Chemistry for electron-induced nanofabrication

  1. editorImage
  1. Editors:
    Prof. Petra Swiderek, University of Bremen
    Dr. Hubertus Marbach, Friedrich-Alexander University Erlangen-Nürnberg
    Prof. Cornelis W. Hagen, Delft University of Technology

This Thematic Series covers all relevant aspects of focused electron beam induced processing (FEBIP) and in particular focused electron beam induced deposition (FEBID), including:

  • the fundamental electron–precursor interactions leading to precursor fragmentation,

  • the surface reactions initiated by these interactions,

  • the design and synthesis of novel FEBID precursors, and

  • advances in the performance of FEBID processes with respect to deposit purity, spatial resolution, and processing speed.

The performance of these nanofabrication processes and the properties of the resulting nanomaterials depend decisively on how precisely the underlying chemistry can be controlled. In fact, it is the interplay of electron-induced and thermal precursor chemistry together with the reactivity of the surface where these reactions take place that determines the composition and the spatial resolution of deposits fabricated by FEBID. This calls for the development of novel precursors designed specifically for electron beam driven processing and of optimized processes with respect to surface chemistry or added purification reagents, taking also into consideration new developments in precursor supply instrumentation.

Additional articles on this topic will be published here soon.

3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

  1. Brett B. Lewis,
  2. Robert Winkler,
  3. Xiahan Sang,
  4. Pushpa R. Pudasaini,
  5. Michael G. Stanford,
  6. Harald Plank,
  7. Raymond R. Unocic,
  8. Jason D. Fowlkes and
  9. Philip D. Rack
  • Full Research Paper
  • Published 07 Apr 2017

  • PDF

  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83

Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips

  1. Soraya Sangiao,
  2. César Magén,
  3. Darius Mofakhami,
  4. Grégoire de Loubens and
  5. José María De Teresa
  • Full Research Paper
  • Published 09 Oct 2017

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  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 2106–2115, doi:10.3762/bjnano.8.210

Modelling focused electron beam induced deposition beyond Langmuir adsorption

  1. Dédalo Sanz-Hernández and
  2. Amalio Fernández-Pacheco
  • Full Research Paper
  • Published 13 Oct 2017

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  • Supp. Info

  • Correction

Beilstein J. Nanotechnol. 2017, 8, 2151–2161, doi:10.3762/bjnano.8.214

Suppression of low-energy dissociative electron attachment in Fe(CO)5 upon clustering

  1. Jozef Lengyel,
  2. Peter Papp,
  3. Štefan Matejčík,
  4. Jaroslav Kočišek,
  5. Michal Fárník and
  6. Juraj Fedor
  • Full Research Paper
  • Published 20 Oct 2017

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Beilstein J. Nanotechnol. 2017, 8, 2200–2207, doi:10.3762/bjnano.8.219

Comprehensive investigation of the electronic excitation of W(CO)6 by photoabsorption and theoretical analysis in the energy region from 3.9 to 10.8 eV

  1. Mónica Mendes,
  2. Khrystyna Regeta,
  3. Filipe Ferreira da Silva,
  4. Nykola C. Jones,
  5. Søren Vrønning Hoffmann,
  6. Gustavo García,
  7. Chantal Daniel and
  8. Paulo Limão-Vieira
  • Full Research Paper
  • Published 23 Oct 2017

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  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 2208–2218, doi:10.3762/bjnano.8.220

  • Full Research Paper
  • Published 30 Oct 2017

Beilstein J. Nanotechnol. 2017, 8, 2257–2263, doi:10.3762/bjnano.8.225

  • Full Research Paper
  • Published 10 Nov 2017

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Beilstein J. Nanotechnol. 2017, 8, 2376–2388, doi:10.3762/bjnano.8.237

Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition

  1. Julie A. Spencer,
  2. Michael Barclay,
  3. Miranda J. Gallagher,
  4. Robert Winkler,
  5. Ilyas Unlu,
  6. Yung-Chien Wu,
  7. Harald Plank,
  8. Lisa McElwee-White and
  9. D. Howard Fairbrother
  • Full Research Paper
  • Published 15 Nov 2017

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  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 2410–2424, doi:10.3762/bjnano.8.240

  • Full Research Paper
  • Published 29 Nov 2017

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  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 2530–2543, doi:10.3762/bjnano.8.253

Amplified cross-linking efficiency of self-assembled monolayers through targeted dissociative electron attachment for the production of carbon nanomembranes

  1. Sascha Koch,
  2. Christopher D. Kaiser,
  3. Paul Penner,
  4. Michael Barclay,
  5. Lena Frommeyer,
  6. Daniel Emmrich,
  7. Patrick Stohmann,
  8. Tarek Abu-Husein,
  9. Andreas Terfort,
  10. D. Howard Fairbrother,
  11. Oddur Ingólfsson and
  12. Armin Gölzhäuser
  • Full Research Paper
  • Published 30 Nov 2017

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Beilstein J. Nanotechnol. 2017, 8, 2562–2571, doi:10.3762/bjnano.8.256

Interactions of low-energy electrons with the FEBID precursor chromium hexacarbonyl (Cr(CO)6)

  1. Jusuf M. Khreis,
  2. João Ameixa,
  3. Filipe Ferreira da Silva and
  4. Stephan Denifl
  • Full Research Paper
  • Published 04 Dec 2017

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Beilstein J. Nanotechnol. 2017, 8, 2583–2590, doi:10.3762/bjnano.8.258

  • Correction
  • Published 05 Dec 2017

Beilstein J. Nanotechnol. 2017, 8, 2591–2591, doi:10.3762/bjnano.8.259

Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

  1. Fan Tu,
  2. Martin Drost,
  3. Imre Szenti,
  4. Janos Kiss,
  5. Zoltan Kónya and
  6. Hubertus Marbach
  • Full Research Paper
  • Published 05 Dec 2017

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  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260

Synthesis of [{AgO2CCH2OMe(PPh3)}n] and theoretical study of its use in focused electron beam induced deposition

  1. Jelena Tamuliene,
  2. Julian Noll,
  3. Peter Frenzel,
  4. Tobias Rüffer,
  5. Alexander Jakob,
  6. Bernhard Walfort and
  7. Heinrich Lang
  • Full Research Paper
  • Published 06 Dec 2017

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  • Supp. Info

Beilstein J. Nanotechnol. 2017, 8, 2615–2624, doi:10.3762/bjnano.8.262

The rational design of a Au(I) precursor for focused electron beam induced deposition

  1. Ali Marashdeh,
  2. Thiadrik Tiesma,
  3. Niels J. C. van Velzen,
  4. Sjoerd Harder,
  5. Remco W. A. Havenith,
  6. Jeff T. M. De Hosson and
  7. Willem F. van Dorp
  • Full Research Paper
  • Published 20 Dec 2017

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Beilstein J. Nanotechnol. 2017, 8, 2753–2765, doi:10.3762/bjnano.8.274

  • Full Research Paper
  • Published 05 Jan 2018

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Beilstein J. Nanotechnol. 2018, 9, 57–65, doi:10.3762/bjnano.9.8

  • Full Research Paper
  • Published 08 Jan 2018

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Beilstein J. Nanotechnol. 2018, 9, 77–90, doi:10.3762/bjnano.9.10

Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID

  1. Marcos V. Puydinger dos Santos,
  2. Aleksandra Szkudlarek,
  3. Artur Rydosz,
  4. Carlos Guerra-Nuñez,
  5. Fanny Béron,
  6. Kleber R. Pirota,
  7. Stanislav Moshkalev,
  8. José Alexandre Diniz and
  9. Ivo Utke
  • Full Research Paper
  • Published 09 Jan 2018

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  • Supp. Info

Beilstein J. Nanotechnol. 2018, 9, 91–101, doi:10.3762/bjnano.9.11

Gas-assisted silver deposition with a focused electron beam

  1. Luisa Berger,
  2. Katarzyna Madajska,
  3. Iwona B. Szymanska,
  4. Katja Höflich,
  5. Mikhail N. Polyakov,
  6. Jakub Jurczyk,
  7. Carlos Guerra-Nuñez and
  8. Ivo Utke
  • Full Research Paper
  • Published 19 Jan 2018

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  • Supp. Info

Beilstein J. Nanotechnol. 2018, 9, 224–232, doi:10.3762/bjnano.9.24

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