Enhancing the photoelectrochemical performance of BiOI-derived BiVO₄ films by controlled-intensity current electrodeposition

• Huu Phuc Dang,
• Khanh Quang Nguyen,
• Nguyen Thi Mai Tho and
• Tran Le

Beilstein J. Nanotechnol. 2025, 16, 1289–1301, doi:10.3762/bjnano.16.94

• Abstract This study investigates the fabrication of BiVO4 photoanodes using a controlled-intensity current electrodeposition method to improve their photoelectrochemical (PEC) performance. The impact of varying the deposition current density and VO(acac)2 concentration was systematically analyzed to

• optimize the crystallinity, surface morphology, and electronic properties of the films. Subsequently, an electrochemical deposition method was developed to facilitate the uniform distribution of V2O5 among Bi–O–I flakes to homogeneously enhance the conversion reaction. The XRD pattern confirms the

• monoclinic scheelite BiVO4 structure with dominant (121) and (004) peaks. FESEM imaging revealed that the different deposition conditions influenced the surface morphologies of the BiOI and BiVO4 films. Photocurrent density measurements showed that BiVO4(326) achieved 1.2 mA·cm−2 at 1.23 V vs RHE

Hydrogels and nanogels: effectiveness in dermal applications

• Jéssica da Cruz Ludwig,
• Diana Fortkamp Grigoletto,
• Daniele Fernanda Renzi,
• Wolf-Rainer Abraham,
• Daniel de Paula and
• Najeh Maissar Khalil

Beilstein J. Nanotechnol. 2025, 16, 1216–1233, doi:10.3762/bjnano.16.90

• guanosine quartet hydrogels loaded with recombinant human-sourced collagen can be wrapped onto the skin surface. These films can supply collagen deposition for the wound by recruiting macrophages and fibroblasts and eventually inducing their proliferation and migration [42]. In the study by Zhao et al

• ± 1.8%, respectively. Nanogels containing quercetin (0.12%) and TiO2 (5% and 15%) showed a drug release rate above 70% with a significant increase (p < 0.001) in the deposition of quercetin on the skin when compared with a drug suspension in 24 hours. The mean number of tumors, tumor volume, and

Mechanical stability of individual bacterial cells under different osmotic pressure conditions: a nanoindentation study of Pseudomonas aeruginosa

• Lizeth García-Torres,
• Idania De Alba Montero,
• Eleazar Samuel Kolosovas-Machuca,
• Facundo Ruiz,
• Sumati Bhatia,
• Jose Luis Cuellar Camacho and
• Jaime Ruiz-García

Beilstein J. Nanotechnol. 2025, 16, 1171–1183, doi:10.3762/bjnano.16.86

• bacterial adhesion through short-range electrostatic and hydrophobic interactions. Before deposition on the PLL-coated substrate, the bacterial suspension was centrifuged at 2500 rpm for 3 min, and the resulting supernatant was removed. The bacteria were then resuspended in 150 μL of PBS to increase their

• concentration and before the previous deposition of 5 μL on the PLL-coated substrate. A liquid cell was assembled to measure changes in bacterial membrane rigidity response when transitioning between different solutions. Once inside the fluid cell chamber, bacteria were imaged and tested in PBS solution and

Influence of ion beam current on the structural, optical, and mechanical properties of TiO₂ coatings: ion beam-assisted vs conventional electron beam evaporation

• Agata Obstarczyk and
• Urszula Wawrzaszek

Beilstein J. Nanotechnol. 2025, 16, 1097–1112, doi:10.3762/bjnano.16.81

• ) coatings deposited using electron beam evaporation (EBE) and ion beam-assisted deposition (IBAD) are presented. Post-process annealing at 800 °C was also conducted to examine its impact on the properties of the prepared coatings. After annealing at 800 °C, a transition from amorphous to the anatase phase

• , adhesive, and durable TiO2 coatings with improved optical and mechanical properties, suitable for applications requiring enhanced wear resistance. Keywords: electron beam evaporation; ion beam-assisted deposition; mechanical properties; nanocrystalline anatase; optical properties; TiO2 coatings

• ; Introduction One of the commonly used methods for the deposition of various materials for thin film optical coatings, is electron beam evaporation (EBE) [1][2][3][4][5]. Today, in many applications, including medicine, telecommunications, optoelectronics, photovoltaics, the requirements for optical coatings

Single-layer graphene oxide film grown on α-Al₂O₃(0001) for use as an adsorbent

• Shiro Entani,
• Mitsunori Honda,
• Masaru Takizawa and
• Makoto Kohda

Beilstein J. Nanotechnol. 2025, 16, 1082–1087, doi:10.3762/bjnano.16.79

• obtained by oxidizing monolayer graphene grown by metal-free chemical vapor deposition on the α-Al2O3(0001) surface, and the adsorption state was determined by surface analytical techniques. It was clarified that Cs adsorbs on oxygen functional groups by substituting with H atoms from carboxyl and hydroxy

• deposition; electronic state analysis; graphene oxide; X-ray absorption fine structure; Introduction Graphene oxide (GO) is oxidized graphene and its surface and periphery are partially modified by epoxy, hydroxy, and carboxy functional groups [1][2]. GO can be thinned to a monolayer of one carbon atom and

• typically been fabricated through casting small pieces of GO flakes onto a substrate. In this study, the SLGO film was synthesized by oxidizing single-layer graphene (SLG) grown by metal-free chemical vapor deposition (CVD) on a α-Al2O3(0001) substrate. The strong interface interaction between SLG and α

Piezoelectricity of hexagonal boron nitrides improves bone tissue generation as tested on osteoblasts

• Sevin Adiguzel,
• Nilay Cicek,
• Zehra Cobandede,
• Feray B. Misirlioglu,
• Hulya Yilmaz and
• Mustafa Culha

Beilstein J. Nanotechnol. 2025, 16, 1068–1081, doi:10.3762/bjnano.16.78

• nucleation of calcium and phosphate ions, imparting stiffness and resistance to bone. Additionally, collagen and noncollagenous matrix proteins contribute to bone formation by offering a scaffold for hydroxyapatite deposition [2][3]. Bone tissue consists of four main cell types: bone lining cells

• , osteoclasts, osteoblasts, and osteocytes, which coordinate bone resorption and deposition. Bone lining cells cover bone surfaces and play a key role in osteoclast differentiation [4][5]. Osteoclasts are large, multinucleated cells responsible for bone resorption through lysosomal enzymes and acid secretion [6

• ]. Osteocytes, the longest-lived bone cells, arise from osteoblast differentiation and regulate bone maintenance [7]. Osteoblasts, found on bone surfaces, drive bone formation through two key steps: matrix deposition and mineralization. During matrix deposition, collagen and noncollagenous proteins are secreted

Time-resolved probing of laser-induced nanostructuring processes in liquids

• Maximilian Spellauge,
• David Redka,
• Mianzhen Mo,
• Changyong Song,
• Heinz Paul Huber and
• Anton Plech

Beilstein J. Nanotechnol. 2025, 16, 968–1002, doi:10.3762/bjnano.16.74

• of ablation, fragmentation or colloidal fusion may look macroscopically different in each application, the underlying fundamental mechanisms are always the same cascade of laser interaction with matter, non-thermal or thermal energy deposition, phase transitions, and the subsequent structure

• experimental platform to explore strong light–matter interactions. Structural dynamics in liquids For laser-based materials processing in liquids, including techniques of LAL, LFL, and LML, a key challenge lies in managing the intricate interplay between laser energy deposition, plasma generation, and the

• , it is important to understand and quantify such processes that may occur concomitantly and will affect each other. First, we develop a basic hypothesis of how laser irradiation with significant energy deposition into the system of interest (for example an aqueous colloid or solid surface in contact

Structural and magnetic properties of microwave-synthesized reduced graphene oxide/VO₂/Fe₂O₃ nanocomposite

• Sumanta Sahoo,
• Ankur Sood and
• Sung Soo Han

Beilstein J. Nanotechnol. 2025, 16, 921–932, doi:10.3762/bjnano.16.70

• graphite oxide to form rGO, the reduction of V2O5 to form VO2, and the formation of Fe2O3 from ferrocene. X-ray diffraction and X-ray photoelectron spectroscopy analyses confirm the formation of distinct metal oxides in the presence of rGO. Furthermore, the morphological analysis reveals the deposition of

• ternary NCs of graphene materials, several conventional approaches, such as sol–gel, hydrothermal/solvothermal, calcination/thermal annealing, chemical vapor deposition, liquid-phase exfoliation, and freeze-drying have been reported. However, the MW-assisted synthetic approaches are found to be superior

• , including XRD, Raman, and XPS analyses. The morphological study revealed the deposition of α-Fe2O3 NPs and VO2 nanorods on the rGO surface. Owing to the presence of magnetic components, the ternary NC displayed good magnetic characteristics at room temperature to showcase its potentiality in advanced

Focused ion beam-induced platinum deposition with a low-temperature cesium ion source

• Thomas Henning Loeber,
• Bert Laegel,
• Meltem Sezen,
• Feray Bakan Misirlioglu,
• Edgar J. D. Vredenbregt and
• Yang Li

Beilstein J. Nanotechnol. 2025, 16, 910–920, doi:10.3762/bjnano.16.69

• and Application Center (SUNUM), 34956, Istanbul, Turkey Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands 10.3762/bjnano.16.69 Abstract In addition to precise milling, the deposition of material at a specific location on a sample

• surface is a frequently used process of focused ion beam (FIB) systems. Here, we report on the deposition of platinum (Pt) with a new kind of cesium (Cs) FIB, in which the cesium ions are produced by a low-temperature ion source. Platinum was deposited at different acceleration voltages and ion beam

• currents. Deposition rate, material composition, and electrical resistivity were examined and compared with layers deposited at comparable settings with a standard gallium (Ga) FIB. The deposition rate is found to depend linearly on the current density. The rate is comparable for Cs+ and Ga+ under similar

Characterization of ion track-etched conical nanopores in thermal and PECVD SiO₂ using small angle X-ray scattering

• Shankar Dutt,
• Rudradeep Chakraborty,
• Christian Notthoff,
• Pablo Mota-Santiago,
• Christina Trautmann and
• Patrick Kluth

Beilstein J. Nanotechnol. 2025, 16, 899–909, doi:10.3762/bjnano.16.68

• -etched nanopores in two types of silicon dioxide, namely, one produced by wet thermal oxidation of Si (thermal SiO2) and another deposited by plasma-enhanced chemical vapor deposition (PECVD). Thermally grown SiO2 is of high quality and stoichiometric, however, requires high temperatures for growth, and

• can only be grown on a Si substrate. PECVD, in contrast, allows for the deposition at much lower temperatures on many different substrates with control over the film properties, such as stoichiometry, density, refractive index, and residual stress. As these fabrication methods involve fundamentally

• that can arise from the PECVD deposition processes, as the samples originated from different deposition runs. The 185 MeV-fabricated nanopores also exhibited the highest polydispersity, underscoring the variability in PECVD film characteristics. The validity of our analysis is supported by multiple

Heat-induced transformation of nickel-coated polycrystalline diamond film studied in situ by XPS and NEXAFS

• Olga V. Sedelnikova,
• Yuliya V. Fedoseeva,
• Dmitriy V. Gorodetskiy,
• Yuri N. Palyanov,
• Elena V. Shlyakhova,
• Eugene A. Maksimovskiy,
• Anna A. Makarova,
• Lyubov G. Bulusheva and
• Aleksandr V. Okotrub

Beilstein J. Nanotechnol. 2025, 16, 887–898, doi:10.3762/bjnano.16.67

• transformation of bare and nickel-coated polycrystalline diamond films under high-vacuum annealing The PCD film was produced by plasma-enhanced chemical vapor deposition (PE CVD) using acetone (CH3)2CO, hydrogen, and air as the precursor gases for the plasma [37]. The film consists of crystallites with

• crystalline quality in the PCD film at the micron scale (Supporting Information File 1, Figure S2). Thermal evaporation of nickel and its deposition on the PCD film surface resulted in the formation of a uniform metallic layer with a thickness of about 40 nm (Supporting Information File 1, Figure S1d). The

• hydrogen/acetone/air mixture. The deposition parameters were typical of those previously employed for an “Astex” system (2.45 GHz, 4.5 kW): a pressure of 115 Torr, hydrogen, acetone, and air flow rates of 500, 18, and 0.3 sccm, respectively, and substrate temperature in the range of 940–980 °C [28][37

Ar⁺ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties

• Manu Bura,
• Divya Gupta,
• Arun Kumar and
• Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 872–886, doi:10.3762/bjnano.16.66

• displays [5], solar cells [6], and light-emitting diodes [7]. There are numerous methods for synthesizing ZnO films, including pulsed laser deposition, spray pyrolysis, radio frequency (RF) sputtering, and sol–gel techniques. Here RF sputtering is preferred over other methods because it provides high

• deposition rates and uniform growth of films with good reproducibility [4]. The physical properties of grown ZnO films can be tuned by altering various growth parameters and employing post-deposition treatments such as ion implantation and thermal annealing. Ion implantation has proven a versatile tool to

• the chamber has stabilized, the sputtering power is set to a value of 80 W. The sputtering is performed at a pressure of 1.8 × 10−5 Torr at room temperature with a deposition rate of 0.4–0.5 Å·s−1. A spectroscopic ellipsometer is used to calculate the thickness of the pristine ZnO films. An

Insights into the electronic and atomic structures of cerium oxide-based ultrathin films and nanostructures using high-brilliance light sources

• Paola Luches and
• Federico Boscherini

Beilstein J. Nanotechnol. 2025, 16, 860–871, doi:10.3762/bjnano.16.65

• minimum of the inelastic mean free path. A study by Simon et al. on porous Pt-doped cerium oxide films prepared by direct liquid injection chemical vapor deposition, comparing conventional and synchrotron-radiation based XPS, has demonstrated that the Pt atoms are uniformly dispersed in the nanoparticles

Synchrotron X-ray photoelectron spectroscopy study of sodium adsorption on vertically arranged MoS₂ layers coated with pyrolytic carbon

• Alexander V. Okotrub,
• Anastasiya D. Fedorenko,
• Anna A. Makarova,
• Veronica S. Sulyaeva,
• Yuliya V. Fedoseeva and
• Lyubov G. Bulusheva

Beilstein J. Nanotechnol. 2025, 16, 847–859, doi:10.3762/bjnano.16.64

• temperature of 873 K for 30 min. Heating the raw film in a hydrogen atmosphere at 1073 K removes excess sulfur and other contaminations from the film surface. In the final step, a thin PyC film synthesized by chemical vapor deposition (CVD) technique is placed on the surface of the cleaned MoS2 film using the

• with the p orbitals of sulfur [44]. Figure 3 shows the sequence of a three-step sodiation/desodiation experiment performed with samples in the UHV chamber of the spectrometer. Sodium vapor was deposited simultaneously on three studied samples for 10 min. The second step included additional deposition

• deposition/removal of sodium deviate from the corresponding values for the initial MoS2 film by no more than 16% for the surface and 9% for the bulk. The deviations may be due to the fact that it is practically impossible to record spectra from the same place on the sample, which is repeatedly moved between

Facile one-step radio frequency magnetron sputtering of Ni/NiO on stainless steel for an efficient electrode for hydrogen evolution reaction

• Ha Huu Do,
• Khac Binh Nguyen,
• Phuong N. Nguyen and
• Hoai Phuong Pham

Beilstein J. Nanotechnol. 2025, 16, 837–846, doi:10.3762/bjnano.16.63

• synthesizing electrode materials in recent years because they offer a cleaner pathway than solution-based synthetic processes [20][21][22]. Among vacuum deposition methods, magnetron sputtering has been widely applied in industrial applications for fabricating thin films because of its advantages, such as good

• adhesion and uniform distribution of materials on various substrates [23][24][25]. For instance, Ren et al. used the magnetron sputtering method to introduce Si into an iridium electrode to achieve efficient water electrolysis [26]. Additionally, this technique’s fast deposition rate and high level of the

• of Ni/NiO were deposited on the SS substrate through reactive RF magnetron sputtering with various O2 flow rates. In particular, the Ni/NiO nanolayers were deposited using a pure Ni target at a deposition pressure of 5 × 10−3 Torr, sputtering power of 70 W, and substrate temperature of 250 °C. In

Morphology and properties of pyrite nanoparticles obtained by pulsed laser ablation in liquid and thin films for photodetection

• Akshana Parameswaran Sreekala,
• Bindu Krishnan,
• Rene Fabian Cienfuegos Pelaes,
• David Avellaneda Avellaneda,
• Josué Amílcar Aguilar-Martínez and
• Sadasivan Shaji

Beilstein J. Nanotechnol. 2025, 16, 785–805, doi:10.3762/bjnano.16.60

• synthesized by PLAL. FeS2 NPs were successfully synthesized in five different solvents, along with a minor phase of iron sulfide (FeS). Additionally, by combining electrophoretic deposition and spin-coating techniques, thin film photodiodes of FeS2 were fabricated on an n-type Si substrate utilizing the

• prepared by PLAL. Keywords: electrophoretic deposition; pulsed laser ablation in liquid; pyrite nanoparticles; self-powered photodetector; spin coating; Introduction Pyrite (FeS2) is one of the earth-abundant and nontoxic semiconductors possessing a promising role in optoelectronic applications. FeS2 has

• . reported the synthesis of single-phase FeS2 thin films using a combination of electrochemical and hydrothermal techniques. The electrodeposition was performed in a nonaqueous electrolytic bath consisting of diethylene glycol [24]. Among the deposition techniques, electrophoretic deposition (EPD) is a cost

High-temperature epitaxial growth of tantalum nitride thin films on MgO: structural evolution and potential for SQUID applications

• Michelle Cedillo Rosillo,
• Oscar Contreras López,
• Jesús Antonio Díaz,
• Agustín Conde Gallardo and
• Harvi A. Castillo Cuero

Beilstein J. Nanotechnol. 2025, 16, 690–699, doi:10.3762/bjnano.16.53

• using pulsed laser deposition (PLD). This research investigates the influence of varying deposition parameters, including substrate temperature and ambient gas composition, on the structural, morphological, and superconducting properties of the films. X-ray photoelectron spectroscopy, X-ray diffraction

• 6.3 K, depending on the stoichiometry and deposition conditions. Resistance–temperature curves further confirm the high quality of the films, as evidenced by their low residual resistivity ratios. These findings demonstrate that PLD is a suitable technique for producing high-quality TaN

• could be pushed up to 10.8 K [13]. The Tc of TaN depends strongly on the crystallinity and stoichiometry of the thin films. Reports mentioned that pulsed laser deposition (PLD) in the reactive pulsed laser deposition (RPLD) mode is an efficient method for the growth of high-quality thin films [14]. In

The impact of tris(pentafluorophenyl)borane hole transport layer doping on interfacial charge extraction and recombination

• Konstantinos Bidinakis and
• Stefan A. L. Weber

Beilstein J. Nanotechnol. 2025, 16, 678–689, doi:10.3762/bjnano.16.52

• deposited a mesoporous TiO2 layer from a (transparent) titania paste solution (Aldrich, 16.67 wt % in ethanol) via spin coating and annealed it (same parameters as in the previous step). After each of these titania deposition steps, we subjected the films to a UV-ozone cleaning step (FHR UVO 150) for 30 min

• deposition method (500 rpm for 10 s and 4000 rpm for 25 s). A volume of 150 μL of toluene was used as anti-solvent 10 s into the second step. The perovskite was crystalized during a 100 °C annealing step for 30 min. For the cells that incorporated spiro-OMeTAD, we used a solution containing 72.3 mg spiro

• solution containing 15 mg PTAA, 7.5 μL, LiTFSI solution (170 mg in 1 mL acetonitrile), and 7.5 μL tBP solution (1:1 in acetonitrile), dissolved in 1 mL toluene. For the BCF batch, instead of LiTFSI and tBP, BCF was added in at an 8% mol ratio to PTAA. After the HTL deposition, an Au electrode was

Focused ion and electron beams for synthesis and characterization of nanomaterials

• Aleksandra Szkudlarek

Beilstein J. Nanotechnol. 2025, 16, 613–616, doi:10.3762/bjnano.16.47

• Aleksandra Szkudlarek Academic Centre for Materials and Nanotechnology, AGH University of Krakow, av. Mickiewicza 30, 30-059, Krakow, Poland 10.3762/bjnano.16.47 Keywords: deposition; etching; focused electron beams; focused ion beams; lithography; milling; nanofabrication; 3D nanostructures; It

• etching or deposition. The precision and versatility of these beams, including the use of multiple gas species, open pathways to fabricate 3D nanomaterials that are unattainable through conventional chemical methods. However, achieving reproducibility in such structures requires a deep understanding of

• the fundamental mechanisms underlying precursor fragmentation by low-energy electrons, which remains an ongoing focus of study in the field, see Figure 1. Within the widely studied group of acetylacetonate complexes, which also play a crucial role in chemical vapor deposition and atomic layer

Polyurethane/silk fibroin-based electrospun membranes for wound healing and skin substitute applications

• Iqra Zainab,
• Zohra Naseem,
• Syeda Rubab Batool,
• Muhammad Waqas,
• Ahsan Nazir and
• Muhammad Anwaar Nazeer

Beilstein J. Nanotechnol. 2025, 16, 591–612, doi:10.3762/bjnano.16.46

• endothelial cells are heavily activated during the proliferation stage, which helps in matrix deposition, wound closure, and angiogenesis. In wound healing, the formation of granulation tissue occurs, which is composed of cellular and fibril matrix [42]. Fibroblasts synthesize the fibrillar components

• dermal matrix [85]. In vitro studies showed that the use of electrospun silk nanofibers favors the attachment of human fibroblasts, keratinocytes, and deposition of collagen type I [86]. Silk can be processed into hydrogels, scaffolds, and films with the incorporation of bioactive factors such as growth

Feasibility analysis of carbon nanofiber synthesis and morphology control using a LPG premixed flame

• Iftikhar Rahman Bishal,
• Muhammad Hilmi Ibrahim,
• Norikhwan Hamzah,
• Mohd Zamri Mohd Yusop,
• Faizuan Bin Abdullah,
• I Putu Tedy Indrayana and
• Mohd Fairus Mohd Yasin

Beilstein J. Nanotechnol. 2025, 16, 581–590, doi:10.3762/bjnano.16.45

• , Udayana University 80231 Badung, Bali, Indonesia 10.3762/bjnano.16.45 Abstract Flame synthesis using liquefied petroleum gas (LPG) as the precursor gas to produce carbon nanofibers (CNFs) is an economical alternative to conventional chemical vapor deposition methods using single-component fuels such as

• delivery, tissue engineering, and implants [7]. Methods of CNT/CNF synthesis include (a) chemical vapor deposition, (b) arc discharge, (c) flame synthesis, and (d) laser ablation [1]. Flame-assisted synthesis is a promising method for efficient and continuous one-step production. Various flame

• that flame synthesis can be faster and yield higher throughput compared to some recent works. The CNT/CNF growth rates decrease with increasing height above the burner because of lower temperatures and reduced CO concentrations [10]. A custom-made chamber device for flame fragments deposition with

Nanomaterials in targeting amyloid-β oligomers: current advances and future directions for Alzheimer's disease diagnosis and therapy

• Shiwani Randhawa,
• Trilok Chand Saini,
• Manik Bathla,
• Rahul Bhardwaj,
• Rubina Dhiman and
• Amitabha Acharya

Beilstein J. Nanotechnol. 2025, 16, 561–580, doi:10.3762/bjnano.16.44

• progression. They found that treatment with M2-EXOs in AD cell models, such as HT-22- and MAP2-positive neuronal cells, significantly reduced Aβ plaque deposition and expression of AβOs. Their findings suggest that M2-EXOs confer protective effects in AD pathogenesis through the modulation of PINK1/Parkin

Electron beam-based direct writing of nanostructures using a palladium β-ketoesterate complex

• Chinmai Sai Jureddy,
• Krzysztof Maćkosz,
• Aleksandra Butrymowicz-Kubiak,
• Iwona B. Szymańska,
• Patrik Hoffmann and
• Ivo Utke

Beilstein J. Nanotechnol. 2025, 16, 530–539, doi:10.3762/bjnano.16.41

• Rennes, CNRS, IPR (Institut de Physique de Rennes) - UMR 6251, Rennes, France Faculty of Chemistry, Nicolaus Copernicus University in Toruń (NCU), Toruń, Poland 10.3762/bjnano.16.41 Abstract Gas-assisted focused electron beam-induced deposition (FEBID) as a direct, minimally invasive 3D nanopatterning

• promising precursor for nanoprinting 3D structures with finely focused electron beams. Keywords: 3D nanoprinting; electron-induced molecule dissociation; focused electron beam-induced deposition; metal nanostructures; metalorganic complexes; Introduction Direct fabrication of nanostructures without the

• ][11][12] properties at the nanometer scale. One method that is capable of creating such nanostructures is focused electron beam-induced deposition (FEBID) [13][14][15][16][17][18][19][20][21][22][23]. In this technique, a focused electron beam decomposes adsorbed molecules on a substrate in vacuum

N₂⁺-implantation-induced tailoring of structural, morphological, optical, and electrical characteristics of sputtered molybdenum thin films

• Usha Rani,
• Kafi Devi,
• Divya Gupta and
• Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 495–509, doi:10.3762/bjnano.16.38

• substrates under suitable conditions lead to improvements in functionality and address the needs of various cutting-edge industries [6][7]. For the deposition of Mo thin films, various techniques such as chemical vapor deposition, physical vapor deposition (RF sputtering and DC sputtering) [1][8][9], and

• electron beam evaporation [10] have been reported in the literature. RF sputtering is the predominant technique for thin film deposition because of its benefits regarding layer adhesion, uniformity, composition, and deposition rate compared to other methods [11]. In the deposition of molybdenum films, RF

• the properties of argon-ion-implanted Mo thin films deposited via ion beam sputtering, varying deposition parameters such as accelerating voltage, incidence angle, and chamber pressure. Films deposited at near-normal incidence exhibited compressive stress and a nearly linear increase with the

Performance optimization of a microwave-coupled plasma-based ultralow-energy ECR ion source for silicon nanostructuring

• Joy Mukherjee,
• Safiul Alam Mollick,
• Tanmoy Basu and
• Tapobrata Som

Beilstein J. Nanotechnol. 2025, 16, 484–494, doi:10.3762/bjnano.16.37

• ° and 72.5°) sputtering of surface atoms and their consecutive redistribution [9][39][40]. During ion bombardment, the unequal radius of curvature of the surface leads to unequal deposition of energy at different points on the surface, which results in unequal sputtering at those points. This generates

• , rendering it valuable for both implantation and deposition processes. Our meticulous investigation of the ECR ion source lays the groundwork for ion beam-induced nanostructuring and layer-wise material modification, affording precise control over ion penetration depth and fluence. The manuscript emphasizes