Intermodal coupling spectroscopy of mechanical modes in microcantilevers

• Ioan Ignat,
• Bernhard Schuster,
• Jonas Hafner,
• MinHee Kwon,
• Daniel Platz and
• Ulrich Schmid

Beilstein J. Nanotechnol. 2023, 14, 123–132, doi:10.3762/bjnano.14.13

• multifrequency AFM methods designed for controlling the sense mode to reach their ultimate goal of greater signal-to-noise ratios. These possibilities only multiply if the mechanical–mechanical interactions were only one aspect of a device. In a MEMS or NEMS device, such interactions would be useful to bridge

Tubular glassy carbon microneedles with fullerene-like tips for biomedical applications

• Sharali Malik and
• George E. Kostakis

Beilstein J. Nanotechnol. 2022, 13, 455–461, doi:10.3762/bjnano.13.38

• material was pre-patterned as an array, which was then converted to glassy carbon microneedle patches via a conventional carbon-microelectromechanical system (C-MEMS) process [14]. In this article we report the fabrication of freestanding glassy carbon microneedles in a single step achieved by the

Electrostatic pull-in application in flexible devices: A review

• Teng Cai,
• Yuming Fang,
• Yingli Fang,
• Ruozhou Li,
• Ying Yu and
• Mingyang Huang

Beilstein J. Nanotechnol. 2022, 13, 390–403, doi:10.3762/bjnano.13.32

• researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices. Keywords: electrostatics; MEMS; microfluidics; NEM switches; pull-in; Introduction It has become

• development of new materials and microelectromechanical and nanoelectromechanical systems (MEMS/NEMS), MEMS devices have become an essential part of flexible electronic systems. Common flexible MEMS devices are based on electrostatic, piezoelectric, and thermal actuation. Electrostatic actuation is one of the

• earliest and most mature actuation mechanisms used in flexible MEMS devices. Because of its simple structure and convenience for integrated manufacturing, it is one of the most actively researched driving actuation [1]. There are typical pull-in phenomena in electrostatic MEMS devices. Previous research

Relationship between corrosion and nanoscale friction on a metallic glass

• Haoran Ma and
• Roland Bennewitz

Beilstein J. Nanotechnol. 2022, 13, 236–244, doi:10.3762/bjnano.13.18

• resistance of CuZr-based MG gears is superior to that of high-performance steel. Metallic glasses can be formed thermoplastically in the supercooled liquid regime [9][10]. This process allows for the application of MGs in microelectromechanical systems (MEMS) [11]. The tribological performance on the

pH-driven enhancement of anti-tubercular drug loading on iron oxide nanoparticles for drug delivery in macrophages

• Karishma Berta Cotta,
• Sarika Mehra and
• Rajdip Bandyopadhyaya

Beilstein J. Nanotechnol. 2021, 12, 1127–1139, doi:10.3762/bjnano.12.84

• (SAIF), Industrial Research and Consultancy Centre (IRCC) and the Department(s) of Metallurgical Engineering and Material Sciences (MEMS) and Chemical Engineering, IIT Bombay for providing us with the FTIR, TEM, ICP-AES, LSM, XRD and zeta potential facilities. We also thank Prof. Vinay Nandicoori

An overview of microneedle applications, materials, and fabrication methods

• Zahra Faraji Rad,
• Philip D. Prewett and
• Graham J. Davies

Beilstein J. Nanotechnol. 2021, 12, 1034–1046, doi:10.3762/bjnano.12.77

• microneedle systems applications, designs, material selection, and manufacturing methods. Keywords: drug delivery; microelectromechanical systems (MEMS); microfabrication; microneedles; point-of-care diagnostics; Introduction The concept of microneedle structures to penetrate painlessly the outermost layer

• microelectromechanical systems (MEMS) and provided a platform for microfabrication of compact miniaturized medical devices for human health screening, monitoring, and diagnostic purposes. Microneedles are microstructures that are sharp and robust enough for skin penetration, made using MEMS technology. The application

• their low-cost and ease of fabrication compared to multistep MEMS manufacturing processes. Figure 4c shows an example of 3D printed microneedles for insulin delivery [83]. Faraji Rad et al. fabricated open channel microneedle arrays using a combination of TPP, soft replica PDMS moulds, and soft

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

Toward graphene textiles in wearable eye tracking systems for human–machine interaction

• Ata Jedari Golparvar and
• Murat Kaya Yapici

Beilstein J. Nanotechnol. 2021, 12, 180–189, doi:10.3762/bjnano.12.14

• used to mimic the movements of a mouse cursor to write “SUMEMS” (Sabanci University MEMS Group). Diagram showing the two possible cursor movement directions to go from letter “A” to “K” in a standard QWERTY keyboard layout; path (a) could be implemented by seven swift left eye movements, and path (b

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• for the fabrication of a range of microoptical and microfluidic devices and microelectromechanical systems (MEMS). Possible applications of the method for microoptical devices are discussed in detail in our previous work [4]. They include tuning the thickness of the dielectric layer in the metal

• with prefabricated nanostructures can be implemented in different schemes for nanoparticle control and separation in microfluidic systems [34], and as components of actuators or switches in MEMS [35][36]. Considering the future technological potential of the suggested method it is important to

Design of V-shaped cantilevers for enhanced multifrequency AFM measurements

• Mehrnoosh Damircheli and
• Babak Eslami

Beilstein J. Nanotechnol. 2020, 11, 1525–1541, doi:10.3762/bjnano.11.135

• systems (MEMS), superparamagnetic particle embedded microprobe (SPEM) sensors, or lab-on chips devices [5][6][7][8]. Microcantilevers are also an important component of atomic force microscopes (AFM). Due to their importance in AFM, there have been many studies on modeling the cantilevers to represent the

Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir

• Mathias Franz,
• Romy Junghans,
• Paul Schmitt,
• Adriana Szeghalmi and
• Stefan E. Schulz

Beilstein J. Nanotechnol. 2020, 11, 1439–1449, doi:10.3762/bjnano.11.128

• MEMS process flow. This means that the etched silicon structures have to be fabricated within a pre-defined area of the die with common semiconductor fabrication processes. These nanostructure templates are the basis for a further processing towards integrated functional systems. Results and Discussion

Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater

• Dinesh Rotake,
• Anand Darji and
• Nitin Kale

Beilstein J. Nanotechnol. 2020, 11, 1242–1253, doi:10.3762/bjnano.11.108

• the WHO limit of 3 μg/L. Keywords: BioMEMS; heavy metal ions (HMIs); limit of detection (LOD); microcantilevers; microfluidics; micro-electromechanical systems (MEMS); piezoresistive sensors; SAM (self-assembled monolayers); World Health Organization (WHO); Introduction Water is fundamentally

• ) LOD, which is well below the WHO limit for cadmium ions. The paper describes the methodology, the formation of SAMs and their characterization using field-emission scanning electron microscopy (FESEM), the use of the portable experimental platform with the MEMS-based piezoresistive device to selective

• , nanoparticles (NPs), and MEMS, to selectively target Cd(II) in the picomolar range. Also, excessive commercialization of nanoparticles leads to increasing their harmful effect on life and the environment by [44][45][46]. In this article, an attempt is made to expand the AuNP-based technology proposed by [34

Mechanical and thermodynamic properties of Aβ₄₂, Aβ₄₀, and α-synuclein fibrils: a coarse-grained method to complement experimental studies

• Adolfo B. Poma,
• Horacio V. Guzman,
• Mai Suan Li and
• Panagiotis E. Theodorakis

Beilstein J. Nanotechnol. 2019, 10, 500–513, doi:10.3762/bjnano.10.51

• ], AFM base-force spectroscopy [51], or by the design of sophisticated microelectromechanical systems (MEMS) [52]. These techniques have been successfully used to predict the elastic properties of several biomolecules. However, OT are limited to applied loads below 0.1 nN and AFM has delicate calibration

Bidirectional biomimetic flow sensing with antiparallel and curved artificial hair sensors

• Claudio Abels,
• Antonio Qualtieri,
• Toni Lober,
• Alessandro Mariotti,
• Lily D. Chambers,
• Massimo De Vittorio,
• William M. Megill and
• Francesco Rizzi

Beilstein J. Nanotechnol. 2019, 10, 32–46, doi:10.3762/bjnano.10.4

• ] was mainly achieved by an increase in pillar length from 450 to 900 μm, a decrease in diameter from 50 to 25 μm and the removal of the membrane curvature. Table 1 gives an overview of bent piezoresistive cantilever structures, a subset of closely related MEMS flow sensors for direct comparison in this

• bidirectional sensitivity to flow sensing with curved artificial hair sensors. In the short term, the presented sensor platform will be investigated in liquids as well, once the sensors are embedded in a waterproof MEMS package. For future applications, we are targeting automotive, robotics, automation and air

• . Experimental Sensor fabrication During the fabrication process, thin silicon nitride/silicon layers are stacked together on a silicon wafer substrate and precisely shaped into the desired cantilever geometry by performing an etching process. In the following, we describe the MEMS fabrication process for the

Charged particle single nanometre manufacturing

• Philip D. Prewett,
• Cornelis W. Hagen,
• Claudia Lenk,
• Steve Lenk,
• Marcus Kaestner,
• Tzvetan Ivanov,
• Ahmad Ahmad,
• Ivo W. Rangelow,
• Xiaoqing Shi,
• Stuart A. Boden,
• Alex P. G. Robinson,
• Dongxu Yang,
• Sangeetha Hari,
• Marijke Scotuzzi and
• Ejaz Huq

Beilstein J. Nanotechnol. 2018, 9, 2855–2882, doi:10.3762/bjnano.9.266

• nanoelectronics and for the newer fields of micro and nanoelectromechanics (MEMS/NEMS). The current state of the art in EBL tools is represented by the EBPG5200 system from Raith GmBH which provides a high-intensity beam from a LaB6 thermal field emitter (TFE) electron source at energies up to 100 keV and is

Electrospun one-dimensional nanostructures: a new horizon for gas sensing materials

• Muhammad Imran,
• Nunzio Motta and
• Mahnaz Shafiei

Beilstein J. Nanotechnol. 2018, 9, 2128–2170, doi:10.3762/bjnano.9.202

• sensing platforms (i.e., micro-electromechanical systems (MEMs)). The electrospinning process is governed by various parameters such as viscosity, conductivity, molecular weight of fiber components, surface tension of polymer solution, electric potential, working distance, and flow rate. Each parameter

• wt % Pt-doped SnO2 NFs have been used for H2S gas sensing using a micro-machined (MEMS) platform [165]. The average diameter of pure SnO2 and 0.08 wt % Pt–SnO2 NFs are in the range of 200–300 nm and ≈120 nm, respectively. The decrease in fiber diameter is because of retardation of grain growth of

Light–Matter interactions on the nanoscale

• Mohsen Rahmani and
• Chennupati Jagadish

Beilstein J. Nanotechnol. 2018, 9, 2125–2127, doi:10.3762/bjnano.9.201

• century. Laser processing of thin-film multilayer structures has been one of the initial research directions in photonics [2]. This technique has been employed for many applications, including but not limited to the fabrication of polycrystalline silicon (poly-Si) thin-film transistors or MEMS/NEMS

Recent highlights in nanoscale and mesoscale friction

• Andrea Vanossi,
• Dirk Dietzel,
• Andre Schirmeisen,
• Ernst Meyer,
• Rémy Pawlak,
• Thilo Glatzel,
• Marcin Kisiel,
• Shigeki Kawai and
• Nicola Manini

Beilstein J. Nanotechnol. 2018, 9, 1995–2014, doi:10.3762/bjnano.9.190

Friction force microscopy of tribochemistry and interfacial ageing for the SiO_x/Si/Au system

• Christiane Petzold,
• Marcus Koch and
• Roland Bennewitz

Beilstein J. Nanotechnol. 2018, 9, 1647–1658, doi:10.3762/bjnano.9.157

• ; tribochemistry; wear; Introduction Contact ageing, the strengthening of contacts after formation, is an important phenomenon in tribology, with impact ranging from the nano-scale (NEMS and MEMS) [1][2] to the macro-scale (sliding of rock in earthquakes) [3][4]. Different microscopic mechanisms for contact

Tuning adhesion forces between functionalized gold colloidal nanoparticles and silicon AFM tips: role of ligands and capillary forces

• Sven Oras,
• Sergei Vlassov,
• Marta Berholts,
• Rünno Lõhmus and
• Karine Mougin

Beilstein J. Nanotechnol. 2018, 9, 660–670, doi:10.3762/bjnano.9.61

• adhesion may result in additional energy losses and wear at the interface. When it comes to the nanoscale, high adhesion can completely prevent the fabrication or functioning of micro- and nanoelectromechanical systems (MEMS and NEMS) with movable parts. Strong adhesion is necessary for keeping different

• substrate material for MEMS and NEMS is silicon. It can be tailored into complex shapes by fine lithography methods. The adhesion between Au and Si or SiO2 is known to be rather poor [18][19][20]. Böhme et al. [21] demonstrated that the oxygen layer forming on the silicon substrates affects the adhesion

Imidazolium-based ionic liquids used as additives in the nanolubrication of silicon surfaces

• Patrícia M. Amorim,
• Ana M. Ferraria,
• Rogério Colaço,
• Luís C. Branco and
• Benilde Saramago

Beilstein J. Nanotechnol. 2017, 8, 1961–1971, doi:10.3762/bjnano.8.197

• Engenharia Mecânica, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisboa, Portugal 10.3762/bjnano.8.197 Abstract In recent years, with the development of micro/nanoelectromechanical systems (MEMS/NEMS), the demand for efficient lubricants of silicon surfaces intensified

• /metal tribological pairs. However, the need for efficient lubrication of silicon surfaces rose with the development of micro/nanoelectromechanical systems (MEMS/NEMS) [21]. These miniaturized devices demand lubricants of high performance because the large surface-to-volume ratios may cause serious

Nanotribological behavior of deep cryogenically treated martensitic stainless steel

• Germán Prieto,
• Konstantinos D. Bakoglidis,
• Walter R. Tuckart and
• Esteban Broitman

Beilstein J. Nanotechnol. 2017, 8, 1760–1768, doi:10.3762/bjnano.8.177

• efforts available in the open literature were focused on the micro- and nanotribological evaluation of Si and single metals for microelectromechanical system (MEMS) applications [14][15] and carbon-based coatings [16][17][18]. Although, there is an incipient amount of nanotribological studies performed in

Laser processing of thin-film multilayer structures: comparison between a 3D thermal model and experimental results

• Babak B. Naghshine and
• Amirkianoosh Kiani

Beilstein J. Nanotechnol. 2017, 8, 1749–1759, doi:10.3762/bjnano.8.176

• Si layer with a phosphorus- or boron-containing liquid before laser processing the surface for n- and p-type TFTs respectively [8]. Another important application is mask repairing for MEMS/NEMS device fabrication [4]. There are also many potential applications in biomedical engineering. It’s been

Formation and shape-control of hierarchical cobalt nanostructures using quaternary ammonium salts in aqueous media

• Ruchi Deshmukh,
• Anurag Mehra and
• Rochish Thaokar

Beilstein J. Nanotechnol. 2017, 8, 494–505, doi:10.3762/bjnano.8.53

• Instrument Facility (SAIF), HRTEM and FEGSEM facility provided by Department of Chemical Engineering, SQUID facility provided by Industrial Research and Consultancy Center (IRCC), and X-ray diffraction facility at Department of Metallurgical Engineering and Material Science (MEMS) of IIT Bombay, Mumbai.

A new approach to grain boundary engineering for nanocrystalline materials

• Shigeaki Kobayashi,
• Sadahiro Tsurekawa and
• Tadao Watanabe

Beilstein J. Nanotechnol. 2016, 7, 1829–1849, doi:10.3762/bjnano.7.176

• resistivity manipulated by GBE in nanocrystalline gold thin films The improvement of electrical conductivity or precise control of electrical resistivity is required for the development of high performance electrical and magnetic materials for modern electronic devices such as MEMS and NEMS. It has been