyshevets,
  • Donats Erts and
  • Juris Prikulis

Beilstein J. Nanotechnol. 2024, 15, 126–133, doi:10.3762/bjnano.15.12

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  • , Latvia Faculty of Physics, Mathematics and Optometry, University of Latvia, 3 Jelgavas Str., Riga LV-1004, Latvia 10.3762/bjnano.15.12 Abstract Porous anodic aluminum oxide (PAAO), sometimes referred to as nanoporous anodic alumina, serves as a cost-effective template for nanofabrication in many fields
  • applications in many fields of science and technology, including nanofabrication [1], optical coatings [2], sensing [3][4][5], and others [6]. Many synthesis protocols have been developed for precise control of the pore structure of PAAO [7], which allow for the creation of nanoscale patterns for various types
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Published 31 Jan 2024

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

  • Joshua Williams,
  • Michael I. Faley,
  • Joseph Vimal Vas,
  • Peng-Han Lu and
  • Rafal E. Dunin-Borkowski

Beilstein J. Nanotechnol. 2024, 15, 1–12, doi:10.3762/bjnano.15.1

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  • imaging; nanodisk; nanofabrication; permalloy; Introduction The ability to study the spatial distribution of magnetization in ferromagnetic nanostructures is important for developing nanoelectronics, particularly for data storage and information processing. A vortex spin configuration has been observed
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Published 02 Jan 2024

Industrial perspectives for personalized microneedles

  • Remmi Danae Baker-Sediako,
  • Benjamin Richter,
  • Matthias Blaicher,
  • Michael Thiel and
  • Martin Hermatschweiler

Beilstein J. Nanotechnol. 2023, 14, 857–864, doi:10.3762/bjnano.14.70

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  • that can overcome these challenges [27]. Specifically, light-based 3D printing techniques such as stereolithography (SLA), digital light processing (DLP), and two-photon polymerization (2PP) simplify the rapid prototyping workflow when compared to traditional micro- and nanofabrication methods [28][29
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Published 15 Aug 2023

Nanoarchitectonics for advanced applications in energy, environment and biology: Method for everything in materials science

  • Katsuhiko Ariga

Beilstein J. Nanotechnol. 2023, 14, 738–740, doi:10.3762/bjnano.14.60

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  • in the creation of new materials by extracting and processing natural resources, and using these resources in nanofabrication. In order to establish a methodology to generate new materials which takes advantage of the properties of nanostructures, it is necessary to integrate science and technology
  • - and nanofabrication sectors as well as in bio-related sciences [9]. Nanoarchitectonics bridges the worlds of nanotechnology and materials science integrating all related scientific fields in between. Fundamentally, all materials are composed of atoms and molecules, so nanoarchitectonics is applicable
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Published 19 Jun 2023

SERS performance of GaN/Ag substrates fabricated by Ag coating of GaN platforms

  • Magdalena A. Zając,
  • Bogusław Budner,
  • Malwina Liszewska,
  • Bartosz Bartosewicz,
  • Łukasz Gutowski,
  • Jan L. Weyher and
  • Bartłomiej J. Jankiewicz

Beilstein J. Nanotechnol. 2023, 14, 552–564, doi:10.3762/bjnano.14.46

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  • : GaN/Ag; magnetron sputtering; nanofabrication; pulsed laser deposition; SERS substrates; surface-enhanced Raman spectroscopy (SERS); Introduction Surface-enhanced Raman spectroscopy (SERS) is a highly sensitive and specific technique with multiplexing capabilities [1][2][3][4]. It is considered for
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Published 03 May 2023

Formation of nanoflowers: Au and Ni silicide cores surrounded by SiOx branches

  • Feitao Li,
  • Siyao Wan,
  • Dong Wang and
  • Peter Schaaf

Beilstein J. Nanotechnol. 2023, 14, 133–140, doi:10.3762/bjnano.14.14

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  • to developing different kinds of nanofabrication methods during the past decades. For example, silicon oxide (SiOx) nanostructures can be grown by the catalyzing effect of Au nanoparticles based on the vapor–liquid–solid (VLS) mechanism [1][2][3][4]. Au–SiOx nanoflowers consisting of Au nanoparticles
  • substrate at higher temperatures in oxygen-deficient environment [3][4]. Another cost-effective nanofabrication method, thin film dewetting, driven by the reduction of the surface energy and the interface energy has also been profusely studied because it provides a straightforward and fast way to produce
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Published 20 Jan 2023

Application of nanoarchitectonics in moist-electric generation

  • Jia-Cheng Feng and
  • Hong Xia

Beilstein J. Nanotechnol. 2022, 13, 1185–1200, doi:10.3762/bjnano.13.99

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  • , photolithography, embossing, deposition, and sol–gel nanofabrication, all of which can provide high specific surface areas [19][24][25][26][27][28]. Nanomaterials can also be divided into inorganic nanomaterials and organic nanomaterials. In inorganic nanomaterials, metal nanomaterials and carbon nanomaterials
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Published 25 Oct 2022

Investigation of electron-induced cross-linking of self-assembled monolayers by scanning tunneling microscopy

  • Patrick Stohmann,
  • Sascha Koch,
  • Yang Yang,
  • Christopher David Kaiser,
  • Julian Ehrens,
  • Jürgen Schnack,
  • Niklas Biere,
  • Dario Anselmetti,
  • Armin Gölzhäuser and
  • Xianghui Zhang

Beilstein J. Nanotechnol. 2022, 13, 462–471, doi:10.3762/bjnano.13.39

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  • tailor surface properties [13][14][15][16][17][18][19][20]. These monolayers can be modified with lithographic tools, such as scanning probes [21], UV light, X-rays, ions, or electron beams [22][23][24]. A particularly versatile nanofabrication scheme utilizes electron irradiation of aromatic SAMs to
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Published 25 May 2022

Thermal oxidation process on Si(113)-(3 × 2) investigated using high-temperature scanning tunneling microscopy

  • Hiroya Tanaka,
  • Shinya Ohno,
  • Kazushi Miki and
  • Masatoshi Tanaka

Beilstein J. Nanotechnol. 2022, 13, 172–181, doi:10.3762/bjnano.13.12

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  • . Funding This work was supported by JSPS KAKENHI (25286016 to M. Tanaka,17H02777 to K. Miki) and the NIMS Nanofabrication Platform in the Nanotechnology Platform Project from the Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT).
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Published 03 Feb 2022

Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF3)4

  • Alexey Prosvetov,
  • Alexey V. Verkhovtsev,
  • Gennady Sushko and
  • Andrey V. Solov’yov

Beilstein J. Nanotechnol. 2021, 12, 1151–1172, doi:10.3762/bjnano.12.86

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  • fragmentation and the related mechanism of nanostructure formation and growth using FEBID, which are essential for the further advancement of FEBID-based nanofabrication. The developed computational methodology is general and applicable to different precursor molecules, substrate types, and irradiation regimes
  • . The methodology can also be adjusted to simulate the nanostructure formation by other nanofabrication techniques using electron beams, such as direct electron beam lithography. In the present study, the methodology is applied to the IDMD simulation of the FEBID of Pt(PF3)4, a widely studied precursor
  • of the fabricated nanostructures is still a technological challenge [7], mainly originating from the lack of molecular-level understanding of the irradiation-driven chemistry (IDC) underlying formation and growth of nanostructures. Further advances in FEBID-based nanofabrication require a deeper
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Published 13 Oct 2021

Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?

  • Annalena Wolff

Beilstein J. Nanotechnol. 2021, 12, 965–983, doi:10.3762/bjnano.12.73

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  • century [1]. From its beginnings as primarily an imaging tool [2][3][4][5][6][7][8][9] it was established as a key tool in nanofabrication [10][11][12][13][14][15], defect engineering [16][17], and recently for material analysis [18][19]. The extended range of applications in which the second-generation
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Published 31 Aug 2021
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