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Search for "sputtering" in Full Text gives 398 result(s) in Beilstein Journal of Nanotechnology. Showing first 200.

Janus-micromotor-based on–off luminescence sensor for active TNT detection

  • Ye Yuan,
  • Changyong Gao,
  • Daolin Wang,
  • Chang Zhou,
  • Baohua Zhu and
  • Qiang He

Beilstein J. Nanotechnol. 2019, 10, 1324–1331, doi:10.3762/bjnano.10.131

Graphical Abstract
  • capsule motors were fabricated by layer-by-layer assembly of UCNP-functionalized polyelectrolyte microcapsules, followed by sputtering of a platinum layer onto one half of the capsule. By catalytic decomposition of hydrogen peroxide to oxygen bubbles, the Janus UCNP capsule motors are rapidly propelled
  • dispersed on a glass slide to form a monolayer. After sputtering of a 20 nm thin film of Pt, the Janus UCNP-functionalized capsule motors were obtained by removing the silica cores with hydrofluoric acid. To prepare the Janus UCNP capsule motors, NaYF4:Yb3+/Er3+ UCNPs were firstly synthesized following a
  • uniformly dispersed on the surface of the microcapsule. After Pt sputtering and removal of the silica core, the Janus UCNP capsule motors were obtained. As shown in Figure 1g, the as-prepared APTES-UCNPs were partially covered with a Pt cap, displaying a Janus structure. The scanning electron microscopy
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Published 28 Jun 2019

Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping

  • Lukas Grünewald,
  • Dagmar Gerthsen and
  • Simon Hettler

Beilstein J. Nanotechnol. 2019, 10, 1290–1302, doi:10.3762/bjnano.10.128

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  • sudden increase in sputter yield due to additional sputtering from the PM back side. At this point, fine control over the milling process is lost due to the increased sputter yield. Accordingly, the offset thickness can only be controllably reduced to a minimum thickness that lies in the range of the
  • penetration depth of the Ga ions in the material of the thin film. The thickness amplitude is smaller than expected, because even though the FIB is only scanned azimuthally along the minima, sputtering also takes place near the maxima of the sinusoidal structure and decreases the total thickness of the thin
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Published 25 Jun 2019

Imaging the surface potential at the steps on the rutile TiO2(110) surface by Kelvin probe force microscopy

  • Masato Miyazaki,
  • Huan Fei Wen,
  • Quanzhen Zhang,
  • Yuuki Adachi,
  • Jan Brndiar,
  • Ivan Štich,
  • Yan Jun Li and
  • Yasuhiro Sugawara

Beilstein J. Nanotechnol. 2019, 10, 1228–1236, doi:10.3762/bjnano.10.122

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  • cantilever deflection was measured using an optical beam deflection method [45]. The images were obtained using a commercial Ir-coated Si cantilever (NANOSENSORS) with a resonant frequency of 804 kHz and 808 kHz and a spring constant of 1500 N/m. Before the experiments, the tip was cleaned by Ar+ sputtering
  • (1 keV, 6.7 × 10−7 mbar, 5 min) and annealing (600 K, less than 2.7 × 10−10 mbar, 20 min) to remove the native oxide layer and other contaminants. A clean rutile TiO2(110) crystal (provided by Furuuchi Chemical Corporation) was prepared by dozens of cycles of Ar+ sputtering (1 keV, 1.3 × 10−6 mbar
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Published 13 Jun 2019

Pure and mixed ordered monolayers of tetracyano-2,6-naphthoquinodimethane and hexathiapentacene on the Ag(100) surface

  • Robert Harbers,
  • Timo Heepenstrick,
  • Dmitrii F. Perepichka and
  • Moritz Sokolowski

Beilstein J. Nanotechnol. 2019, 10, 1188–1199, doi:10.3762/bjnano.10.118

Graphical Abstract
  • Metrology, Denmark). The correction was done such that the unit cell of the periodic structures fitted to the unit cell determined by LEED. All experiments were performed on the same Ag(100) single crystal, which was prepared by cycles of Ar+ ion sputtering at 800 eV for 30 min and annealing at 800–900 K
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Published 06 Jun 2019

Quantitative analysis of annealing-induced instabilities of photo-leakage current and negative-bias-illumination-stress in a-InGaZnO thin-film transistors

  • Dapeng Wang and
  • Mamoru Furuta

Beilstein J. Nanotechnol. 2019, 10, 1125–1130, doi:10.3762/bjnano.10.112

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  • sputtering techniques, the sample suffers from the plasma bombardment in the chamber. In addition, the deposited films are inevitably irradiated by UV light in the process of patterning, inducing the increase in the concentration of oxygen-related defects, which further degrade the initial electrical
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Published 27 May 2019

Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors

  • Jimena Olivares,
  • Teona Mirea,
  • Lorena Gordillo-Dagallier,
  • Bruno Marco,
  • José Miguel Escolano,
  • Marta Clement and
  • Enrique Iborra

Beilstein J. Nanotechnol. 2019, 10, 975–984, doi:10.3762/bjnano.10.98

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  • the films involved in the SMR structure were deposited by sputtering, except the Ir bottom electrode and the Ni catalyst that were e-beam evaporated. The deposition conditions of the AlN and SiO2 layers in the reflector were carefully adjusted to minimize residual stresses in each film. The final
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Published 29 Apr 2019

Fabrication of silver nanoisland films by pulsed laser deposition for surface-enhanced Raman spectroscopy

  • Bogusław Budner,
  • Mariusz Kuźma,
  • Barbara Nasiłowska,
  • Bartosz Bartosewicz,
  • Malwina Liszewska and
  • Bartłomiej J. Jankiewicz

Beilstein J. Nanotechnol. 2019, 10, 882–893, doi:10.3762/bjnano.10.89

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  • physical methods include fabrication of nanostructured silver films by electron-beam evaporation [16], gas aggregation [17] and radio-frequency sputtering [18]. The advantages of certain physical methods over chemical methods include that there is no reagent contamination and that the monodispersity of
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Published 16 Apr 2019

On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

  • Alberto Perrotta,
  • Julian Pilz,
  • Stefan Pachmajer,
  • Antonella Milella and
  • Anna Maria Coclite

Beilstein J. Nanotechnol. 2019, 10, 746–759, doi:10.3762/bjnano.10.74

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  • deposited at room temperature [40]. The O/Zn ratio is also reported in Table 1. All values are below unity, due to the preferential sputtering occurring when atomic masses of the measured elements are very different, which is the case of Zn and O. In the literature [61], the O/Zn ratios are generally
  • stretching of carbonate/bidentate/carboxyl groups (νOCO) (1300–1660 cm−1) are highlighted in the image. High-resolution XPS spectra of the pristine (a–c) and annealed (d,e) zincone-like layers acquired after 60 s Ar+ sputtering. Pristine: a) C 1s HR spectrum and b) O 1s HR spectrum as a function of the
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Published 21 Mar 2019

An iridescent film of porous anodic aluminum oxide with alternatingly electrodeposited Cu and SiO2 nanoparticles

  • Menglei Chang,
  • Huawen Hu,
  • Haiyan Quan,
  • Hongyang Wei,
  • Zhangyi Xiong,
  • Jiacong Lu,
  • Pin Luo,
  • Yaoheng Liang,
  • Jianzhen Ou and
  • Dongchu Chen

Beilstein J. Nanotechnol. 2019, 10, 735–745, doi:10.3762/bjnano.10.73

Graphical Abstract
  • was deposited via sputtering, yielding a colorful filter material. Different structural colors could be obtained via changing the anodization time [17]. In this context, instead of using high-purity aluminum foils and titanium foils as the substrate for the anodization treatment, which have been
  • from light purple to dark purple with the variation of the incident light angle from 0 to 30°. From the elemental mapping images of the S1 sample shown in Figure 4a, the sample includes the elements of Al, O, Cu and Au. The appearance of Au is due to the sputtering of the surface with Au (to enhance
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Published 19 Mar 2019

Features and advantages of flexible silicon nanowires for SERS applications

  • Hrvoje Gebavi,
  • Vlatko Gašparić,
  • Dubravko Risović,
  • Nikola Baran,
  • Paweł Henryk Albrycht and
  • Mile Ivanda

Beilstein J. Nanotechnol. 2019, 10, 725–734, doi:10.3762/bjnano.10.72

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  • ]. In short, Si wafers (<100> orientation, 5–10 Ω·cm resistivity, p-type) were cleaned following the standard RCA (Radio Corporation of America) cleaning processes [24], followed by Au sputtering in a Polaron E5000 sputter coater at ca. 5·10−4 mbar work pressure. Prior to VLS synthesis, annealing in
  • obtained in the previous step was obtained by the same sputtering system after different time durations (3, 5, 7, 16, 20 and 30 min). Afterwards, the ca. 3 × 3 mm2 squared samples were immersed in an ethanol solution of 4-mercaptophenylboronic acid (4-MPBA) for several hours. The morphology of the
  • [35]). The influence of the capillary forces will be discussed in the following sections. Ag decoration and morphology of Si nanowires and immersion-induced changes Using 500 °C as the optimal VLS process temperature, we decorated SiNWs through Ag sputtering. The sputtering time varied from 3 to 30
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Published 15 Mar 2019

Biomimetic synthesis of Ag-coated glasswing butterfly arrays as ultra-sensitive SERS substrates for efficient trace detection of pesticides

  • Guochao Shi,
  • Mingli Wang,
  • Yanying Zhu,
  • Yuhong Wang,
  • Xiaoya Yan,
  • Xin Sun,
  • Haijun Xu and
  • Wanli Ma

Beilstein J. Nanotechnol. 2019, 10, 578–588, doi:10.3762/bjnano.10.59

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  • hybrids (Ag-G.b.) by magnetron sputtering technology. The 3D surface-enhanced Raman scattering (SERS) substrate is fabricated from an original chitin-based nanostructure, which serves as a bio-scaffold for Ag nanofilms to be coated on. The novel crisscrossing plate-like nanostructures of 3D Ag-G.b
  • . nanohybrids with thick Ag nanofilms provide a substantial contribution to SERS enhancement. Measuring the SERS performance with crystal violet (CV), the Ag-G.b. nanohybrids with the sputtering time of 20 min (Ag-G.b.-20) shows the highest enhancement performance with an enhancement factor (EF) of up to 2.96
  • 3D biomimetic SERS substrate with a high density of “hot spots” was formed on a template of cicada wings via a simple one-step and reagent-free direct-current ion sputtering techniques by Prof. Han’s group [26]. These 3D plasmonic nanostructures are adopted because these 3D substrates offer a great
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Published 28 Feb 2019

Hydrophilicity and carbon chain length effects on the gas sensing properties of chemoresistive, self-assembled monolayer carbon nanotube sensors

  • Juan Casanova-Cháfer,
  • Carla Bittencourt and
  • Eduard Llobet

Beilstein J. Nanotechnol. 2019, 10, 565–577, doi:10.3762/bjnano.10.58

Graphical Abstract
  • oxygen plasma treatment. However, the presence of such defects in CNTs is essential, since it has been shown that they play the role of nucleation centers and help to anchor the Au nanoparticles during the sputtering process [36]. In other words, the defects help to achieve a dense and homogenous
  • % purity). Then, the suspension was placed in an ultrasonic bath during 30 min at room temperature. Thereafter, the suspension was deposited onto screen-printed alumina substrates by employing an airbrushing technique. Finally, the MWCNTs were decorated with gold nanoparticles by a sputtering method. An
  • ATC Orion 8-HV sputtering machine (AJA International, Inc., USA) was used for this purpose. In this process, an RF inductively coupled plasma was used at a frequency of 13.56 MHz. The sputtering parameters were adjusted to 30 W under argon plasma during 10 s at a pressure of 0.1 Torr [50]. Au
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Published 27 Feb 2019

Choosing a substrate for the ion irradiation of two-dimensional materials

  • Egor A. Kolesov

Beilstein J. Nanotechnol. 2019, 10, 531–539, doi:10.3762/bjnano.10.54

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  • defect formation mechanisms. The estimations include Monte Carlo simulations for He, Ar, Xe, C, N and Si ions, performed in the incident ion energy range from 100 eV to 250 MeV. Cu, SiO2, SiC and Al2O3 substrates were analyzed. The considered substrate-related defect formation mechanisms are sputtering
  • -dimensional materials and as a practical guide on choosing the conditions necessary to obtain certain parameters of irradiated materials. Keywords: 2D materials; defects; hot electrons; ion irradiation; recoils; sputtering; substrate; Introduction Ion irradiation of two-dimensional (2D) materials is a
  • Transport of Ions in Matter (TRIM) simulations using 160 MeV Xe ions for the irradiation of graphene on Cu, SiO2/Si and glass leads to negligible overall participation of substrate sputtering and a stronger (but small) role of the substrate recoils. Besides, it was noted that hot electrons generated in the
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Published 22 Feb 2019

Nanocomposite–parylene C thin films with high dielectric constant and low losses for future organic electronic devices

  • Marwa Mokni,
  • Gianluigi Maggioni,
  • Abdelkader Kahouli,
  • Sara M. Carturan,
  • Walter Raniero and
  • Alain Sylvestre

Beilstein J. Nanotechnol. 2019, 10, 428–441, doi:10.3762/bjnano.10.42

Graphical Abstract
  • deposition and RF-magnetron sputtering for silver deposition. This method yields good dispersion of Ag-containing nanoparticles inside the parylene C polymer matrix. Film composition and structure were studied by using several techniques. It was found that the plasma generated by the RF-magnetron reactor
  • increase the dielectric constant of NCPC without degrading its dielectric losses. In this context, this work presents a new strategy to synthesize nanocomposite parylene C materials by a combination of two processes, CVD and RF-magnetron sputtering. The NCPC properties are analyzed in detail by different
  • pure parylene C and NCPCs. Apart from sample O, which was produced by keeping the sputtering source off, all the samples were deposited with the plasma switched on but with different numbers of rotations with the shutter open (i.e., changing the amount of Ag atoms incorporated inside the film
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Published 12 Feb 2019

Intuitive human interface to a scanning tunnelling microscope: observation of parity oscillations for a single atomic chain

  • Sumit Tewari,
  • Jacob Bakermans,
  • Christian Wagner,
  • Federica Galli and
  • Jan M. van Ruitenbeek

Beilstein J. Nanotechnol. 2019, 10, 337–348, doi:10.3762/bjnano.10.33

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  • the simulation. The scaling factor converts approximately 10 cm of hand movement to 2 Å displacement of the STM tip. The usual imaging in STM is done using a commercial RHK SPM100 ver.8E controller. A mono-crystalline gold sample cut along the (111) surface is prepared by repeated argon sputtering and
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Published 04 Feb 2019

Geometrical optimisation of core–shell nanowire arrays for enhanced absorption in thin crystalline silicon heterojunction solar cells

  • Robin Vismara,
  • Olindo Isabella,
  • Andrea Ingenito,
  • Fai Tong Si and
  • Miro Zeman

Beilstein J. Nanotechnol. 2019, 10, 322–331, doi:10.3762/bjnano.10.31

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  • , a 100 nm thick transparent tin-doped indium oxide (In2O3:Sn, ITO) was deposited at low power and low temperature, using radio-frequency (RF) magnetron sputtering. The cell area was defined as 5 mm × 5 mm, using a mask during ITO deposition. The reported equivalent thickness values of thin films on
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Published 31 Jan 2019

Nitrous oxide as an effective AFM tip functionalization: a comparative study

  • Taras Chutora,
  • Bruno de la Torre,
  • Pingo Mutombo,
  • Jack Hellerstedt,
  • Jaromír Kopeček,
  • Pavel Jelínek and
  • Martin Švec

Beilstein J. Nanotechnol. 2019, 10, 315–321, doi:10.3762/bjnano.10.30

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  • ) was cleaned by repeated cycles of sputtering (1 keV) and subsequent annealing to 600 °C. FePc molecules (Sigma Aldrich, evaporation temperature ca. 250 °C) were directly evaporated onto a clean Au(111) surface at room temperature. N2O was adsorbed onto the Au(111) surface at temperatures below 12 K
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Published 30 Jan 2019

Nanoporous water oxidation electrodes with a low loading of laser-deposited Ru/C exhibit enhanced corrosion stability

  • Sandra Haschke,
  • Dmitrii Pankin,
  • Vladimir Mikhailovskii,
  • Maïssa K. S. Barr,
  • Adriana Both-Engel,
  • Alina Manshina and
  • Julien Bachmann

Beilstein J. Nanotechnol. 2019, 10, 157–167, doi:10.3762/bjnano.10.15

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  • ), which are due to the Ru/C layer and adventitious carbon. Argon ion sputtering results in a reduced carbon content (observable in both the C 1s and O 1s regions), as well as in a shift of the Ru 3d doublet of peaks to lower binding energies (Figure 8b and Figure S4, Supporting Information File 1). Thus
  • system with a base pressure of 10−9 mbar. Adventitious carbon was removed from the surface by 1 min, 2 kV Ar+ ion sputtering. To prevent charging a combination of electron and ion neutralization was employed. The Ru 3d and O 1s XPS core level spectra were analyzed using a fitting routine which decomposes
  • precursor Ru3(CO)12 (b). X-ray photoelectron spectra of a nanostructured Ru/C sample recorded as deposited and after Ar+ sputtering. All spectra are shifted to a C 1s binding energy position of 284.4 eV. (a) Survey spectra showing the expected elements. (b) Ru 3d region, which is superimposed with the C 1s
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Published 11 Jan 2019

Sputtering of silicon nanopowders by an argon cluster ion beam

  • Xiaomei Zeng,
  • Vasiliy Pelenovich,
  • Zhenguo Wang,
  • Wenbin Zuo,
  • Sergey Belykh,
  • Alexander Tolstogouzov,
  • Dejun Fu and
  • Xiangheng Xiao

Beilstein J. Nanotechnol. 2019, 10, 135–143, doi:10.3762/bjnano.10.13

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  • pressed Si nanopowder targets consisting of particles with a mean diameter of 60 nm. The influence of the target density and the cluster ion beam parameters (energy and dose) on the sputtering depth and sputtering yield was studied. The sputtering yield was found to decrease with increasing dose and
  • target density. The energy dependence demonstrated an unusual non-monotonic behavior. At 17.3 keV a maximum of the sputtering yield was observed, which was more than forty times higher than that of the bulk Si. The surface roughness at low energy demonstrates a similar energy dependence with a maximum
  • near 17 keV. The dose and energy dependence of the sputtering yield was explained by the competition of the finite size effect and the effect of debris formation. Keywords: finite size effect; gas cluster ion beam; silicon nanoparticles; smoothing effect; sputtering; Introduction Etching using gas
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Published 10 Jan 2019

Zn/F-doped tin oxide nanoparticles synthesized by laser pyrolysis: structural and optical properties

  • Florian Dumitrache,
  • Iuliana P. Morjan,
  • Elena Dutu,
  • Ion Morjan,
  • Claudiu Teodor Fleaca,
  • Monica Scarisoreanu,
  • Alina Ilie,
  • Marius Dumitru,
  • Cristian Mihailescu,
  • Adriana Smarandache and
  • Gabriel Prodan

Beilstein J. Nanotechnol. 2019, 10, 9–21, doi:10.3762/bjnano.10.2

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  • atom %) made by spray pyrolysis showing high transparency and bandgap values between 3.86 and 4.45 eV have also been reported [32]. Other researchers have used radio frequency magnetron sputtering of mixed 30 wt % ZnO and 70 wt % SnO2 targets to obtain similar FZTO films, yet their reported different
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Published 02 Jan 2019

Apparent tunneling barrier height and local work function of atomic arrays

  • Neda Noei,
  • Alexander Weismann and
  • Richard Berndt

Beilstein J. Nanotechnol. 2018, 9, 3048–3052, doi:10.3762/bjnano.9.283

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  • operated at 4.5 K. Cu(111) surfaces were cleaned by Ar+ sputter/anneal cycles. W tips were electrochemically etched from polycrystalline wire. After sputtering, they were further prepared in situ by indenting them into the Cu(111) substrate. Because of this procedure, the tips were presumably covered with
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Letter
Published 17 Dec 2018

Femtosecond laser-assisted fabrication of chalcopyrite micro-concentrator photovoltaics

  • Franziska Ringleb,
  • Stefan Andree,
  • Berit Heidmann,
  • Jörn Bonse,
  • Katharina Eylers,
  • Owen Ernst,
  • Torsten Boeck,
  • Martina Schmid and
  • Jörg Krüger

Beilstein J. Nanotechnol. 2018, 9, 3025–3038, doi:10.3762/bjnano.9.281

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  • . Subsequently, ZnO and finally Al:ZnO layers were created in a sputtering process. Details for CdS and ZnO/Al:ZnO deposition can be found in [25]. Figure 13 shows an SEM image of the edge of a CISe micro island, which has been processed according to this procedure, i.e., in a state corresponding to Figure 12d
  • . B. Heidmann and M. Schmid are grateful to the Helmholtz Association for support from the Initiative and Networking Fund for the Young Investigator Group VH-NG-928. The authors would like to thank M. Kirsch for ZnO sputtering and grid deposition.
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Review
Published 12 Dec 2018

Electrostatic force microscopy for the accurate characterization of interphases in nanocomposites

  • Diana El Khoury,
  • Richard Arinero,
  • Jean-Charles Laurentie,
  • Mikhaël Bechelany,
  • Michel Ramonda and
  • Jérôme Castellon

Beilstein J. Nanotechnol. 2018, 9, 2999–3012, doi:10.3762/bjnano.9.279

Graphical Abstract
  • nm) were deposited or grown over the whole sample surface. Aluminum oxide (Al2O3) shells were prepared using the atomic layer deposition (ALD) method, polyvinyl acetate (PVAc) shells by spin coating, and silicon dioxide (SiO2) shells by plasma sputtering deposition (PSD). The signature of each
  • during sputtering [48]. This result was also verified for superimposed planar films, as deduced from the bottom regions of the sample (Figure 9b). In [38], we also tested these findings on entirely planar samples. Nevertheless, these hypotheses on the SiO2 surface emphasize the need for better
  • ). Silicon dioxide layers were deposited by plasma sputtering in a Plassys 450S reactor using a high purity SiO2 target source. The deposition regime included a preliminary exposure to 100 sccm argon plasma at 50 W for 20 s, while substrates and SiO2 target samples were screened. Then, the target shutter was
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Published 07 Dec 2018

Size limits of magnetic-domain engineering in continuous in-plane exchange-bias prototype films

  • Alexander Gaul,
  • Daniel Emmrich,
  • Timo Ueltzhöffer,
  • Henning Huckfeldt,
  • Hatice Doğanay,
  • Johanna Hackl,
  • Muhammad Imtiaz Khan,
  • Daniel M. Gottlob,
  • Gregor Hartmann,
  • André Beyer,
  • Dennis Holzinger,
  • Slavomír Nemšák,
  • Claus M. Schneider,
  • Armin Gölzhäuser,
  • Günter Reiss and
  • Arno Ehresmann

Beilstein J. Nanotechnol. 2018, 9, 2968–2979, doi:10.3762/bjnano.9.276

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  • prototypical in-plane EB layer system Ir17Mn83 (30 nm)/Co70Fe30 (10 nm) was grown by RF sputtering at a power of 160 W and an argon gas flux of 155 sccm on a naturally oxidized 5 nm × 5 nm Si(100) wafer, with Cu (5 nm) buffer and Ta (10 nm) capping. EB at the interface between the antiferromagnetic (AF) and
  • performed at beamline UE56/1-SGM of the synchrotron radiation facility BESSY II after excitation with right and left circularly polarized X-rays with an energy of 709 eV (Fe L3 edge). Prior to measurements, the capping layer was thinned by argon ion sputtering allowing the Fe photoelectrons to escape from
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Published 03 Dec 2018

Investigation of CVD graphene as-grown on Cu foil using simultaneous scanning tunneling/atomic force microscopy

  • Majid Fazeli Jadidi,
  • Umut Kamber,
  • Oğuzhan Gürlü and
  • H. Özgür Özer

Beilstein J. Nanotechnol. 2018, 9, 2953–2959, doi:10.3762/bjnano.9.274

Graphical Abstract
  • conduct simultaneous STM/AFM measurements. This system with a sensitivity of 2·10−4 Å/√Hz is capable of measuring tunnel current, force, force gradient, tunnel barrier height and energy loss [32]. The UHV chamber is equipped with an argon sputtering gun and a resistive heater that could be used for sample
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Published 28 Nov 2018
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