Synthesis of [{AgO₂CCH₂OMe(PPh₃)}_n] and theoretical study of its use in focused electron beam induced deposition

• Jelena Tamuliene,
• Julian Noll,
• Peter Frenzel,
• Tobias Rüffer,
• Alexander Jakob,
• Bernhard Walfort and
• Heinrich Lang

Beilstein J. Nanotechnol. 2017, 8, 2615–2624, doi:10.3762/bjnano.8.262

• beam induced deposition (FEBID) is a cost efficient direct resist-free chemical vapor deposition technique producing free-standing 3D metal-containing nanoscale structures in a single step on, for example, surfaces of sub-10 nm size using a variety of materials with a high degree of spatial and time

• O2CCH2OMe− is generated, further following the first fragmentation route. However, at 1.3 eV the initial step is decarboxylation giving [AgCH2OMe(PPh3)], followed by Ag–P and Ag–C bond cleavages. Keywords: DFT; DSC; FEBID; silver(I) carboxylate; solid-state structure; TGA; Introduction Focused electron

Correction: Modelling focused electron beam induced deposition beyond Langmuir adsorption

• Dédalo Sanz-Hernández and
• Amalio Fernández-Pacheco

Beilstein J. Nanotechnol. 2017, 8, 2591–2591, doi:10.3762/bjnano.8.259

• Dedalo Sanz-Hernandez Amalio Fernandez-Pacheco Cavendish Laboratory, University of Cambridge, JJ Thomson Cambridge, CB3 0HE, United Kingdom 10.3762/bjnano.8.259 Keywords: adsorption isotherm theory; BET model; continuum model; focused electron beam induced deposition; 3D nanoprinting; Langmuir

Interactions of low-energy electrons with the FEBID precursor chromium hexacarbonyl (Cr(CO)₆)

• Jusuf M. Khreis,
• João Ameixa,
• Filipe Ferreira da Silva and
• Stephan Denifl

Beilstein J. Nanotechnol. 2017, 8, 2583–2590, doi:10.3762/bjnano.8.258

• compounds can be used as a precursor to deposit metals on a surface. The conventional lithography techniques are approaching the limits of spatial resolution [1], therefore it is crucial to search and improve new methods and techniques for future technological requirements. Focused electron beam induced

• deposition (FEBID) can be considered an assisted chemical vapour deposition (CVD) technique. However, in the former case the organometallic precursor is not fragmented by thermal energy but instead by a high-energy electron beam. The precursor molecules are delivered to the substrate in the gas phase and

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment

• Domagoj Belić,
• Mostafa M. Shawrav,
• Emmerich Bertagnolli and
• Heinz D. Wanzenboeck

Beilstein J. Nanotechnol. 2017, 8, 2530–2543, doi:10.3762/bjnano.8.253

• microstructures can be fabricated by one-step direct-write lithography process using focused electron beam induced deposition (FEBID). Typically, as-deposited gold nanostructures suffer from a low Au content and unacceptably high carbon contamination. We show that the undesirable carbon contamination can be

• direct writing of purer gold nanostructures that can enable their future use for demanding applications. Keywords: FEBID; gold nanostructures; oxygen plasma; postdeposition purification; Introduction Focused electron beam induced deposition (FEBID) is an additive direct-write method for making complex

Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition

• Julie A. Spencer,
• Michael Barclay,
• Miranda J. Gallagher,
• Robert Winkler,
• Ilyas Unlu,
• Yung-Chien Wu,
• Harald Plank,
• Lisa McElwee-White and
• D. Howard Fairbrother

Beilstein J. Nanotechnol. 2017, 8, 2410–2424, doi:10.3762/bjnano.8.240

• from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as thermodynamics calculations support the idea that electrons can remove chlorine from

• of AO restricts its effectiveness as a purification strategy to relatively small nanostructures. Keywords: atomic hydrogen; atomic oxygen; electron beam processing; focused electron beam induced deposition (FEBID); purification; Introduction Focused electron beam induced deposition (FEBID) has

Electron beam induced deposition of silacyclohexane and dichlorosilacyclohexane: the role of dissociative ionization and dissociative electron attachment in the deposition process

• Ragesh Kumar T P,
• Sangeetha Hari,
• Krishna K Damodaran,
• Oddur Ingólfsson and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2017, 8, 2376–2388, doi:10.3762/bjnano.8.237

• attachment; dissociative ionization; electron beam induced deposition; low-energy electrons; silacyclohexane; Introduction Focused electron beam induced deposition (FEBID) [1][2] is a 3-D direct writing method suitable for the fabrication of nanostructures, even on non-planar surfaces. This approach is in

• many ways complementary to current mask-based lithography methods and has high potential in areas where these are not applicable. Focused electron beam induced deposition is based on the exposure of precursor molecules, physisorbed on a substrates surface, to a narrowly focused high-energy electron

Dissociative electron attachment to coordination complexes of chromium: chromium(0) hexacarbonyl and benzene-chromium(0) tricarbonyl

• Janina Kopyra,
• Paulina Maciejewska and
• Jelena Maljković

Beilstein J. Nanotechnol. 2017, 8, 2257–2263, doi:10.3762/bjnano.8.225

• [1][2][3]. However, they also play an important role in nanotechnology. In fact, a number of organometallic complexes, originally designed for chemical vapor deposition (CVD) purposes, have also been recognized as promising precursors for focused electron beam induced deposition (FEBID), a process to

Comprehensive investigation of the electronic excitation of W(CO)₆ by photoabsorption and theoretical analysis in the energy region from 3.9 to 10.8 eV

• Mónica Mendes,
• Khrystyna Regeta,
• Filipe Ferreira da Silva,
• Nykola C. Jones,
• Søren Vrønning Hoffmann,
• Gustavo García,
• Chantal Daniel and
• Paulo Limão-Vieira

Beilstein J. Nanotechnol. 2017, 8, 2208–2218, doi:10.3762/bjnano.8.220

• of relevance to estimate neutral dissociation cross sections of W(CO)6, a precursor molecule in focused electron beam induced deposition (FEBID) processes, from electron scattering measurements. Keywords: cross sections; density functional theory (DFT) calculations; focused electron beam induced

• initio molecular dynamics simulations of focused electron beam induced deposition (FEBID) precursor molecules adsorbed on fully and partially hydroxylated SiO2 surfaces [24]. Electron-induced reactions in FEBID processes are initiated by low-energy secondary electrons rather than the high-energy primary

• deposition (FEBID); photoabsorption; tungsten hexacarbonyl; Introduction The electronic structure of tungsten hexacarbonyl, W(CO)6, has previously been studied by using a variety of different experimental and theoretical methods, with experiments including vacuum ultraviolet experiments in the wavelength

Modelling focused electron beam induced deposition beyond Langmuir adsorption

• Dédalo Sanz-Hernández and
• Amalio Fernández-Pacheco

Beilstein J. Nanotechnol. 2017, 8, 2151–2161, doi:10.3762/bjnano.8.214

• Dedalo Sanz-Hernandez Amalio Fernandez-Pacheco Cavendish Laboratory, University of Cambridge, JJ Thomson Cambridge, CB3 0HE, United Kingdom 10.3762/bjnano.8.214 Abstract In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer

• deposition; 3D nanoprinting; Langmuir model; Introduction Focused electron beam induced deposition (FEBID) is a direct-write nanolithography technique, based on the local decomposition of gas molecules adsorbed on a substrate and induced by the interaction with a focused beam of electrons [1][2][3]. FEBID

• types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes. Keywords: adsorption isotherm theory; BET model; continuum model; focused electron beam induced

Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips

• Soraya Sangiao,
• César Magén,
• Darius Mofakhami,
• Grégoire de Loubens and
• José María De Teresa

Beilstein J. Nanotechnol. 2017, 8, 2106–2115, doi:10.3762/bjnano.8.210

• work, we present a detailed investigation of the magnetic properties of cobalt nanospheres grown on cantilever tips by focused electron beam induced deposition (FEBID). The cantilevers are extremely soft and the cobalt nanospheres are optimized for magnetic resonance force microscopy (MRFM) experiments

• . Keywords: cobalt nanostructures; electron holography; focused electron beam induced deposition; magnetic deposits; magnetic resonance force microscopy; Introduction Through the local decomposition of magnetic precursor molecules by the action of an incoming electron beam, a wide range of functional

• magnetic nanostructures have been produced in last years by the focused electron beam induced deposition (FEBID) technique [1][2]. The extensive list of nanostructures includes: (a) planar deposits in the shape of Hall bars for sensing purposes [3][4][5][6]; (b) magnetic nanopillars for functionalization

Fixation mechanisms of nanoparticles on substrates by electron beam irradiation

• Daichi Morioka,
• Tomohiro Nose,
• Taiki Chikuta,
• Kazutaka Mitsuishi and
• Masayuki Shimojo

Beilstein J. Nanotechnol. 2017, 8, 1523–1529, doi:10.3762/bjnano.8.153

• produced by focused electron beam induced deposition (FEBID) [6], photo-lithography (PL), or micro-contact printing (μCP) [7]. However, the purity of the deposits from FEBID is generally low, and PL and μCP require complicated processes including the fabrication of masks or masters, exposure or stamping

Efficient electron-induced removal of oxalate ions and formation of copper nanoparticles from copper(II) oxalate precursor layers

• Kai Rückriem,
• Sarah Grotheer,
• Henning Vieker,
• Paul Penner,
• André Beyer,
• Armin Gölzhäuser and
• Petra Swiderek

Beilstein J. Nanotechnol. 2016, 7, 852–861, doi:10.3762/bjnano.7.77

• electron beam induced deposition (FEBID) [1][2] solid materials are produced on surfaces through decomposition of volatile precursor compounds under the electron beam [1][3][4]. As an alternative to deposition from the gas phase, FEBID has recently also been performed in micrometer-thin films of molten

• nanoscale materials and devices. In fact, depending on the electron source used in such processes, different types of nanostructures are accessible. Using a tightly focused beam, structures of arbitrary shape with dimensions in the nanometer regime can be directly written on surfaces. In such focused

Correction: Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

• Aleksandra Szkudlarek,
• Alfredo Rodrigues Vaz,
• Yucheng Zhang,
• Andrzej Rudkowski,
• Czesław Kapusta,
• Rolf Erni,
• Stanislav Moshkalev and
• Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1935–1936, doi:10.3762/bjnano.6.196

• nanocrystals; focused electron beam induced deposition (FEBID); post-growth annealing of Cu–C material; In Figure 8 of the original article, the scale of the ordinate was wrong. The correct figure looks as follows: Figure 8 in the original article: Calculated resistivity from the resistance measurement of a

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

• Rachel M. Thorman,
• Ragesh Kumar T. P.,
• D. Howard Fairbrother and
• Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

• ; focused electron beam induced deposition (FEBID); low-energy electron-induced fragmentation; neutral dissociation; Review 1 Introduction Focused electron beam induced deposition (FEBID) [1][2][3] is a direct-write method capable of creating nanostructures with potential scientific and industrial

• and carbon in the deposits remains an open question in these studies. However, as the bulk of the oxygen is bound as CoO, the nitrogen is likely bound as the respective cobalt nitride. Focused electron beam induced deposition of Co(CO)3NO at elevated substrate temperatures [80] leads to a substantial

• Rachel M. Thorman Ragesh Kumar T. P. D. Howard Fairbrother Oddur Ingolfsson Science Institute and Department of Chemistry, University of Iceland, Reykjavík, Iceland Department of Chemistry, Johns Hopkins University, Baltimore, Maryland, USA 10.3762/bjnano.6.194 Abstract Focused electron beam

Focused particle beam-induced processing

• Michael Huth and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2015, 6, 1883–1885, doi:10.3762/bjnano.6.191

• nanoscale. However, in contrast with large-scale 3D printing of plastic or metallic structures, FPBID provides nanomaterials with a wealth of interesting electronic, optical and magnetic properties. Due to this, focused electron beam-induced deposition (FEBID) has experienced a rapid expansion in the

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

• Aleksandra Szkudlarek,
• Alfredo Rodrigues Vaz,
• Yucheng Zhang,
• Andrzej Rudkowski,
• Czesław Kapusta,
• Rolf Erni,
• Stanislav Moshkalev and
• Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1508–1517, doi:10.3762/bjnano.6.156

• study in detail the post-growth annealing of a copper-containing material deposited with focused electron beam induced deposition (FEBID). The organometallic precursor Cu(II)(hfac)2 was used for deposition and the results were compared to that of compared to earlier experiments with (hfac)Cu(I)(VTMS

• conventionally and by laser-induced heating in the scanning electron microscope chamber. Keywords: Cu(hfac)2; Cu nanocrystals; focused electron beam induced deposition (FEBID); post-growth annealing of Cu–C material; Introduction Focused electron beam induced deposition (FEBID) is a direct maskless

Influence of the shape and surface oxidation in the magnetization reversal of thin iron nanowires grown by focused electron beam induced deposition

• Luis A. Rodríguez,
• Lorenz Deen,
• Rosa Córdoba,
• César Magén,
• Etienne Snoeck,
• Bert Koopmans and
• José M. De Teresa

Beilstein J. Nanotechnol. 2015, 6, 1319–1331, doi:10.3762/bjnano.6.136

• Aragón (ICMA), Universidad de Zaragoza-CSIC, 50009 Zaragoza, Spain 10.3762/bjnano.6.136 Abstract Iron nanostructures grown by focused electron beam induced deposition (FEBID) are promising for applications in magnetic sensing, storage and logic. Such applications require a precise design and

• ; focused electron beam induced deposition; iron nanowires; magnetization reversal; magneto-optical Kerr effect; transmission electron microscopy; Introduction The fabrication of magnetic nanostructures in a single lithographic step by focused electron beam induced deposition (FEBID) is currently an

• nanowires grown by focused electron beam induced deposition (FEBID) has been carried out. It has been found that the coercive field decreases for increasing thickness and width in the range of dimensions studied. In the particular case of HC vs thickness for nanowires with constant width (250 nm

Structural transitions in electron beam deposited Co–carbonyl suspended nanowires at high electrical current densities

• Gian Carlo Gazzadi and
• Stefano Frabboni

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

• –carbonyl precursor (Co2(CO)8) by focused electron beam induced deposition (FEBID). The SNWs dimensions are about 30–50 nm in diameter and 600–850 nm in length. The as-deposited material has a nanogranular structure of mixed face-centered cubic (FCC) and hexagonal close-packed (HCP) Co phases, and a

• graphitized C. The breakdown current density is found at 2.1 × 107 A/cm2. The role played by resistive heating and electromigration in these transitions is discussed. Keywords: cobalt; electromigration; focused electron beam induced deposition (FEBID); metallic nanowires; Introduction The growing importance

• of nanotechnology and nanoscience in advanced applications and fundamental research requires nanofabrication techniques that are highly resolved but at the same time flexible and feasible with research laboratory equipment. A promising approach is represented by focused electron beam induced

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

• Francesc Salvat-Pujol,
• Roser Valentí and
• Wolfgang S. Werner

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

• /bjnano.6.129 Abstract The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible

• present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations. Keywords: focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation

• , including a number of spectroscopies (electron-energy-loss spectroscopy, X-ray photoelectron spectroscopy, and Auger-electron spectroscopy), electron microscopy, and the focused-electron-beam-induced deposition (FEBID) of nanostructures, on which we focus here. This technique employs beams of focussed

Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures

• Oleksandr V. Dobrovolskiy,
• Maksym Kompaniiets,
• Roland Sachser,
• Fabrizio Porrati,
• Christian Gspan,
• Harald Plank and
• Michael Huth

Beilstein J. Nanotechnol. 2015, 6, 1082–1090, doi:10.3762/bjnano.6.109

• heterostructures on the lateral mesoscale. By means of in situ post-processing of Pt- and Co-based nano-stripes prepared by focused electron beam induced deposition (FEBID) we are able to locally tune their coercive field and remanent magnetization. Whereas single Co-FEBID nano-stripes show no hysteresis, we find

• film techniques or by an alternative approach, as used by us, namely the direct writing of metal-based layers by focused electron beam induced deposition (FEBID) [18][19]. The resolution of FEBID is better than 10 nm laterally and 1 nm vertically [18][19] and, thus, its proven applications range from

• hard-magnetic behavior for post-processed Co/Pt nano-stripes with coercive fields up to 850 Oe. We attribute the observed effects to the locally controlled formation of the CoPt L10 phase, whose presence has been revealed by transmission electron microscopy. Keywords: cobalt; focused electron beam

Patterning technique for gold nanoparticles on substrates using a focused electron beam

• Takahiro Noriki,
• Shogo Abe,
• Kotaro Kajikawa and
• Masayuki Shimojo

Beilstein J. Nanotechnol. 2015, 6, 1010–1015, doi:10.3762/bjnano.6.104

• structures with gold and silver nanoparticles using a nanomanipulator. This technique is fascinating, but it may be a time-consuming process for production of relatively large circuits. Nanostructures have also been fabricated using focused ion beam- or focused electron beam-induced deposition [1][7

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

• Brett B. Lewis,
• Michael G. Stanford,
• Jason D. Fowlkes,
• Kevin Lester,
• Harald Plank and
• Philip D. Rack

Beilstein J. Nanotechnol. 2015, 6, 907–918, doi:10.3762/bjnano.6.94

• process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention. Keywords: beam induced processing; direct-write; electron beam induced deposition; nano; Introduction Focused electron beam induced deposition (FEBID) is an attractive nanotechnology

Fundamental edge broadening effects during focused electron beam induced nanosynthesis

• Roland Schmied,
• Jason D. Fowlkes,
• Robert Winkler,
• Phillip D. Rack and
• Harald Plank

Beilstein J. Nanotechnol. 2015, 6, 462–471, doi:10.3762/bjnano.6.47

• Tennessee, Knoxville, Tennessee 37996, USA Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria 10.3762/bjnano.6.47 Abstract The present study explores lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition

• more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution. Keywords: focused electron beam induced deposition; nanofabrication; platinum; simulation; Introduction Focused electron beam induced deposition (FEBID) has

In situ growth optimization in focused electron-beam induced deposition

• Paul M. Weirich,
• Marcel Winhold,
• Christian H. Schwalb and
• Michael Huth

Beilstein J. Nanotechnol. 2013, 4, 919–926, doi:10.3762/bjnano.4.103

• nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the measured in situ rate of change of conductance as the fitness parameter for the algorithm. The effectiveness

• ; nanotechnology; tungsten; Introduction In focused electron-beam-induced deposition, FEBID in short, a (metal-)organic or inorganic volatile precursor gas, which was previously adsorbed on a substrate surface, is dissociated in the focus of an electron beam provided by a scanning (SEM) or transmission electron

The role of electron-stimulated desorption in focused electron beam induced deposition

• Willem F. van Dorp,
• Thomas W. Hansen,
• Jakob B. Wagner and
• Jeff T. M. De Hosson

Beilstein J. Nanotechnol. 2013, 4, 474–480, doi:10.3762/bjnano.4.56

• exposed to the electron beam. If these fragments react with the target material to form a gaseous product, the target is etched locally (focused electron beam induced etching). If on the other hand the fragments form a residue, a deposit grows on the sample surface (focused electron beam induced

• deposition). In either case, the sample can be modified directly with the electron beam, in principle without the use of any extra processing before or after the electron exposure. FEBIP is applied in various fields. Because electrons can be focused into narrow beams, small patterns can be defined with FEBIP