Chemistry for electron-induced nanofabrication
Prof. Petra Swiderek, University of Bremen, Germany
Dr. Hubertus Marbach, Friedrich-Alexander University Erlangen-Nürnberg, Germany
Prof. Cornelis W. Hagen, Delft University of Technology, Netherlands
This Thematic Series covers all relevant aspects of focused electron beam induced processing (FEBIP) and in particular focused electron beam induced deposition (FEBID), including:
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the fundamental electron–precursor interactions leading to precursor fragmentation,
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the surface reactions initiated by these interactions,
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the design and synthesis of novel FEBID precursors, and
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advances in the performance of FEBID processes with respect to deposit purity, spatial resolution, and processing speed.
The performance of these nanofabrication processes and the properties of the resulting nanomaterials depend decisively on how precisely the underlying chemistry can be controlled. In fact, it is the interplay of electron-induced and thermal precursor chemistry together with the reactivity of the surface where these reactions take place that determines the composition and the spatial resolution of deposits fabricated by FEBID. This calls for the development of novel precursors designed specifically for electron beam driven processing and of optimized processes with respect to surface chemistry or added purification reagents, taking also into consideration new developments in precursor supply instrumentation.
Chemistry for electron-induced nanofabrication
- Petra Swiderek,
- Hubertus Marbach and
- Cornelis W. Hagen
Beilstein J. Nanotechnol. 2018, 9, 1317–1320, doi:10.3762/bjnano.9.124
3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity
- Brett B. Lewis,
- Robert Winkler,
- Xiahan Sang,
- Pushpa R. Pudasaini,
- Michael G. Stanford,
- Harald Plank,
- Raymond R. Unocic,
- Jason D. Fowlkes and
- Philip D. Rack
Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83
Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips
- Soraya Sangiao,
- César Magén,
- Darius Mofakhami,
- Grégoire de Loubens and
- José María De Teresa
Beilstein J. Nanotechnol. 2017, 8, 2106–2115, doi:10.3762/bjnano.8.210
Modelling focused electron beam induced deposition beyond Langmuir adsorption
- Dédalo Sanz-Hernández and
- Amalio Fernández-Pacheco
Beilstein J. Nanotechnol. 2017, 8, 2151–2161, doi:10.3762/bjnano.8.214
Suppression of low-energy dissociative electron attachment in Fe(CO)5 upon clustering
- Jozef Lengyel,
- Peter Papp,
- Štefan Matejčík,
- Jaroslav Kočišek,
- Michal Fárník and
- Juraj Fedor
Beilstein J. Nanotechnol. 2017, 8, 2200–2207, doi:10.3762/bjnano.8.219
Comprehensive investigation of the electronic excitation of W(CO)6 by photoabsorption and theoretical analysis in the energy region from 3.9 to 10.8 eV
- Mónica Mendes,
- Khrystyna Regeta,
- Filipe Ferreira da Silva,
- Nykola C. Jones,
- Søren Vrønning Hoffmann,
- Gustavo García,
- Chantal Daniel and
- Paulo Limão-Vieira
Beilstein J. Nanotechnol. 2017, 8, 2208–2218, doi:10.3762/bjnano.8.220
Dissociative electron attachment to coordination complexes of chromium: chromium(0) hexacarbonyl and benzene-chromium(0) tricarbonyl
- Janina Kopyra,
- Paulina Maciejewska and
- Jelena Maljković
Beilstein J. Nanotechnol. 2017, 8, 2257–2263, doi:10.3762/bjnano.8.225
Electron beam induced deposition of silacyclohexane and dichlorosilacyclohexane: the role of dissociative ionization and dissociative electron attachment in the deposition process
- Ragesh Kumar T P,
- Sangeetha Hari,
- Krishna K Damodaran,
- Oddur Ingólfsson and
- Cornelis W. Hagen
Beilstein J. Nanotechnol. 2017, 8, 2376–2388, doi:10.3762/bjnano.8.237
Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition
- Julie A. Spencer,
- Michael Barclay,
- Miranda J. Gallagher,
- Robert Winkler,
- Ilyas Unlu,
- Yung-Chien Wu,
- Harald Plank,
- Lisa McElwee-White and
- D. Howard Fairbrother
Beilstein J. Nanotechnol. 2017, 8, 2410–2424, doi:10.3762/bjnano.8.240
Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment
- Domagoj Belić,
- Mostafa M. Shawrav,
- Emmerich Bertagnolli and
- Heinz D. Wanzenboeck
Beilstein J. Nanotechnol. 2017, 8, 2530–2543, doi:10.3762/bjnano.8.253
Amplified cross-linking efficiency of self-assembled monolayers through targeted dissociative electron attachment for the production of carbon nanomembranes
- Sascha Koch,
- Christopher D. Kaiser,
- Paul Penner,
- Michael Barclay,
- Lena Frommeyer,
- Daniel Emmrich,
- Patrick Stohmann,
- Tarek Abu-Husein,
- Andreas Terfort,
- D. Howard Fairbrother,
- Oddur Ingólfsson and
- Armin Gölzhäuser
Beilstein J. Nanotechnol. 2017, 8, 2562–2571, doi:10.3762/bjnano.8.256
Interactions of low-energy electrons with the FEBID precursor chromium hexacarbonyl (Cr(CO)6)
- Jusuf M. Khreis,
- João Ameixa,
- Filipe Ferreira da Silva and
- Stephan Denifl
Beilstein J. Nanotechnol. 2017, 8, 2583–2590, doi:10.3762/bjnano.8.258
Correction: Modelling focused electron beam induced deposition beyond Langmuir adsorption
- Dédalo Sanz-Hernández and
- Amalio Fernández-Pacheco
Beilstein J. Nanotechnol. 2017, 8, 2591–2591, doi:10.3762/bjnano.8.259
Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits
- Fan Tu,
- Martin Drost,
- Imre Szenti,
- Janos Kiss,
- Zoltan Kónya and
- Hubertus Marbach
Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260
Synthesis of [{AgO2CCH2OMe(PPh3)}n] and theoretical study of its use in focused electron beam induced deposition
- Jelena Tamuliene,
- Julian Noll,
- Peter Frenzel,
- Tobias Rüffer,
- Alexander Jakob,
- Bernhard Walfort and
- Heinrich Lang
Beilstein J. Nanotechnol. 2017, 8, 2615–2624, doi:10.3762/bjnano.8.262
The rational design of a Au(I) precursor for focused electron beam induced deposition
- Ali Marashdeh,
- Thiadrik Tiesma,
- Niels J. C. van Velzen,
- Sjoerd Harder,
- Remco W. A. Havenith,
- Jeff T. M. De Hosson and
- Willem F. van Dorp
Beilstein J. Nanotechnol. 2017, 8, 2753–2765, doi:10.3762/bjnano.8.274
Response under low-energy electron irradiation of a thin film of a potential copper precursor for focused electron beam induced deposition (FEBID)
- Leo Sala,
- Iwona B. Szymańska,
- Céline Dablemont,
- Anne Lafosse and
- Lionel Amiaud
Beilstein J. Nanotechnol. 2018, 9, 57–65, doi:10.3762/bjnano.9.8
Electron-driven and thermal chemistry during water-assisted purification of platinum nanomaterials generated by electron beam induced deposition
- Ziyan Warneke,
- Markus Rohdenburg,
- Jonas Warneke,
- Janina Kopyra and
- Petra Swiderek
Beilstein J. Nanotechnol. 2018, 9, 77–90, doi:10.3762/bjnano.9.10
Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID
- Marcos V. Puydinger dos Santos,
- Aleksandra Szkudlarek,
- Artur Rydosz,
- Carlos Guerra-Nuñez,
- Fanny Béron,
- Kleber R. Pirota,
- Stanislav Moshkalev,
- José Alexandre Diniz and
- Ivo Utke
Beilstein J. Nanotechnol. 2018, 9, 91–101, doi:10.3762/bjnano.9.11
Gas-assisted silver deposition with a focused electron beam
- Luisa Berger,
- Katarzyna Madajska,
- Iwona B. Szymanska,
- Katja Höflich,
- Mikhail N. Polyakov,
- Jakub Jurczyk,
- Carlos Guerra-Nuñez and
- Ivo Utke
Beilstein J. Nanotechnol. 2018, 9, 224–232, doi:10.3762/bjnano.9.24
Electron interaction with copper(II) carboxylate compounds
- Michal Lacko,
- Peter Papp,
- Iwona B. Szymańska,
- Edward Szłyk and
- Štefan Matejčík
Beilstein J. Nanotechnol. 2018, 9, 384–398, doi:10.3762/bjnano.9.38
Electron interactions with the heteronuclear carbonyl precursor H2FeRu3(CO)13 and comparison with HFeCo3(CO)12: from fundamental gas phase and surface science studies to focused electron beam induced deposition
- Ragesh Kumar T P,
- Paul Weirich,
- Lukas Hrachowina,
- Marc Hanefeld,
- Ragnar Bjornsson,
- Helgi Rafn Hrodmarsson,
- Sven Barth,
- D. Howard Fairbrother,
- Michael Huth and
- Oddur Ingólfsson
Beilstein J. Nanotechnol. 2018, 9, 555–579, doi:10.3762/bjnano.9.53
Dynamics and fragmentation mechanism of (C5H4CH3)Pt(CH3)3 on SiO2 surfaces
- Kaliappan Muthukumar,
- Harald O. Jeschke and
- Roser Valentí
Beilstein J. Nanotechnol. 2018, 9, 711–720, doi:10.3762/bjnano.9.66
Towards the third dimension in direct electron beam writing of silver
- Katja Höflich,
- Jakub Mateusz Jurczyk,
- Katarzyna Madajska,
- Maximilian Götz,
- Luisa Berger,
- Carlos Guerra-Nuñez,
- Caspar Haverkamp,
- Iwona Szymanska and
- Ivo Utke
Beilstein J. Nanotechnol. 2018, 9, 842–849, doi:10.3762/bjnano.9.78
A novel copper precursor for electron beam induced deposition
- Caspar Haverkamp,
- George Sarau,
- Mikhail N. Polyakov,
- Ivo Utke,
- Marcos V. Puydinger dos Santos,
- Silke Christiansen and
- Katja Höflich
Beilstein J. Nanotechnol. 2018, 9, 1220–1227, doi:10.3762/bjnano.9.113
