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Search for "oxygen plasma" in Full Text gives 89 result(s) in Beilstein Journal of Nanotechnology.

Active and fast charge-state switching of single NV centres in diamond by in-plane Al-Schottky junctions

  • Christoph Schreyvogel,
  • Vladimir Polyakov,
  • Sina Burk,
  • Helmut Fedder,
  • Andrej Denisenko,
  • Felipe Fávaro de Oliveira,
  • Ralf Wunderlich,
  • Jan Meijer,
  • Verena Zuerbig,
  • Jörg Wrachtrup and
  • Christoph E. Nebel

Beilstein J. Nanotechnol. 2016, 7, 1727–1735, doi:10.3762/bjnano.7.165

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  • defined conductive channel between the Al and Au contacts, the channel region including the contacts were protected with a photoresist and then the whole diamond surface surrounding the channel area were O-terminated via exposition to oxygen plasma. After lift-off process of the photoresist, the
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Published 16 Nov 2016

Nano- and microstructured materials for in vitro studies of the physiology of vascular cells

  • Alexandra M. Greiner,
  • Adria Sales,
  • Hao Chen,
  • Sarah A. Biela,
  • Dieter Kaufmann and
  • Ralf Kemkemer

Beilstein J. Nanotechnol. 2016, 7, 1620–1641, doi:10.3762/bjnano.7.155

Graphical Abstract
  • mold silicon on top. Finally, by treating the epoxy–silicon sandwich with oxygen plasma the epoxy is eliminated, rendering the metal structure on the silicon substrate [46][73]. Colloidal lithography is a technique relying on the arrangement of colloid particles, on 2D or 3D surfaces, to use it as
  • [139]. The latter is typically achieved by oxidizing the surface. Surface oxidation can be performed by means of oxygen plasma treatment, ultra violet (UV) light (for polymers) or chemical treatment [140][141][142][143][144]. Physisorption of molecules is typically an easy method for coating a surface
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Published 08 Nov 2016

Graphene-enhanced plasmonic nanohole arrays for environmental sensing in aqueous samples

  • Christa Genslein,
  • Peter Hausler,
  • Eva-Maria Kirchner,
  • Rudolf Bierl,
  • Antje J. Baeumner and
  • Thomas Hirsch

Beilstein J. Nanotechnol. 2016, 7, 1564–1573, doi:10.3762/bjnano.7.150

Graphical Abstract
  • , Supporting Information File 1). The hexagonal arrangement of the closed-packed monolayer is still visible after oxygen plasma treatment. By varying the etching time, a linear relationship to the particle diameter was determined (Figure S2, Supporting Information File 1). Hence, desirable hole diameters and
  • array the diameter of the spheres need to be etched by reactive ion etching using oxygen plasma (Plasmalab 80 Plus, Oxford Instruments, Abingdon, United Kingdom) prior to metallization. Different diameters of the polystyrene spheres were achieved by varying the etching time from 8 to 28 min at 18 W. On
  • of the sphere masks etched by oxygen plasma at 18 W with different times (8–28 min). A decrease in the diameter of the polystyrene particles with an increase of the etching time can be seen. The periodicity is not affected by the etching process as the spheres remain at their initial position
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Published 01 Nov 2016

Dealloying of gold–copper alloy nanowires: From hillocks to ring-shaped nanopores

  • Adrien Chauvin,
  • Cyril Delacôte,
  • Mohammed Boujtita,
  • Benoit Angleraud,
  • Junjun Ding,
  • Chang-Hwan Choi,
  • Pierre-Yves Tessier and
  • Abdel-Aziz El Mel

Beilstein J. Nanotechnol. 2016, 7, 1361–1367, doi:10.3762/bjnano.7.127

Graphical Abstract
  • (Figure 1a); the process is described in details elsewhere [21]. Then, the silicon is etched through the photoresist mask using SF6/O2 plasma to create nanograted silicon structures (Figure 1a(2)). After this step, an oxygen plasma treatment is applied to partially etch the photoresist lines and transform
  • photoresist using oxygen plasma leaving behind residues of photoresist and (4) deposition of metal over the patterned substrate by magnetron sputtering allowing to grow nanowires with a nodular morphology. SEM micrograph showing the typical morphology of metal nanowires: (b) as grown and (c) after
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Published 29 Sep 2016

Large-scale fabrication of achiral plasmonic metamaterials with giant chiroptical response

  • Morten Slyngborg,
  • Yao-Chung Tsao and
  • Peter Fojan

Beilstein J. Nanotechnol. 2016, 7, 914–925, doi:10.3762/bjnano.7.83

Graphical Abstract
  • sulfate solution, followed by a 30 min bath in a Hellmanex III solution at 37 °C. Finally, the substrates were cleaned in an oxygen-plasma cleaning unit for 1 h. After each step the ECMs were rinsed with Milli-Q water. Schematical overview of the ECM fabrication process. First an original mold with a
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Published 24 Jun 2016

Magnetic switching of nanoscale antidot lattices

  • Ulf Wiedwald,
  • Joachim Gräfe,
  • Kristof M. Lebecki,
  • Maxim Skripnik,
  • Felix Haering,
  • Gisela Schütz,
  • Paul Ziemann,
  • Eberhard Goering and
  • Ulrich Nowak

Beilstein J. Nanotechnol. 2016, 7, 733–750, doi:10.3762/bjnano.7.65

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Published 24 May 2016

Orientation of FePt nanoparticles on top of a-SiO2/Si(001), MgO(001) and sapphire(0001): effect of thermal treatments and influence of substrate and particle size

  • Martin Schilling,
  • Paul Ziemann,
  • Zaoli Zhang,
  • Johannes Biskupek,
  • Ute Kaiser and
  • Ulf Wiedwald

Beilstein J. Nanotechnol. 2016, 7, 591–604, doi:10.3762/bjnano.7.52

Graphical Abstract
  • velocity of 15 mm/min [11][30]. These deposited precursor-loaded micelles are transformed into FePt NPs by a combination of oxygen and hydrogen plasma treatments: The organic shell is removed by oxygen plasma, followed by a subsequent hydrogen plasma step, necessary to completely reduce the NPs into the
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Published 21 Apr 2016

Linear and nonlinear optical properties of hybrid metallic–dielectric plasmonic nanoantennas

  • Mario Hentschel,
  • Bernd Metzger,
  • Bastian Knabe,
  • Karsten Buse and
  • Harald Giessen

Beilstein J. Nanotechnol. 2016, 7, 111–120, doi:10.3762/bjnano.7.13

Graphical Abstract
  • resist that expose the gap regions of the antennas. After development and oxygen plasma cleaning, the samples are immersed in the LiNbO3 solution, which consists of the nanocrystals diluted in water. The sample is repeatedly dipped into the solution and afterwards blown dry using nitrogen. The crystals
  • nanocrystals. (i) In the first step a substrate with gold nanoantennas and alignment marks is covered with PMMA. After careful alignment, openings are defined within the resist layer directly above the gap regions of the antennas. (ii) The sample is developed and oxygen-plasma cleaned. (iii) The sample is
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Published 26 Jan 2016

Charge injection and transport properties of an organic light-emitting diode

  • Peter Juhasz,
  • Juraj Nevrela,
  • Michal Micjan,
  • Miroslav Novota,
  • Jan Uhrik,
  • Lubica Stuchlikova,
  • Jan Jakabovic,
  • Ladislav Harmatha and
  • Martin Weis

Beilstein J. Nanotechnol. 2016, 7, 47–52, doi:10.3762/bjnano.7.5

Graphical Abstract
  • and deionized water and then treated by oxygen plasma to remove organic residues. Prior to the organic material deposition the substrates were heated up to 200 °C during 30 min in vacuum better than 10−5 Pa. Devices were formed by sequential thermal evaporation of hole transport material α-NPD (Sigma
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Published 14 Jan 2016

Orthogonal chemical functionalization of patterned gold on silica surfaces

  • Francisco Palazon,
  • Didier Léonard,
  • Thierry Le Mogne,
  • Francesca Zuttion,
  • Céline Chevalier,
  • Magali Phaner-Goutorbe,
  • Éliane Souteyrand,
  • Yann Chevolot and
  • Jean-Pierre Cloarec

Beilstein J. Nanotechnol. 2015, 6, 2272–2277, doi:10.3762/bjnano.6.233

Graphical Abstract
  • to 100 µm. Electron beam lithography was used to develop the gold nanostructures (typical dimensions of 100 nm). Titanium (8 nm) and gold (30 nm) were deposited by electron beam evaporation. After lift-off, the samples were cleaned by oxygen plasma treatment (Anatech) at 400 sccm of oxygen, 350 W of
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Published 01 Dec 2015

Charge carrier mobility and electronic properties of Al(Op)3: impact of excimer formation

  • Andrea Magri,
  • Pascal Friederich,
  • Bernhard Schäfer,
  • Valeria Fattori,
  • Xiangnan Sun,
  • Timo Strunk,
  • Velimir Meded,
  • Luis E. Hueso,
  • Wolfgang Wenzel and
  • Mario Ruben

Beilstein J. Nanotechnol. 2015, 6, 1107–1115, doi:10.3762/bjnano.6.112

Graphical Abstract
  • –SiO2 substrates by electron beam lithography (Raith 150). These electrodes were deposited under high vacuum (Oerlikon evaporator) with an architecture composed of a 1.2 nm Ti bottom part and a 42 nm Au top part. Before depositing the organic layer, the substrate was cleaned by oxygen plasma for 5 min
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Published 05 May 2015

Pt- and Pd-decorated MWCNTs for vapour and gas detection at room temperature

  • Hamdi Baccar,
  • Atef Thamri,
  • Pierrick Clément,
  • Eduard Llobet and
  • Adnane Abdelghani

Beilstein J. Nanotechnol. 2015, 6, 919–927, doi:10.3762/bjnano.6.95

Graphical Abstract
  • Pd nanoparticles. Sputtering allows for an oxygen plasma treatment that removes amorphous carbon from the surface of the carbon nanotubes and creates oxygenated surface defects in which metal nanoparticles nucleate within a few minutes. The decoration with the 2 nm Pt or the 3 nm Pd nanoparticles is
  • known to weakly interact with VOCs in general and with aromatic VOCs in particular. Therefore, a functionalisation of the carbon nanotube sidewalls is essential to promote sensitivity. In previous works, we used oxygen-plasma-treated multiwalled carbon nanotubes for detecting nitrogen dioxide, ammonia
  • advantageous technique for functionalising carbon nanotubes since it allows for an oxygen plasma treatment followed by metal decoration without breaking the vacuum or the need to transfer the nanotubes between different reactors and additionally takes only a few minutes. Furthermore, this treatment can be
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Published 09 Apr 2015

Electroburning of few-layer graphene flakes, epitaxial graphene, and turbostratic graphene discs in air and under vacuum

  • Andrea Candini,
  • Nils Richter,
  • Domenica Convertino,
  • Camilla Coletti,
  • Franck Balestro,
  • Wolfgang Wernsdorfer,
  • Mathias Kläui and
  • Marco Affronte

Beilstein J. Nanotechnol. 2015, 6, 711–719, doi:10.3762/bjnano.6.72

Graphical Abstract
  • role to initiate the burning. Indeed, the presence of nonsaturated carbon bonds makes the edges the most reactive part of the device. Edges cleaved during the exfoliation (exfoliated graphene), edges created during the oxygen plasma (graphene on SiC and turbostratic discs after the patterning), and
  • , graphene was patterned in the desired device geometry (two-probe device, the graphene channel is roughly 1 × 3 μm) by electron beam lithography and oxygen plasma etching (30 s in a Diener Femto plasma system at maximum power). Finally, the remaining metal parts (the bonding pads and the connections from
  • adhesive tape. After rinsing with acetone and isopropanol, hundreds of discs were left on the surface. Typical Raman spectra of the as-deposited discs are shown in the Supporting Information File 1. The discs were located by an optical microscope and then patterned in the hour-glass geometry by oxygen
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Published 11 Mar 2015

Self-assembled anchor layers/polysaccharide coatings on titanium surfaces: a study of functionalization and stability

  • Ognen Pop-Georgievski,
  • Dana Kubies,
  • Josef Zemek,
  • Neda Neykova,
  • Roman Demianchuk,
  • Eliška Mázl Chánová,
  • Miroslav Šlouf,
  • Milan Houska and
  • František Rypáček

Beilstein J. Nanotechnol. 2015, 6, 617–631, doi:10.3762/bjnano.6.63

Graphical Abstract
  • in both alkaline (using alkaline piranha or 0.5 M NaOH) and acidic conditions (using mixtures of H2SO4/HCl or H2SO4/H2O2). The chemical treatments were followed by 5 min oxygen plasma treatments. The tested activation procedures significantly decreased the concentration of inorganic contaminants and
  • caused a beneficial increase in the surface concentration of titanium and oxygen. The surfaces were free of inorganic contaminants when alkaline piranha (NH4OH:H2O2:H2O) was used for the cleaning and activation process. However, despite the rigorous chemical and oxygen plasma treatments, as well as the
  • anchor layers is a prerequisite for the creation of grafted adlayers with defined properties [34]. The attachment of the anchor layers of three FDA approved, organic compounds (neridronate, APTES and dopamine) were performed on oxygen plasma-activated, flat titanium substrates. As previously observed by
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Published 02 Mar 2015

Filling of carbon nanotubes and nanofibres

  • Reece D. Gately and
  • Marc in het Panhuis

Beilstein J. Nanotechnol. 2015, 6, 508–516, doi:10.3762/bjnano.6.53

Graphical Abstract
  • hydrochloric acid solution, as nitric acid was found to be too harsh for SWCNTs. Similar to the MWCNTs, the SWCNTs were then easily filled directly after opening [54]. This was followed by more sophisticated methods such as oxygen plasma treatment [55], electrochemical treatment (which was able to remove the
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Published 19 Feb 2015

Oxygen-plasma-modified biomimetic nanofibrous scaffolds for enhanced compatibility of cardiovascular implants

  • Anna Maria Pappa,
  • Varvara Karagkiozaki,
  • Silke Krol,
  • Spyros Kassavetis,
  • Dimitris Konstantinou,
  • Charalampos Pitsalidis,
  • Lazaros Tzounis,
  • Nikos Pliatsikas and
  • Stergios Logothetidis

Beilstein J. Nanotechnol. 2015, 6, 254–262, doi:10.3762/bjnano.6.24

Graphical Abstract
  • complications of thrombosis and implant failure. Thus, we herein fabricated poly-ε-caprolactone (PCL) electrospun nanofibrous scaffolds, to serve as coatings for cardiovascular implants and guide tissue regeneration. Oxygen plasma treatment was applied in order to modify the surface chemistry of the scaffold
  • cytocompatible, oxygen-plasma treatment was used to modify the surface chemistry along with its nanotopography without causing any deterioration of the structure or the integrity of the scaffold and without affecting its mechanical and physical bulk properties. This approach, of controlling the surface
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Published 22 Jan 2015

Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes

  • Gemma Rius,
  • Matteo Lorenzoni,
  • Soichiro Matsui,
  • Masaki Tanemura and
  • Francesc Perez-Murano

Beilstein J. Nanotechnol. 2015, 6, 215–222, doi:10.3762/bjnano.6.20

Graphical Abstract
  • captured and subtracted. All tests are performed at room conditions, with a temperature of 25 °C and under a controlled relative humidity ranging from 20 to 40%. The Si substrates consist of chips cut from Si(100) wafers. Organic contamination on the chips was removed by oxygen plasma etching before the
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Published 19 Jan 2015

Mammalian cell growth on gold nanoparticle-decorated substrates is influenced by the nanoparticle coating

  • Christina Rosman,
  • Sebastien Pierrat,
  • Marco Tarantola,
  • David Schneider,
  • Eva Sunnick,
  • Andreas Janshoff and
  • Carsten Sönnichsen

Beilstein J. Nanotechnol. 2014, 5, 2479–2488, doi:10.3762/bjnano.5.257

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  • . Afterwards, the petri dish was treated with oxygen plasma for 45 s to render the surface hydrophilic. For sample preparation, 100 μL of 1 M sodium chloride and 100 μL of the particle solution or 100 μL of water in case of the untreated control sample were put into the petri dish. After incubation for 30 min
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Published 24 Dec 2014

Electrical contacts to individual SWCNTs: A review

  • Wei Liu,
  • Christofer Hierold and
  • Miroslav Haluska

Beilstein J. Nanotechnol. 2014, 5, 2202–2215, doi:10.3762/bjnano.5.229

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  • the SWCNTs is increased, thus improving the charge carrier transport. In this way, the on-current was improved by one order of magnitude [64]. Cleanliness of SWCNT surface It is challenging to avoid resist residue from resist-based lithographic fabrication processes on SWCNTs. Although oxygen plasma
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Published 21 Nov 2014

Near-field photochemical and radiation-induced chemical fabrication of nanopatterns of a self-assembled silane monolayer

  • Ulrich C. Fischer,
  • Carsten Hentschel,
  • Florian Fontein,
  • Linda Stegemann,
  • Christiane Hoeppener,
  • Harald Fuchs and
  • Stefanie Hoeppener

Beilstein J. Nanotechnol. 2014, 5, 1441–1449, doi:10.3762/bjnano.5.156

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  • -assembled monolayer (SAM) of (3-aminopropyl)triethoxysilane (APTES) is explored with three different processes: 1) a near-field photochemical process by photochemical bleaching of a monomolecular layer of dye molecules chemically bound to an APTES SAM, 2) a chemical process induced by oxygen plasma etching
  • lithography (CL), which is either exposed to visible light, oxygen plasma or an UV–ozone atmosphere. The gold mask has the function to inhibit the photochemical reactions by highly localized near-field interactions between metal mask and SAM and to inhibit the radiation-induced chemical reactions by casting a
  • plasma or UV–ozone processing [26]. In process 2, oxygen-plasma induced nanostructuring, an oxygen plasma leads primarily to the chemical destruction of the amino groups of an (3-aminopropyl)triethoxysilane (APTES) SAM. For this process the close contact between mask and the very thin SAM substrate is
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Published 03 Sep 2014

Template-directed synthesis and characterization of microstructured ceramic Ce/ZrO2@SiO2 composite tubes

  • Jörg J. Schneider and
  • Meike Naumann

Beilstein J. Nanotechnol. 2014, 5, 1152–1159, doi:10.3762/bjnano.5.126

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  • particles on the PS fiber surface, the as-obtained PS fibers were surface-functionalized in a reactive oxygen plasma atmosphere (rf plasma, 60 W, 20% O2) prior to the addition and anchoring of the silica particles to these surface-functionalized groups. This ensures a dense and covalent linking of the
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Published 25 Jul 2014

Growth and characterization of CNT–TiO2 heterostructures

  • Yucheng Zhang,
  • Ivo Utke,
  • Johann Michler,
  • Gabriele Ilari,
  • Marta D. Rossell and
  • Rolf Erni

Beilstein J. Nanotechnol. 2014, 5, 946–955, doi:10.3762/bjnano.5.108

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  • nucleation. The density of oxygenated defects can be increased by oxygen plasma treatment. A conformal film is obtained when the nanocrystals coalesce due to lateral growth after approximately 50–100 cycles (depending on the defect density) [28]. Similar results were obtained with Al2O3 coatings by using
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Published 02 Jul 2014

Gas sensing with gold-decorated vertically aligned carbon nanotubes

  • Prasantha R. Mudimela,
  • Mattia Scardamaglia,
  • Oriol González-León,
  • Nicolas Reckinger,
  • Rony Snyders,
  • Eduard Llobet,
  • Carla Bittencourt and
  • Jean-François Colomer

Beilstein J. Nanotechnol. 2014, 5, 910–918, doi:10.3762/bjnano.5.104

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  • temperature. However, mild heating at 150 °C was needed to help desorb the species from the surface so the baseline resistance could be fully recovered. This is not surprising because a rather strong interaction (chemisorption) between oxygen plasma treated or gold nanoparticle decorated CNTs and NO2 has been
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Published 26 Jun 2014

Hole-mask colloidal nanolithography combined with tilted-angle-rotation evaporation: A versatile method for fabrication of low-cost and large-area complex plasmonic nanostructures and metamaterials

  • Jun Zhao,
  • Bettina Frank,
  • Frank Neubrech,
  • Chunjie Zhang,
  • Paul V. Braun and
  • Harald Giessen

Beilstein J. Nanotechnol. 2014, 5, 577–586, doi:10.3762/bjnano.5.68

Graphical Abstract
  • baked at 165 °C for 2 min to fix the PMMA layer on the substrates. For the following drop coating of the solution on the polymer film surface, we treat the sample in an oxygen plasma for about 18 seconds (Diener Pico, 0.5 mbar O2, power level 50% of 200 W, HF power at 2.45 GHz) to decrease the
  • sample (see Figure 1c), as an oxygen plasma resistant layer, and the PS spheres are removed by using deionized water and an ultrasonic bath (90 W, 20 min). Finally, we treat the sample again with the oxygen plasma for an isotropic etching to create extended holes in the PMMA layer (for 230 nm PMMA 11.2
  • adhesive tape. In order to eliminate residues the sample is then immersed into an acetone solution and treated in an ultrasonic bath for about 1 min. Some sensing applications, e.g., SEIRA, require further cleaning which can be realized by oxygen plasma etching (10 to 15 min). Details on mask preparation
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Published 06 May 2014

Cyclic photochemical re-growth of gold nanoparticles: Overcoming the mask-erosion limit during reactive ion etching on the nanoscale

  • Burcin Özdemir,
  • Axel Seidenstücker,
  • Alfred Plettl and
  • Paul Ziemann

Beilstein J. Nanotechnol. 2013, 4, 886–894, doi:10.3762/bjnano.4.100

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  • PS. Selective removal of the PMMA nanodomains by an oxygen plasma process delivers the mask for subsequent SiO2 etching. In this way, densely packed silica nanopillars with a diameter of 20 nm and a height of 150 nm could be fabricated [11]. Still another variant of exploiting the self-assembly of
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Published 12 Dec 2013
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