The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• combination with a thermal stability up to 2600 K [50], renders graphene an exciting candidate for room-temperature bolometry [51]. Single-layer graphene was grown by chemical vapor deposition onto a multicrystalline copper foil using methane as precursor gas at 1035 °C. For the transfer process, the graphene

A review on the green and sustainable synthesis of silver nanoparticles and one-dimensional silver nanostructures

• Sina Kaabipour and
• Shohreh Hemmati

Beilstein J. Nanotechnol. 2021, 12, 102–136, doi:10.3762/bjnano.12.9

• processes [143][144][145][146], conventional chemical reduction [147][148][149][150][151], reverse micelle [152][153][154], co-precipitation [155], chemical vapor deposition [156][157][158], solvothermal [159][160][161], and electrochemical reduction [162][163][164][165]. Chemical synthesis methods are

• deposition process. Chemical vapor deposition (CVD) and atomic layer deposition (ALD) are among other chemical methods for nanoparticle synthesis. CVD is a method that allows production of nanoparticles on a substrate [241]. The process consists of three steps. First, the addition of a volatile precursor in

• concentration inside the reverse micelles [235]. AOT-microemulsions have been the most common microemulsions for the preparation of micelles [152]. However, this method may result in the synthesis of AgNPs with weak surface plasmon characteristics due to a broad surface plasmon band [152]. 2.2.3 Chemical vapor

Towards 3D self-assembled rolled multiwall carbon nanotube structures by spontaneous peel off

• Jonathan Quinson

Beilstein J. Nanotechnol. 2020, 11, 1865–1872, doi:10.3762/bjnano.11.168

• nanotube forests. The multiwall carbon nanotube structures are comprised of nitrogen-doped and undoped sections, and are obtained via a detailed peel off and roll mechanism. These results open new doors for the development of increasingly complex nanostructures. Keywords: chemical vapor deposition

• change within CNTs and to optimize the formation of complex CNT structures, the possibility to couple aerosol-assisted chemical vapor deposition (AACVD) [20] and chemical vapor deposition (CVD) was explored [16]. For detailed synthesis and characterization protocols, including control experiments, please

Piezotronic effect in AlGaN/AlN/GaN heterojunction nanowires used as a flexible strain sensor

• Jianqi Dong,
• Liang Chen,
• Yuqing Yang and
• Xingfu Wang

Beilstein J. Nanotechnol. 2020, 11, 1847–1853, doi:10.3762/bjnano.11.166

• structures used in this study were synthesized by metal-organic chemical vapor deposition (MOCVD), as shown in Figure 1a. First, 1 μm of an unintentionally doped GaN layer was deposited onto a sapphire substrate. Then, 500 nm of n-type GaN, as a current-spreading layer, was deposited to increase the lateral

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• -assisted chemical etching and ion-beam-assisted chemical vapor deposition [1][2][3]. All these methods are based on processes that either add or remove atoms on the surface or in the subsurface atomic layers. The ion beams deposit their energy and, therefore, affect the structure and properties of

The influence of an interfacial hBN layer on the fluorescence of an organic molecule

• Christine Brülke,
• Oliver Bauer and
• Moritz M. Sokolowski

Beilstein J. Nanotechnol. 2020, 11, 1663–1684, doi:10.3762/bjnano.11.149

• directly on metal substrates by chemical vapor deposition [2]. This is, for example, exploited when a 2DM interfacial layer is inserted between the metallic electrode and a functional organic layer of an organic electronic device, such as an organic light emitting diode [3]. The purpose of the interfacial

Self-assembly and spectroscopic fingerprints of photoactive pyrenyl tectons on hBN/Cu(111)

• Domenik M. Zimmermann,
• Knud Seufert,
• Luka Ðorđević,
• Tobias Hoh,
• Sushobhan Joshi,
• Tomas Marangoni,
• Davide Bonifazi and
• Willi Auwärter

Beilstein J. Nanotechnol. 2020, 11, 1470–1483, doi:10.3762/bjnano.11.130

• was cleaned by repeated Ar+ sputtering cycles at an energy of 800–1000 eV, followed by annealing at 1070 K. Monolayer hBN was grown via chemical vapor deposition using borazine ((HBNH)3, Katchem spol s.r.o, www.katchem.cz), following a protocol described previously [25]. Subsequently, a submonolayer

Antimicrobial metal-based nanoparticles: a review on their synthesis, types and antimicrobial action

• Matías Guerrero Correa,
• Fernanda B. Martínez,
• Cristian Patiño Vidal,
• Camilo Streitt,
• Juan Escrig and
• Carol Lopez de Dicastillo

Beilstein J. Nanotechnol. 2020, 11, 1450–1469, doi:10.3762/bjnano.11.129

• , chemical vapor deposition, electrochemical anodization method, hydrolysis, hydrothermal method, precipitation–hydrothermal method, reverse micellar route, sol–gel method, solution-based synthesis, solvothermal synthesis, and the sonochemical method. The most relevant ones, along with the typical resulting

• nm were synthesized [42]. The chemical vapor deposition method is a technique in which the substrate is exposed to one or more volatile precursors, which react to and/or decompose on the substrate surface to produce the desired thin film deposit. For example, Zhao et al. [44] obtained graphene

• -wrapped Ag nanowires using the chemical vapor deposition method in order to investigate their broad-spectrum and robust antimicrobial properties. The cryochemical synthesis method includes a simultaneous evaporation of a metallic and a volatile component (e.g., an organic monomer), followed by co

One-step synthesis of carbon-supported electrocatalysts

• Sebastian Tigges,
• Nicolas Wöhrl,
• Ivan Radev,
• Ulrich Hagemann,
• Markus Heidelmann,
• Thai Binh Nguyen,
• Stanislav Gorelkov,
• Stephan Schulz and
• Axel Lorke

Beilstein J. Nanotechnol. 2020, 11, 1419–1431, doi:10.3762/bjnano.11.126

• Abstract Cost-efficiency, durability, and reliability of catalysts, as well as their operational lifetime, are the main challenges in chemical energy conversion. Here, we present a novel, one-step approach for the synthesis of Pt/C hybrid material by plasma-enhanced chemical vapor deposition (PE-CVD). The

• acetylacetonate precursors. Keywords: electrocatalyst; fuel cells; hybrid nanomaterial; long-term stability; nanoparticle embedding; one-step synthesis; plasma-enhanced chemical vapor deposition (PE-CVD); Introduction The global fuel cell market reached a value of $4.5 billion USD in 2018 and is projected to

• only addresses the above-discussed challenges but also represents a reproducible method, which in principle is scalable, for the production of carbon-supported electrocatalysts developed on the basis of a previously reported process [17]. An inductively coupled plasma-enhanced chemical vapor deposition

Effect of localized helium ion irradiation on the performance of synthetic monolayer MoS₂ field-effect transistors

• Jakub Jadwiszczak,
• Pierce Maguire,
• Conor P. Cullen,
• Georg S. Duesberg and
• Hongzhou Zhang

Beilstein J. Nanotechnol. 2020, 11, 1329–1335, doi:10.3762/bjnano.11.117

• demonstrated impressive on/off ratios (approx. 107) in field-effect transistors (FETs), while maintaining carrier mobilities that may be adequate for commercial applications [1][2]. At the same time, advances in chemical vapor deposition (CVD) techniques have allowed for the reliable millimeter-scale synthesis

Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater

• Dinesh Rotake,
• Anand Darji and
• Nitin Kale

Beilstein J. Nanotechnol. 2020, 11, 1242–1253, doi:10.3762/bjnano.11.108

• vapor deposition (LPCVD) furnace at 630 °C and boron doping (1018 per cm3) is carried out using ion implantation at 35 keV. The upper SiO2 layer is formed by re-oxidizing the polysilicon in an oxidation furnace [40]. The stiffness (k) of the fabricated piezoresistive sensor measured using AFM is 131–146

• . It was calibrated using atomic force microscopy (AFM) [40]. The process begins with thermal oxidation of Si at 1000 °C using an oxidation furnace to obtain a thermally grown SiO2 layer followed by masking and etching to get the desired pattern. The polysilicon is deposited in a low-pressure chemical

Revealing the local crystallinity of single silicon core–shell nanowires using tip-enhanced Raman spectroscopy

• Marius van den Berg,
• Ardeshir Moeinian,
• Arne Kobald,
• Yu-Ting Chen,
• Anke Horneber,
• Steffen Strehle,
• Alfred J. Meixner and
• Dai Zhang

Beilstein J. Nanotechnol. 2020, 11, 1147–1156, doi:10.3762/bjnano.11.99

• -catalyzed vapor–liquid–solid growth and silicon overcoating by thermal chemical vapor deposition. Local changes in the fraction of crystallinity in these silicon nanowires are characterized at an optical resolution of about 300 nm. Furthermore, we are able to resolve the variations in the intensity ratios

• to chemical vapor deposition (CVD), and enables direct nanowire growth in a bottom-up manner. The nanowire composition, in particular the doping concentration, can be controlled by an adequate adjustment of the synthesis gas mixture, e.g., by setting the SiH4/B2H6 ratio during the synthesis of boron

Band tail state related photoluminescence and photoresponse of ZnMgO solid solution nanostructured films

• Vadim Morari,
• Aida Pantazi,
• Nicolai Curmei,
• Vitalie Postolache,
• Emil V. Rusu,
• Marius Enachescu,
• Ion M. Tiginyanu and
• Veaceslav V. Ursaki

Beilstein J. Nanotechnol. 2020, 11, 899–910, doi:10.3762/bjnano.11.75

• radio-frequency plasma-assisted molecular beam epitaxy (RF-MBE) [2][7][10][11], DC [12][13] and RF [1][3][6] magnetron sputtering, pulsed laser deposition (PLD) [14][15], plasma-enhanced atomic layer deposition (PE-ALD) [16], chemical vapor deposition (CVD) [17], metal–organic chemical vapor deposition

Integrated photonics multi-waveguide devices for optical trapping and Raman spectroscopy: design, fabrication and performance demonstration

• Gyllion B. Loozen,
• Arnica Karuna,
• Mohammad M. R. Fanood,
• Erik Schreuder and
• Jacob Caro

Beilstein J. Nanotechnol. 2020, 11, 829–842, doi:10.3762/bjnano.11.68

• waveguides is completely decoupled from the silicon substrate. Then, a 100 nm thick layer of Si3N4 is deposited using low pressure chemical vapor deposition (LPCVD, Figure 5b). This layer is patterned using optical lithography and reactive ion etching (RIE) in a fluorine-based plasma, which is followed by

Templating effect of single-layer graphene supported by an insulating substrate on the molecular orientation of lead phthalocyanine

• K. Priya Madhuri,
• Abhay A. Sagade,
• Pralay K. Santra and
• Neena S. John

Beilstein J. Nanotechnol. 2020, 11, 814–820, doi:10.3762/bjnano.11.66

• ) substrate [24]. It will be interesting to explore the molecular orientation of nonplanar PbPc on single-layer graphene supported on a substrate. In this study, we have investigated the molecular orientation of a PbPc film deposited on chemical vapor deposition (CVD)-grown graphene transferred onto a SiO2/Si

• . Single-layer graphene was synthesized by chemical vapor deposition (CVD) on a copper substrate and transferred by a standard technique using poly(methyl methacrylate) (PMMA) onto a SiO2 (300 nm)/Si substrate as reported elsewhere [30]. This process is optimized with regard to minimal PMMA contamination

Light–matter interactions in two-dimensional layered WSe₂ for gauging evolution of phonon dynamics

• Avra S. Bandyopadhyay,
• Chandan Biswas and
• Anupama B. Kaul

Beilstein J. Nanotechnol. 2020, 11, 782–797, doi:10.3762/bjnano.11.63

• work reported τ over a range T = 4.4–300 K in naturally abundant and isotopically pure WSe2 grown by the chemical vapor deposition (CVD) method [29]. In one of our recent works, exciton dynamics and phonon lifetimes in CVD-grown and mechanically exfoliated 1L WSe2 nanosheets were analyzed and τ

Hexagonal boron nitride: a review of the emerging material platform for single-photon sources and the spin–photon interface

• Stefania Castelletto,
• Faraz A. Inam,
• Shin-ichiro Sato and
• Alberto Boretti

Beilstein J. Nanotechnol. 2020, 11, 740–769, doi:10.3762/bjnano.11.61

• complexes, it is shown they are low-energy formation defects in h-BN. This suggests that the assignment is presently controversial also considering the successive verification of SPEs as discussed in the following. In [45] h-BN exfoliated flakes, monolayer chemical vapor deposition (CVD) and in-house h-BN

Simple synthesis of nanosheets of rGO and nitrogenated rGO

• Pallellappa Chithaiah,
• Madhan Mohan Raju,
• Giridhar U. Kulkarni and
• C. N. R. Rao

Beilstein J. Nanotechnol. 2020, 11, 68–75, doi:10.3762/bjnano.11.7

• the carbon sheet, which lead to a disruption of the conjugated network and the flow of charge carriers is reduced by several orders of magnitude [10]. Up to now, several methods including chemical vapor deposition [11][12][13], arc discharge [14], aerosol pyrolysis [15], mechanical exfoliation [1

Synthesis of amorphous and graphitized porous nitrogen-doped carbon spheres as oxygen reduction reaction catalysts

• Maximilian Wassner,
• Markus Eckardt,
• Andreas Reyer,
• Thomas Diemant,
• Michael S. Elsaesser,
• R. Jürgen Behm and
• Nicola Hüsing

Beilstein J. Nanotechnol. 2020, 11, 1–15, doi:10.3762/bjnano.11.1

• are chemical vapor deposition (CVD) and arc discharge methods for N-doped graphene, graphite, and carbon nanotubes [9]. Most commonly, the post-synthetic approach is carried out by thermal treatment of carbon in ammonia atmosphere, typically leading to surface N-doping. A variety of N bonding

Advanced hybrid nanomaterials

• Andreas Taubert,
• Fabrice Leroux,
• Pierre Rabu and
• Verónica de Zea Bermudez

Beilstein J. Nanotechnol. 2019, 10, 2563–2567, doi:10.3762/bjnano.10.247

• electronic devices” [29]. A combination of deposition techniques was used, chemical vapor deposition for parylene and RF-magnetron sputtering for silver nanoparticles. The content and size of the latter influences the dielectric characteristics of the resulting hybrid films. Such devices may find application

pH-Controlled fluorescence switching in water-dispersed polymer brushes grafted to modified boron nitride nanotubes for cellular imaging

• Saban Kalay,
• Yurij Stetsyshyn,
• Volodymyr Donchak,
• Khrystyna Harhay,
• Ostap Lishchynskyi,
• Halyna Ohar,
• Yuriy Panchenko,
• Stanislav Voronov and
• Mustafa Çulha

Beilstein J. Nanotechnol. 2019, 10, 2428–2439, doi:10.3762/bjnano.10.233

• ); characteristic infrared spectra bands – ν (С=О) in Ar-C(O)Cl, ν (С=О) in ester group at 1760 and 1752 cm−1; doublet at 1390, 1365 cm−1, referred to δ(C(CH3)3) and a band of tert-butoxy group at 848 cm−1. BNNT synthesis and purification The BNNTs were synthesized by chemical vapor deposition from colemanite (2 g

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

• Nahid Hosseini,
• Matthias Neuenschwander,
• Oliver Peric,
• Santiago H. Andany,
• Jonathan D. Adams and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2019, 10, 2357–2363, doi:10.3762/bjnano.10.226

• by low-pressure chemical vapor deposition. Circular openings (20 µm diameter) are then cut into the layer by electron-beam lithography. The LSNT mask is dry-etched before the moulds are structured by anisotropic KOH (40% at 60 °C) etching. The formation of {111} facets results in four-sided pyramidal

Nitrogen-vacancy centers in diamond for nanoscale magnetic resonance imaging applications

• Alberto Boretti,
• Lorenzo Rosa,
• Jonathan Blackledge and
• Stefania Castelletto

Beilstein J. Nanotechnol. 2019, 10, 2128–2151, doi:10.3762/bjnano.10.207

Improved adsorption and degradation performance by S-doping of (001)-TiO₂

• Xiao-Yu Sun,
• Xian Zhang,
• Xiao Sun,
• Ni-Xian Qian,
• Min Wang and
• Yong-Qing Ma

Beilstein J. Nanotechnol. 2019, 10, 2116–2127, doi:10.3762/bjnano.10.206

• of Physical Science and Information Technology, Anhui University, Hefei 230039, China 10.3762/bjnano.10.206 Abstract In this work, sulfur-doped (S-doped) TiO2 with the (001) face exposed was synthesized by thermal chemical vapor deposition at 180 or 250 °C using S/Ti molar ratios RS/Ti of 0, 0.5, 1

• increase in the amount of •OH and •O2− radicals. Keywords: anatase; chemical state; degradation; photocatalytic properties; S-doping; thermal chemical vapor deposition; titanium dioxide (TiO2); Introduction Anatase TiO2 with a tetragonal symmetry has widely been used for the degradation of organic

• performed by thermal chemical vapor deposition. We observed that S-doping greatly enhances the photocatalytic performance of (001)-TiO2, and we revealed the related mechanism by a systematic investigation of the material. Experimental Synthesis of nanoparticles 20 mL of tetrabutyl titanate (TBT, 99

Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering

• Petronela Prepelita,
• Ionel Stavarache,
• Doina Craciun,
• Florin Garoi,
• Catalin Negrila,
• Beatrice Gabriela Sbarcea and
• Valentin Craciun

Beilstein J. Nanotechnol. 2019, 10, 1511–1522, doi:10.3762/bjnano.10.149

• of ITO in various applications increases when the electrical properties are improved. Various deposition techniques have been used to obtain TCO thin films, such as: vacuum thermal evaporation [15][16], chemical vapor deposition [17], sol–gel [18], pyrolysis spray techniques [5][19], magnetron