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Search for "focused ion beam" in Full Text gives 119 result(s) in Beilstein Journal of Nanotechnology.

Large-scale fabrication of achiral plasmonic metamaterials with giant chiroptical response

  • Morten Slyngborg,
  • Yao-Chung Tsao and
  • Peter Fojan

Beilstein J. Nanotechnol. 2016, 7, 914–925, doi:10.3762/bjnano.7.83

Graphical Abstract
  • beam lithography or focused ion beam milling, which both are expensive and time consuming methods. Large-scale fabrication of PCMs have been attempted to some degree applying different approaches such as glancing angle deposition [28], scaffold ornamentation [29][30], individual chiral nanoparticles
  • CD response at = 0° has also been observed by ECMs produced with focused ion beam milling [13]. The ECM property that allows for the measurement of the enantiomeric structures from one sample, yields several advantages over PCMs in biosensor applications: 1) PCMs require fabrication of the two
  • broad signal [13]. This is presumably related to the heterogeneity and 3D nature of the ECM structures, which is less dominant in the hole arrays fabricated by focused ion beam lithography. In spite of this, the CD linewidths of the present ECMs are comparable to those of gammadion PCMs, which have been
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Published 24 Jun 2016

Magnetic switching of nanoscale antidot lattices

  • Ulf Wiedwald,
  • Joachim Gräfe,
  • Kristof M. Lebecki,
  • Maxim Skripnik,
  • Felix Haering,
  • Gisela Schütz,
  • Paul Ziemann,
  • Eberhard Goering and
  • Ulrich Nowak

Beilstein J. Nanotechnol. 2016, 7, 733–750, doi:10.3762/bjnano.7.65

Graphical Abstract
  • – into thin films. Such antidots act as an inner surface of the materials leading to strong variations of optical [1][2], electrical [3][4], superconducting [5][6], or magnetic properties [7]. Nowadays, top-down approaches like e-beam lithography [8][9] or focused ion beam milling (FIB) [10] and bottom
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Published 24 May 2016

Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

  • Christian Ganser,
  • Gerhard Fritz-Popovski,
  • Roland Morak,
  • Parvin Sharifi,
  • Benedetta Marmiroli,
  • Barbara Sartori,
  • Heinz Amenitsch,
  • Thomas Griesser,
  • Christian Teichert and
  • Oskar Paris

Beilstein J. Nanotechnol. 2016, 7, 637–644, doi:10.3762/bjnano.7.56

Graphical Abstract
  • actuation experiment was prepared with focused ion beam (FIB) cutting using an AURIGA Crossbeam Workstation (Zeiss). Scanning electron microscopy (SEM) images of the sample cross-section were taken with the same instrument with the electron microscope operated at a voltage of 2 keV. GISAXS: measurements and
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Published 28 Apr 2016

Near-field visualization of plasmonic lenses: an overall analysis of characterization errors

  • Jing Wang,
  • Yongqi Fu,
  • Zongwei Xu and
  • Fengzhou Fang

Beilstein J. Nanotechnol. 2015, 6, 2069–2077, doi:10.3762/bjnano.6.211

Graphical Abstract
  • elliptical slits. The focusing performance of the structures was studied before [22]. The structures can be fabricated and measured by using focused ion beam (FIB) direct writing technique and near-field scanning optical microscope (NSOM) respectively, as shown in Figure 1. However, from the point of view of
  • . For FIB patterning, the inherent astigmatism will exist to a certain extent no matter how finely the operator calibrates the stigmation. Stigmation causes excessive overlapping of the focused ion beam spot along long-axis. Sometime, the overlap can be as large as 90% which is obviously too large for
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Published 26 Oct 2015

Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte

  • Sanghoon Ji,
  • Waqas Hassan Tanveer,
  • Wonjong Yu,
  • Sungmin Kang,
  • Gu Young Cho,
  • Sung Han Kim,
  • Jihwan An and
  • Suk Won Cha

Beilstein J. Nanotechnol. 2015, 6, 1805–1810, doi:10.3762/bjnano.6.184

Graphical Abstract
  • deposited on BECs with different thicknesses, whose cross-sectional microstructure was investigated by focused ion beam and field emission scanning electron microscopy (FIB/FE-SEM) imaging: the BECs were 40 nm and 320 nm in thickness. In case of the thinner BEC, a significant amount of ALD YSZ certainly
  • -deposited (ALD) yttria-stabilized zirconia (YSZ) electrolyte and 60 nm-thick top electrode catalyst (sputtered porous Pt cathode). (A) Focused ion beam-prepared field emission scanning electron microscopy (FE-SEM) cross-sectional images for 50 nm-thick ALD YSZ films deposited on 80 nm pore AAO supported 40
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Published 27 Aug 2015

Current–voltage characteristics of manganite–titanite perovskite junctions

  • Benedikt Ifland,
  • Patrick Peretzki,
  • Birte Kressdorf,
  • Philipp Saring,
  • Andreas Kelling,
  • Michael Seibt and
  • Christian Jooss

Beilstein J. Nanotechnol. 2015, 6, 1467–1484, doi:10.3762/bjnano.6.152

Graphical Abstract
  • acceleration voltages did not result in measureable EBIC in our setup. A cross-section lamella of the sample was prepared by means of a focused ion beam microscope. An EBIC scan across the p–n interface is shown in Figure 3b, together with a simulated EBIC linescan, taking into account only the generation
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Published 07 Jul 2015

Scalable, high performance, enzymatic cathodes based on nanoimprint lithography

  • Dmitry Pankratov,
  • Richard Sundberg,
  • Javier Sotres,
  • Dmitry B. Suyatin,
  • Ivan Maximov,
  • Sergey Shleev and
  • Lars Montelius

Beilstein J. Nanotechnol. 2015, 6, 1377–1384, doi:10.3762/bjnano.6.142

Graphical Abstract
  • taken using a Nova NanoLab 600 Dual Beam focused ion beam and scanning electron microscope (FIB-SEM) from FEI Company (Hillsboro, Oregon, USA). The images were taken with an immersion lens at an acceleration voltage of 30 kV and a beam current of 2.4 nA. AFM images were obtained using a Multimode VIII
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Published 22 Jun 2015

Structural transitions in electron beam deposited Co–carbonyl suspended nanowires at high electrical current densities

  • Gian Carlo Gazzadi and
  • Stefano Frabboni

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

Graphical Abstract
  • Strata DB235M) combining a Ga-ion focused ion beam (FIB) with a thermal field emission SEM, equipped with a Co–carbonyl (Co2(CO)8) GIS operated at room temperature (RT). The GIS is mounted at a polar angle of 52° and an azimuthal angle of 115° with respect to the sample surface. An injection nozzle with
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Published 11 Jun 2015

Magnetic properties of iron cluster/chromium matrix nanocomposites

  • Arne Fischer,
  • Robert Kruk,
  • Di Wang and
  • Horst Hahn

Beilstein J. Nanotechnol. 2015, 6, 1158–1163, doi:10.3762/bjnano.6.117

Graphical Abstract
  • energy-filtered transmission electron microscopy (EFTEM) and scanning transmission electron microscopy (STEM) micrographs of the Fe distribution for a 10 vol % Fe1000/Cr sample, specifically prepared for TEM. To avoid subsequent focused ion beam cutting and possible oxidation, the sample was deposited on
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Published 13 May 2015

Patterning technique for gold nanoparticles on substrates using a focused electron beam

  • Takahiro Noriki,
  • Shogo Abe,
  • Kotaro Kajikawa and
  • Masayuki Shimojo

Beilstein J. Nanotechnol. 2015, 6, 1010–1015, doi:10.3762/bjnano.6.104

Graphical Abstract
  • structures with gold and silver nanoparticles using a nanomanipulator. This technique is fascinating, but it may be a time-consuming process for production of relatively large circuits. Nanostructures have also been fabricated using focused ion beam- or focused electron beam-induced deposition [1][7
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Published 22 Apr 2015

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

  • Brett B. Lewis,
  • Michael G. Stanford,
  • Jason D. Fowlkes,
  • Kevin Lester,
  • Harald Plank and
  • Philip D. Rack

Beilstein J. Nanotechnol. 2015, 6, 907–918, doi:10.3762/bjnano.6.94

Graphical Abstract
  • grown to a thickness of ca. 400 nm and subsequently purified at 25 °C at various times from 1 to 12 min. After curing, the pads were sectioned using gallium focused ion beam milling to reveal the Pt layer thickness as a function of purification time. The SEM micrographs in Figure 2 depict the bright
  • parameters during deposition. As the layer is extremely thin (a few monolayers) it can also be easily removed ex situ by with a brief focused ion beam etch. Microstructure Transmission electron microscopy (TEM) images of the as-deposited and cured PtCx EBID patterns were taken to compare the microstructure
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Published 08 Apr 2015

Hollow plasmonic antennas for broadband SERS spectroscopy

  • Gabriele C. Messina,
  • Mario Malerba,
  • Pierfrancesco Zilio,
  • Ermanno Miele,
  • Michele Dipalo,
  • Lorenzo Ferrara and
  • Francesco De Angelis

Beilstein J. Nanotechnol. 2015, 6, 492–498, doi:10.3762/bjnano.6.50

Graphical Abstract
  • in depth [23]. Briefly, a layer of optical resist (Shipley S1813) is deposited by spin coating on the top of a silicon nitride membrane. The structure of the antenna is defined from the backside of the membrane by focused ion beam milling (FEI, NanoLab 600 dual beam system) using a gallium ion source
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Published 18 Feb 2015

A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

  • Tobias Meier,
  • Alexander Förste,
  • Ali Tavassolizadeh,
  • Karsten Rott,
  • Dirk Meyners,
  • Roland Gröger,
  • Günter Reiss,
  • Eckhard Quandt,
  • Thomas Schimmel and
  • Hendrik Hölscher

Beilstein J. Nanotechnol. 2015, 6, 451–461, doi:10.3762/bjnano.6.46

Graphical Abstract
  • focused ion beam and electron beam deposition, tips can be manually been grown on the apex of the cantilever [59]. The use of such tips enables high lateral resolution as tip radii as small as 30 nm can be achieved. The advantage of this approach is that the tip is subsequently grown and without altering
  • different angles of the bias field towards the easy axis. The bias field has a strong influence on the strain sensitivity of the TMR sensor. a) To improve lateral resolution, tips with a tip radius of 30 nm were grown by a combination of focused ion beam and electron beam deposition deposition. b) Atomic
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Published 13 Feb 2015

Electrical properties of single CdTe nanowires

  • Elena Matei,
  • Camelia Florica,
  • Andreea Costas,
  • María Eugenia Toimil-Molares and
  • Ionut Enculescu

Beilstein J. Nanotechnol. 2015, 6, 444–450, doi:10.3762/bjnano.6.45

Graphical Abstract
  • . Focused ion beam-induced metallization was used to produce individual nanowires with electrical contacts and electrical measurements were performed on these individual nanowires. The influence of a bottom gate was investigated and it was found that surface passivation leads to improved transport
  • combination of lithography and focused ion beam-induced metallization (FIBIM). The electrical properties were determined for individual nanowires prepared under different conditions. Further, the effect of a bottom gate on the charge carriers transported through the nanowire channel was examined. It was also
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Published 12 Feb 2015

Nanoporous Ge thin film production combining Ge sputtering and dopant implantation

  • Jacques Perrin Toinin,
  • Alain Portavoce,
  • Khalid Hoummada,
  • Michaël Texier,
  • Maxime Bertoglio,
  • Sandrine Bernardini,
  • Marco Abbarchi and
  • Lee Chow

Beilstein J. Nanotechnol. 2015, 6, 336–342, doi:10.3762/bjnano.6.32

Graphical Abstract
  • for the fabrication of nanocrystals by dewetting, such as metals or semiconductors. In addition, the structure of the dewetted layers can be controlled using several techniques such as pulsed laser annealing [35][36] or a substrate patterned by focused ion beam. The study of Ge dewetting on SiO2 [37
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Published 30 Jan 2015

Bright photoluminescence from ordered arrays of SiGe nanowires grown on Si(111)

  • D. J. Lockwood,
  • N. L. Rowell,
  • A. Benkouider,
  • A. Ronda,
  • L. Favre and
  • I. Berbezier

Beilstein J. Nanotechnol. 2014, 5, 2498–2504, doi:10.3762/bjnano.5.259

Graphical Abstract
  • in the substrate by focused ion beam patterning for the preferential nucleation and growth of these well-organized NWs. The NWs thus produced have a diameter of 200 nm, a length of 200 nm, and a Ge concentration x = 0.15. Their photoluminescence (PL) spectra were measured at low temperatures (from 6
  • positioned [28]. We have evolved an efficient and simple electrochemical process that joins focused-ion-beam (FIB) lithography and galvanic reaction to selectively prepare gold nanoparticles in well-defined locations. Afterwards these nanoparticles are used for the molecular beam epitaxy (MBE) growth of
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Published 30 Dec 2014

PVP-coated, negatively charged silver nanoparticles: A multi-center study of their physicochemical characteristics, cell culture and in vivo experiments

  • Sebastian Ahlberg,
  • Alexandra Antonopulos,
  • Jörg Diendorf,
  • Ralf Dringen,
  • Matthias Epple,
  • Rebekka Flöck,
  • Wolfgang Goedecke,
  • Christina Graf,
  • Nadine Haberl,
  • Jens Helmlinger,
  • Fabian Herzog,
  • Frederike Heuer,
  • Stephanie Hirn,
  • Christian Johannes,
  • Stefanie Kittler,
  • Manfred Köller,
  • Katrin Korn,
  • Wolfgang G. Kreyling,
  • Fritz Krombach,
  • Jürgen Lademann,
  • Kateryna Loza,
  • Eva M. Luther,
  • Marcelina Malissek,
  • Martina C. Meinke,
  • Daniel Nordmeyer,
  • Anne Pailliart,
  • Jörg Raabe,
  • Fiorenza Rancan,
  • Barbara Rothen-Rutishauser,
  • Eckart Rühl,
  • Carsten Schleh,
  • Andreas Seibel,
  • Christina Sengstock,
  • Lennart Treuel,
  • Annika Vogt,
  • Katrin Weber and
  • Reinhard Zellner

Beilstein J. Nanotechnol. 2014, 5, 1944–1965, doi:10.3762/bjnano.5.205

Graphical Abstract
  • dissolution process in cells (including the localization of low concentrations of small nanoparticles as well as silver ions) imaging at the Ag L3,2 edges is a promising option for future work. Focused ion beam (FIB) and optical microscopy (phase contrast microscopy; fluorescence microscopy; confocal laser
  • reveal any formation of silver agglomerates (Figure 6A). In order to prove that the silver agglomerates are located inside the cells, focused ion beam milling (FIB) was applied which permits the view on cross sections of various materials by a beam of high-energy gallium ions [77][78]. After culturing
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Published 03 Nov 2014

Patterning a hydrogen-bonded molecular monolayer with a hand-controlled scanning probe microscope

  • Matthew F. B. Green,
  • Taner Esat,
  • Christian Wagner,
  • Philipp Leinen,
  • Alexander Grötsch,
  • F. Stefan Tautz and
  • Ruslan Temirov

Beilstein J. Nanotechnol. 2014, 5, 1926–1932, doi:10.3762/bjnano.5.203

Graphical Abstract
  • used a qPlus sensor [17] manufactured by CREATEC. The AFM/STM tip was made from a 0.3 mm long and 15 μm thick PtIr wire glued to the tuning fork of the qPlus sensor, and sharpened with a gallium focused ion beam (FIB). The resulting resonance frequency of the qPlus sensor was f0 = 30,300 Hz with a
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Published 31 Oct 2014

Nanocrystalline ceria coatings on solid oxide fuel cell anodes: the role of organic surfactant pretreatments on coating microstructures and sulfur tolerance

  • Chieh-Chun Wu,
  • Ling Tang and
  • Mark R. De Guire

Beilstein J. Nanotechnol. 2014, 5, 1712–1724, doi:10.3762/bjnano.5.181

Graphical Abstract
  • same procedures as for the nickel-GDC anodes. Then cross-sections were prepared by using a focused ion beam unit, and EDXS maps were superimposed on the cross-sectional images (Figure 6). With YSZ replacing the GDC as the ionically conducting phase in the anode, the ceria coating could easily be
  • obtained by using the focused ion beam unit of the Nova Nanolab. Output voltage and ASR at low current density, showing sulfur tolerance. Yellow shading denotes 24 h periods of H2S exposure in the anode stream at the concentration indicated. (Treatment-1 cell (no ceria coating) with no interlayer.) Output
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Published 06 Oct 2014

Probing the electronic transport on the reconstructed Au/Ge(001) surface

  • Franciszek Krok,
  • Mark R. Kaspers,
  • Alexander M. Bernhart,
  • Marek Nikiel,
  • Benedykt R. Jany,
  • Paulina Indyka,
  • Mateusz Wojtaszek,
  • Rolf Möller and
  • Christian A. Bobisch

Beilstein J. Nanotechnol. 2014, 5, 1463–1471, doi:10.3762/bjnano.5.159

Graphical Abstract
  • source software GSxM [17] and data processing was done by using WxSM [18]. For the transmission electron microscope (TEM) measurements lamellas of the Au/Ge(001) of the very same sample were prepared with the use of an FEI Quanta 3D FEG scanning electron microscope equipped with a 30 keV Ga+ focused ion
  • beam gun (FIB). In order to preserve the surface of the Au/Ge sample against the standard FIB operation during the lamella preparation, the sample surface at first was covered (capped) with a 20 nm layer of thermally evaporated carbon. Then, on top of the cap layer, a platinum layer was deposited using
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Published 05 Sep 2014

Nanocavity crossbar arrays for parallel electrochemical sensing on a chip

  • Enno Kätelhön,
  • Dirk Mayer,
  • Marko Banzet,
  • Andreas Offenhäusser and
  • Bernhard Wolfrum

Beilstein J. Nanotechnol. 2014, 5, 1137–1143, doi:10.3762/bjnano.5.124

Graphical Abstract
  • sections of the nanocavity sensor, cut by a focused ion beam (FIB), can be found in Figure 6. Fabrication Devices are structured by means of optical lithography and are processed in class-100 cleanroom facilities. Nanocavities at the intersections between platinum electrodes are formed via the deposition
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Published 23 Jul 2014

Nanoforging – Innovation in three-dimensional processing and shaping of nanoscaled structures

  • Andreas Landefeld and
  • Joachim Rösler

Beilstein J. Nanotechnol. 2014, 5, 1066–1070, doi:10.3762/bjnano.5.118

Graphical Abstract
  • . The technique used, called nanoforging, is very similar to the macroscopic forging process. Results: With spring actuated tools produced by focused ion beam milling, controlled forging is demonstrated. With only three steps, a conical bar stock is transformed to a flat- and semicircular bent bar stock
  • as complex shapes can be more readily achieved. Single crystalline silicon, processed by focused ion beam milling, is used for durable spring actuated forging tools. Furthermore, high strength metals can be processed and high deformation degrees of the bar stock can be realized without heating. This
  • axis [13]. The forging tools were machined by focused ion beam milling at the corner of a single crystalline Si-substrate. Varying tools in different positions were produced to allow several forging steps after each other (Figure 1). All of these tools are based on a spring principle similar to so
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Published 16 Jul 2014

A nanometric cushion for enhancing scratch and wear resistance of hard films

  • Katya Gotlib-Vainshtein,
  • Olga Girshevitz,
  • Chaim N. Sukenik,
  • David Barlam and
  • Sidney R. Cohen

Beilstein J. Nanotechnol. 2014, 5, 1005–1015, doi:10.3762/bjnano.5.114

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  • compensated by a thin Au coating (8 nm). NDFv9.4e software was used to fit the data [48]. Focused Ion Beam (FIB). The PDMS thickness was obtained using a dual beam FIB (FEI, Helios 600), with electron and ion beams operating simultaneously and independently at energies up to 30 kV (52 degrees between the
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Published 10 Jul 2014

Integration of ZnO and CuO nanowires into a thermoelectric module

  • Dario Zappa,
  • Simone Dalola,
  • Guido Faglia,
  • Elisabetta Comini,
  • Matteo Ferroni,
  • Caterina Soldano,
  • Vittorio Ferrari and
  • Giorgio Sberveglieri

Beilstein J. Nanotechnol. 2014, 5, 927–936, doi:10.3762/bjnano.5.106

Graphical Abstract
  • , it is possible to use focused ion beam (FIB) lithography to deposit actively each gold nanoparticles, but it is very time consuming and there is no demonstration of improved performances of the device. The ability to control the size and dispersion of the catalyst is a key parameter to control both
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Published 30 Jun 2014

Scale effects of nanomechanical properties and deformation behavior of Au nanoparticle and thin film using depth sensing nanoindentation

  • Dave Maharaj and
  • Bharat Bhushan

Beilstein J. Nanotechnol. 2014, 5, 822–836, doi:10.3762/bjnano.5.94

Graphical Abstract
  • operating pressure of about 0.001 Pa, substrate temperature of 100 °C at a rate of approximately 0.4 nm/s. To observe the grains within the Au film and nanoparticles, focused ion beam (FIB) milling and transmission electron microscopy (TEM) were employed. Cross-sections of samples were cut out by FIB
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Published 11 Jun 2014
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