Structural transitions in electron beam deposited Co–carbonyl suspended nanowires at high electrical current densities

• Gian Carlo Gazzadi and
• Stefano Frabboni

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

• –carbonyl precursor (Co2(CO)8) by focused electron beam induced deposition (FEBID). The SNWs dimensions are about 30–50 nm in diameter and 600–850 nm in length. The as-deposited material has a nanogranular structure of mixed face-centered cubic (FCC) and hexagonal close-packed (HCP) Co phases, and a

• graphitized C. The breakdown current density is found at 2.1 × 107 A/cm2. The role played by resistive heating and electromigration in these transitions is discussed. Keywords: cobalt; electromigration; focused electron beam induced deposition (FEBID); metallic nanowires; Introduction The growing importance

• of nanotechnology and nanoscience in advanced applications and fundamental research requires nanofabrication techniques that are highly resolved but at the same time flexible and feasible with research laboratory equipment. A promising approach is represented by focused electron beam induced

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

• Francesc Salvat-Pujol,
• Roser Valentí and
• Wolfgang S. Werner

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

• /bjnano.6.129 Abstract The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible

• present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations. Keywords: focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation

• , including a number of spectroscopies (electron-energy-loss spectroscopy, X-ray photoelectron spectroscopy, and Auger-electron spectroscopy), electron microscopy, and the focused-electron-beam-induced deposition (FEBID) of nanostructures, on which we focus here. This technique employs beams of focussed

Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures

• Oleksandr V. Dobrovolskiy,
• Maksym Kompaniiets,
• Roland Sachser,
• Fabrizio Porrati,
• Christian Gspan,
• Harald Plank and
• Michael Huth

Beilstein J. Nanotechnol. 2015, 6, 1082–1090, doi:10.3762/bjnano.6.109

• heterostructures on the lateral mesoscale. By means of in situ post-processing of Pt- and Co-based nano-stripes prepared by focused electron beam induced deposition (FEBID) we are able to locally tune their coercive field and remanent magnetization. Whereas single Co-FEBID nano-stripes show no hysteresis, we find

• film techniques or by an alternative approach, as used by us, namely the direct writing of metal-based layers by focused electron beam induced deposition (FEBID) [18][19]. The resolution of FEBID is better than 10 nm laterally and 1 nm vertically [18][19] and, thus, its proven applications range from

• hard-magnetic behavior for post-processed Co/Pt nano-stripes with coercive fields up to 850 Oe. We attribute the observed effects to the locally controlled formation of the CoPt L10 phase, whose presence has been revealed by transmission electron microscopy. Keywords: cobalt; focused electron beam

Patterning technique for gold nanoparticles on substrates using a focused electron beam

• Takahiro Noriki,
• Shogo Abe,
• Kotaro Kajikawa and
• Masayuki Shimojo

Beilstein J. Nanotechnol. 2015, 6, 1010–1015, doi:10.3762/bjnano.6.104

• structures with gold and silver nanoparticles using a nanomanipulator. This technique is fascinating, but it may be a time-consuming process for production of relatively large circuits. Nanostructures have also been fabricated using focused ion beam- or focused electron beam-induced deposition [1][7

• due to the deposition of amorphous carbon. This amorphous carbon most likely originates from organic molecules around the nanoparticles, as similar mechanisms of decomposition and deposition occur in electron beam-induced deposition (EBID) [9][10][11]. Fujita et al. reported that amorphous carbon was

• formed after the irradiation of phenanthrene molecules adsorbed on a substrate by an electron beam [12]. Amorphous carbon was also formed by electron beam-induced deposition using a ferrocene precursor [13]. In our experiment, no precursor gas was introduced into the SEM chamber, however, the

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

• Brett B. Lewis,
• Michael G. Stanford,
• Jason D. Fowlkes,
• Kevin Lester,
• Harald Plank and
• Philip D. Rack

Beilstein J. Nanotechnol. 2015, 6, 907–918, doi:10.3762/bjnano.6.94

• , Oak Ridge, TN 37381, USA Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria 10.3762/bjnano.6.94 Abstract Platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post

• process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention. Keywords: beam induced processing; direct-write; electron beam induced deposition; nano; Introduction Focused electron beam induced deposition (FEBID) is an attractive nanotechnology

Fundamental edge broadening effects during focused electron beam induced nanosynthesis

• Roland Schmied,
• Jason D. Fowlkes,
• Robert Winkler,
• Phillip D. Rack and
• Harald Plank

Beilstein J. Nanotechnol. 2015, 6, 462–471, doi:10.3762/bjnano.6.47

• Tennessee, Knoxville, Tennessee 37996, USA Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria 10.3762/bjnano.6.47 Abstract The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition

• more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution. Keywords: focused electron beam induced deposition; nanofabrication; platinum; simulation; Introduction Focused electron beam induced deposition (FEBID) has

Electron-beam induced deposition and autocatalytic decomposition of Co(CO)₃NO

• Florian Vollnhals,
• Martin Drost,
• Fan Tu,
• Esther Carrasco,
• Andreas Späth,
• Rainer H. Fink,
• Hans-Peter Steinrück and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2014, 5, 1175–1185, doi:10.3762/bjnano.5.129

• Erlangen, Germany 10.3762/bjnano.5.129 Abstract The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)5, and cobalt tricarbonyl

• deposition; nanofabrication; scanning transmission X-ray microscopy; Introduction The fabrication of nanostructures by using focused electron-beam induced processing (FEBIP) techniques, especially electron-beam induced deposition (EBID), has progressed considerably over the last decade [1][2][3][4][5]. In

• observed. In addition, we show that the autocatalytic growth of nanostructures from Co(CO)3NO can also be initiated by an Fe seed layer, which presents a novel approach to the fabrication of layered nanostructures. Keywords: autocatalytic growth; cobalt tricarbonyl nitrosyl; electron-beam induced

Nanoforging – Innovation in three-dimensional processing and shaping of nanoscaled structures

• Andreas Landefeld and
• Joachim Rösler

Beilstein J. Nanotechnol. 2014, 5, 1066–1070, doi:10.3762/bjnano.5.118

• applications of nanoforging. In contrast to structures produced by ion- or electron beam induced deposition, homogenous metallic structures can be manufactured with a high mechanical load capacity. Nanoforging plays out its strength when a small quantity and flexible and individual control of shape is required

In situ growth optimization in focused electron-beam induced deposition

• Paul M. Weirich,
• Marcel Winhold,
• Christian H. Schwalb and
• Michael Huth

Beilstein J. Nanotechnol. 2013, 4, 919–926, doi:10.3762/bjnano.4.103

• nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the measured in situ rate of change of conductance as the fitness parameter for the algorithm. The effectiveness

• largely suppressed. The presented technique can be applied to all beam-induced deposition processes and has great potential for a further optimization or tuning of parameters for nanostructures that are prepared by FEBID or related techniques. Keywords: electron beam induced deposition; genetic algorithm

• ; nanotechnology; tungsten; Introduction In focused electron-beam-induced deposition, FEBID in short, a (metal-)organic or inorganic volatile precursor gas, which was previously adsorbed on a substrate surface, is dissociated in the focus of an electron beam provided by a scanning (SEM) or transmission electron

Simulation of electron transport during electron-beam-induced deposition of nanostructures

• Francesc Salvat-Pujol,
• Harald O. Jeschke and
• Roser Valentí

Beilstein J. Nanotechnol. 2013, 4, 781–792, doi:10.3762/bjnano.4.89

• that addresses the multi-scale nature of the electron-beam-induced deposition (EBID) process. Furthermore, similar simulations can help to understand the role that is played by backscattered electrons and emitted secondary electrons in the change of structural properties of nanostructured materials

• during post-growth electron-beam treatments. Keywords: electron backscattering; electron transport; (F)EBID; Monte Carlo simulation; PENELOPE; Introduction Electron-beam-induced deposition (EBID) [1][2][3] is a suitable method for the template-free fabrication of nanostructures. Molecules of a

The role of electron-stimulated desorption in focused electron beam induced deposition

• Willem F. van Dorp,
• Thomas W. Hansen,
• Jakob B. Wagner and
• Jeff T. M. De Hosson

Beilstein J. Nanotechnol. 2013, 4, 474–480, doi:10.3762/bjnano.4.56

• exposed to the electron beam. If these fragments react with the target material to form a gaseous product, the target is etched locally (focused electron beam induced etching). If on the other hand the fragments form a residue, a deposit grows on the sample surface (focused electron beam induced

• deposition). In either case, the sample can be modified directly with the electron beam, in principle without the use of any extra processing before or after the electron exposure. FEBIP is applied in various fields. Because electrons can be focused into narrow beams, small patterns can be defined with FEBIP

Low-dose patterning of platinum nanoclusters on carbon nanotubes by focused-electron-beam-induced deposition as studied by TEM

• Xiaoxing Ke,
• Carla Bittencourt,
• Sara Bals and
• Gustaaf Van Tendeloo

Beilstein J. Nanotechnol. 2013, 4, 77–86, doi:10.3762/bjnano.4.9

• desired. In this paper, we explore the use of focused-electron-beam-induced deposition (FEBID) to pattern CNTs with well-dispersed ultrasmall nanoclusters. FEBID is a direct-write process where a focused electron beam is used to locally decompose a precursor gas that contains a component such as a metal

• Xiaoxing Ke Carla Bittencourt Sara Bals Gustaaf Van Tendeloo EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium Chemistry of Interaction Plasma Surface (ChiPS), University of Mons, Place du Parc 20, 7000 Mons, Belgium 10.3762/bjnano.4.9 Abstract Focused-electron-beam

• -induced deposition (FEBID) is used as a direct-write approach to decorate ultrasmall Pt nanoclusters on carbon nanotubes at selected sites in a straightforward maskless manner. The as-deposited nanostructures are studied by transmission electron microscopy (TEM) in 2D and 3D, demonstrating that the Pt

Focused electron beam induced deposition: A perspective

• Michael Huth,
• Fabrizio Porrati,
• Christian Schwalb,
• Marcel Winhold,
• Roland Sachser,
• Maja Dukic,
• Jonathan Adams and
• Georg Fantner

Beilstein J. Nanotechnol. 2012, 3, 597–619, doi:10.3762/bjnano.3.70

• ), Station 17, CH-1015 Lausanne, Switzerland 10.3762/bjnano.3.70 Abstract Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on

• the field of focused electron beam induced deposition. Keywords: atomic force microscopy; binary systems; electron beam induced deposition; granular metals; micro Hall magnetometry; radiation-induced nanostructures; strain sensing; Review Introduction Focused electron beam induced deposition (FEBID

Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigation

• Kaliappan Muthukumar,
• Harald O. Jeschke,
• Roser Valentí,
• Evgeniya Begun,
• Johannes Schwenk,
• Fabrizio Porrati and
• Michael Huth

Beilstein J. Nanotechnol. 2012, 3, 546–555, doi:10.3762/bjnano.3.63

• dissociation of the precursor molecule. In view of these calculations, we discuss the origin of this dissociation and the subsequent autocatalysis. Keywords: Co2(CO)8; deposition; dissociation; EBID; FEBID; precursor; radiation-induced nanostructures; Introduction In recent years, focused electron beam

• induced deposition (FEBID) has emerged as a versatile, high-resolution technique for nanostructure fabrication in contrast to the more conventional nanolithographic techniques. In FEBID, a previously adsorbed precursor gas is dissociated in the focus of an electron beam. The nonvolatile part of the

Radiation-induced nanostructures: Formation processes and applications

• Michael Huth

Beilstein J. Nanotechnol. 2012, 3, 533–534, doi:10.3762/bjnano.3.61

• –liquid–solid approach and the preparation of monolayers of metal–organic frameworks attached to the functional groups of a self-assembled monolayer (see, e.g., [1][2][3][4]). Not as wide-spread, but rapidly developing, is the technique of focused electron beam induced deposition (FEBID) [5]. In this

Distinguishing magnetic and electrostatic interactions by a Kelvin probe force microscopy–magnetic force microscopy combination

• Miriam Jaafar,
• Oscar Iglesias-Freire,
• Luis Serrano-Ramón,
• Manuel Ricardo Ibarra,
• Jose Maria de Teresa and
• Agustina Asenjo

Beilstein J. Nanotechnol. 2011, 2, 552–560, doi:10.3762/bjnano.2.59

• array of Co nanostructures that exhibit high electrostatic interaction with the MFM tip. Thanks to the use of the KPFM/MFM system we were able to separate the electric and magnetic interactions between the tip and the sample. Keywords: electrostatic interaction; focused electron beam induced deposition

• Discussion In the present work we have studied cobalt nanowires grown by focused-electron-beam-induced deposition (FEBID). The sample growth was performed in a commercial dual beam® equipment using a field emission scanning electron microscope with Co2(CO)8 as gas precursor. The substrate material used in