A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

• multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This

• irradiation effects, such as defect formation and ion implantation, are used to locally change the properties of the material, and at higher doses, nanofabrication is performed using localized material removal (by sputtering) or addition (by gas-assisted deposition). Sometimes, lower-dose irradiation effects

• also lead to a nanofabrication outcome. For example, localized swelling by ion implantation can be used to pattern nanoscale surface topographies, ion-induced collisional mixing can restructure buried interfaces, and ion-induced chemical changes can be used for resist-based lithography. In the

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o

• nanometer range is heavily sought after. One promising candidate for ultraprecise nanofabrication is focused ion beam (FIB) machining. Focused ion beams locally remove material based on physical sputtering with a large degree of flexibility due to advanced beam control. FIB patterning is a direct single

• ranging from several days to one or two months. For imaging and nanofabrication, only one of the three atoms is selected. This nearly ideal point source allows not only for high-resolution imaging but also for the milling of smallest geometric features [5][6][7]. Furthermore, large-area machining is

Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition

• Cristiano Glessi,
• Aya Mahgoub,
• Cornelis W. Hagen and
• Mats Tilset

Beilstein J. Nanotechnol. 2021, 12, 257–269, doi:10.3762/bjnano.12.21

• −. Keywords: Au(I) precursors; focused electron beam-induced deposition (FEBID); gold-NHC; gold precursors; nanofabrication; N-heterocyclic carbene; Introduction Focused electron beam-induced deposition (FEBID) is a nanofabrication technique that allows for the growth of three-dimensional free-standing

• nanostructures [1][2][3][4]. This mask-less nanofabrication technique uses gaseous molecules as precursors. The gas molecules are introduced in the specimen chamber of a scanning electron microscope (SEM), adsorb onto a substrate, and dissociate upon electron irradiation, leaving a solid deposit on the substrate

Scanning transmission helium ion microscopy on carbon nanomembranes

• Daniel Emmrich,
• Annalena Wolff,
• Nikolaus Meyerbröker,
• Jörg K. N. Lindner,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 222–231, doi:10.3762/bjnano.12.18

• established as a key nanofabrication tool for milling [7][8][9], defect engineering [10][11], and resist-based lithography [12][13], overcoming the resolution limitations of other FIB techniques [14][15]. Both bulk samples as well as thin membranes have been structured using the HIM. On membranes, the sputter

Imaging of SARS-CoV-2 infected Vero E6 cells by helium ion microscopy

• Natalie Frese,
• Patrick Schmerer,
• Martin Wortmann,
• Matthias Schürmann,
• Matthias König,
• Michael Westphal,
• Friedemann Weber,
• Holger Sudhoff and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 172–179, doi:10.3762/bjnano.12.13

• of its sub-nanometer imaging and ion-beam nanofabrication capabilities in materials science and engineering [1]. Although HIM soon proved to be a promising tool in the life sciences, the examination of biological samples by HIM proceeded at a much slower pace. In recent years, it has been used in the

Bio-imaging with the helium-ion microscope: A review

• Matthias Schmidt,
• James M. Byrne and
• Ilari J. Maasilta

Beilstein J. Nanotechnol. 2021, 12, 1–23, doi:10.3762/bjnano.12.1

• study regarding biological HIM imaging of a whole variety of biological samples, including plants, bacteria, cancer cells, and a nematode worm, Pristionchus pacificus. The imaging of that worm will be discussed later in the section “Nanofabrication” regarding its innovative use of the combination of

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

• Eduardo Serralta,
• Nico Klingner,
• Olivier De Castro,
• Michael Mousley,
• Santhana Eswara,
• Serge Duarte Pinto,
• Tom Wirtz and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2020, 11, 1854–1864, doi:10.3762/bjnano.11.167

• microscopy; scanning transmission ion microscopy; Introduction The helium ion microscope (HIM) is an instrument that has already proven its value for high-resolution imaging, compositional analysis, nanofabrication, and materials modification [1][2]. It generates a focused helium (or neon) ion beam with sub

Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

• Aya Mahgoub,
• Hang Lu,
• Rachel M. Thorman,
• Konstantin Preradovic,
• Titel Jurca,
• Lisa McElwee-White,
• Howard Fairbrother and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2020, 11, 1789–1800, doi:10.3762/bjnano.11.161

• -dispersive X-ray spectroscopy (EDX); focused electron beam-induced deposition (FEBID); nanofabrication; platinum precursors; scanning electron microscopy (SEM); thermogravimetric analysis (TGA); Introduction Focused electron beam-induced deposition (FEBID) is a direct-write nanopatterning technique. FEBID

Direct observation of the Si(110)-(16×2) surface reconstruction by atomic force microscopy

• Tatsuya Yamamoto,
• Ryo Izumi,
• Kazushi Miki,
• Takahiro Yamasaki,
• Yasuhiro Sugawara and
• Yan Jun Li

Beilstein J. Nanotechnol. 2020, 11, 1750–1756, doi:10.3762/bjnano.11.157

• ) Phase A shows an actual phase relationship of the 16×2 reconstruction. (b) In phase B, pentagon pairs on the lower terrace are shifted by a half cycle (16×1) along the zig-zag row. Acknowledgements A part of this study was supported by NIMS Nanofabrication Platform in Nanotechnology Platform Project

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• irradiation-induced mechanical strain in the patterning process are elaborated and discussed. Keywords: direct patterning; focused helium ion beam; out-of-plane nanopatterning; polymers; thin films; Introduction Micro- and nanofabrication with focused ion beams (FIBs) is currently a subject of strong

Optically and electrically driven nanoantennas

• Monika Fleischer,
• Dai Zhang and
• Alfred J. Meixner

Beilstein J. Nanotechnol. 2020, 11, 1542–1545, doi:10.3762/bjnano.11.136

• , Germany 10.3762/bjnano.11.136 Keywords: active plasmonics; electrically driven nanoantenna; gap antenna; nanoantenna; nanofabrication; nanospectroscopy; nano-photonics; optical antenna; second harmonic generation; sensing; scanning tip; surface-enhanced infrared absorption (SEIRA); surface-enhanced Raman

• , etc. (a few nanometers to below 1 nm). Nanoantennas have been under examination for the past few decades in view of their attractive fundamental properties, while the rapid development of nanofabrication techniques has opened up possibilities to create more and more sophisticated shapes and

A wideband cryogenic microwave low-noise amplifier

• Boris I. Ivanov,
• Dmitri I. Volkhin,
• Ilya L. Novikov,
• Dmitri K. Pitsun,
• Dmitri O. Moskalev,
• Ilya A. Rodionov,
• Evgeni Il’ichev and
• Aleksey G. Vostretsov

Beilstein J. Nanotechnol. 2020, 11, 1484–1491, doi:10.3762/bjnano.11.131

• coupled to a single qubit. The sample was made at the BMSTU Nanofabrication Facility (FMN Laboratory, FMNS REC, ID 74300) using Al technology [29][30]. The X-mon qubit was made of two Al/AlxOy/Al parallel Josephson junctions forming a SQUID-type structure coupled to the main ground plane. The standard

3D superconducting hollow nanowires with tailored diameters grown by focused He⁺ beam direct writing

• Rosa Córdoba,
• Alfonso Ibarra,
• Dominique Mailly,
• Isabel Guillamón,
• Hermann Suderow and
• José María De Teresa

Beilstein J. Nanotechnol. 2020, 11, 1198–1206, doi:10.3762/bjnano.11.104

• that gave rise to these results received the support of a fellowship from ”la Caixa” Foundation (ID 100010434). The fellowship code is LCF/BQ/PR19/11700008. The French RENATECH network (French national nanofabrication platform).

Electrochemical nanostructuring of (111) oriented GaAs crystals: from porous structures to nanowires

• Elena I. Monaico,
• Eduard V. Monaico,
• Veaceslav V. Ursaki,
• Shashank Honnali,
• Vitalie Postolache,
• Karin Leistner,
• Kornelius Nielsch and
• Ion M. Tiginyanu

Beilstein J. Nanotechnol. 2020, 11, 966–975, doi:10.3762/bjnano.11.81

• Electrochemical technology became an established and cost-effective approach for the preparation of porous semiconductor matrices and arrays of nanowires with tailored architecture at the submicrometer scale [1][2][3]. Semiconductor nanotemplates provide many possibilities for nanofabrication through

Integrated photonics multi-waveguide devices for optical trapping and Raman spectroscopy: design, fabrication and performance demonstration

• Gyllion B. Loozen,
• Arnica Karuna,
• Mohammad M. R. Fanood,
• Erik Schreuder and
• Jacob Caro

Beilstein J. Nanotechnol. 2020, 11, 829–842, doi:10.3762/bjnano.11.68

• waveguides. Keywords: Brownian motion; integrated optics devices; lab-on-a-chip; optical trapping; nanofabrication; Raman spectroscopy; ridge waveguides; Introduction Photonic lab-on-a-chip (LOC) techniques strongly attract attention for the manipulation and measurement of biological particles such as

Deterministic placement of ultra-bright near-infrared color centers in arrays of silicon carbide micropillars

• Stefania Castelletto,
• Abdul Salam Al Atem,
• Faraz Ahmed Inam,
• Hans Jürgen von Bardeleben,
• Sophie Hameau,
• Ahmed Fahad Almutairi,
• Gérard Guillot,
• Shin-ichiro Sato,
• Alberto Boretti and
• Jean Marie Bluet

Beilstein J. Nanotechnol. 2019, 10, 2383–2395, doi:10.3762/bjnano.10.229

• platform for the integration of these quantum systems in large-scale complementary metal-oxide semiconductor (CMOS)-compatible wafers. Also, SiC is suitable for nanofabrication [18][19], and can be controlled through its electronic and piezoelectric properties. Further, it has great potentials for

The importance of design in nanoarchitectonics: multifractality in MACE silicon nanowires

• Stefania Carapezzi and
• Anna Cavallini

Beilstein J. Nanotechnol. 2019, 10, 2094–2102, doi:10.3762/bjnano.10.204

• nanoarchitectures generated by NWs or other elemental nanobjects the self-assembly/self-organization mechanisms are pivotal to generate the assembled structures. In fact, the direct fabrication of such structures by microfabrication or even nanofabrication approaches would be challenging or impossible, given the

Review of advanced sensor devices employing nanoarchitectonics concepts

• Katsuhiko Ariga,
• Tatsuyuki Makita,
• Masato Ito,
• Taizo Mori,
• Shun Watanabe and
• Jun Takeya

Beilstein J. Nanotechnol. 2019, 10, 2014–2030, doi:10.3762/bjnano.10.198

• advancements in sensor technology are no longer limited by progress in microfabrication and nanofabrication of device structures – opening a new avenue for highly engineered, high performing sensor systems through the application of nanoarchitectonics concepts. Keywords: interface; molecular recognition

• on advancements in microfabrication and nanofabrication of device structures. These so-called nanotechnological advancements enable us to prepare sensing devices with various advantageous features with an ultrasmall device size (thus requiring an ultrasmall amount of the target sample), highly

Precise local control of liquid crystal pretilt on polymer layers by focused ion beam nanopatterning

• Maxim V. Gorkunov,
• Irina V. Kasyanova,
• Vladimir V. Artemov,
• Alena V. Mamonova and
• Serguei P. Palto

Beilstein J. Nanotechnol. 2019, 10, 1691–1697, doi:10.3762/bjnano.10.164

• : The possibility of nanofabrication of polymer substrates supporting an arbitrary (from planar to vertical) spatially inhomogeneous liquid crystal alignment opens up prospects of “imprinting” electrically tunable versatile metasurfaces constituting lenses, prisms and q-plates. Keywords: focused ion

Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

• Loïc Crouzier,
• Alexandra Delvallée,
• Sébastien Ducourtieux,
• Laurent Devoille,
• Guillaume Noircler,
• Christian Ulysse,
• Olivier Taché,
• Elodie Barruet,
• Christophe Tromas and
• Nicolas Feltin

Beilstein J. Nanotechnol. 2019, 10, 1523–1536, doi:10.3762/bjnano.10.150

• letters) compatible with AFM and SEM. These chips were produced in collaboration with the nanofabrication laboratory CNRS/C2N. They enable the quick identification of an area of interest with a set of NPs to be measured with both techniques. The marks are etched in silicon wafer, so the surface is

Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping

• Lukas Grünewald,
• Dagmar Gerthsen and
• Simon Hettler

Beilstein J. Nanotechnol. 2019, 10, 1290–1302, doi:10.3762/bjnano.10.128

• ; Bessel beam; electron-beam shaping; nanofabrication; vortex beam; Introduction The possibility to shape electron beams has gained much interest since the first observation of electron vortex beams, i.e., beams that carry a defined orbital angular momentum [1][2][3]. Various other beam shapes, e.g., non

A silver-nanoparticle/cellulose-nanofiber composite as a highly effective substrate for surface-enhanced Raman spectroscopy

• Yongxin Lu,
• Yan Luo,
• Zehao Lin and
• Jianguo Huang

Beilstein J. Nanotechnol. 2019, 10, 1270–1279, doi:10.3762/bjnano.10.126

• stepping up from “nanofabrication” to “nanoarchitectonics” [1]. Nanoarchitectonics as a novel paradigm to create specific materials by assembling the corresponding nanoscale building blocks was first proposed by M. Aono and co-workers in the year 2000 [2][3]. The concept has been recently extended

Experimental study of an evanescent-field biosensor based on 1D photonic bandgap structures

• Jad Sabek,
• Francisco Javier Díaz-Fernández,
• Luis Torrijos-Morán,
• Zeneida Díaz-Betancor,
• Ángel Maquieira,
• María-José Bañuls,
• Elena Pinilla-Cienfuegos and
• Jaime García-Rupérez

Beilstein J. Nanotechnol. 2019, 10, 967–974, doi:10.3762/bjnano.10.97

• increase by a factor about three. Experimental For the creation of the photonic chips, a standard nanofabrication process optimized in our clean-room facilities has been used [11]. E-beam lithography with 100 keV acceleration voltage was used to expose the created chip layout onto a 100 nm thick hydrogen

Nanoscale optical and structural characterisation of silk

• Meguya Ryu,
• Reo Honda,
• Adrian Cernescu,
• Arturas Vailionis,
• Armandas Balčytis,
• Jitraporn Vongsvivut,
• Jing-Liang Li,
• Denver P. Linklater,
• Elena P. Ivanova,
• Vygantas Mizeikis,
• Mark J. Tobin,
• Junko Morikawa and
• Saulius Juodkazis

Beilstein J. Nanotechnol. 2019, 10, 922–929, doi:10.3762/bjnano.10.93

• , Hamamatsu, Shizuoka 4328561, Japan Tokyo Tech World Research Hub Initiative (WRHI), School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1, Ookayama, Meguro-ku, Tokyo 152-8550, Japan Melbourne Center for Nanofabrication, Australian National Fabrication Facility, Clayton 3168

• Recent advances in the nanofabrication of electronic devices require cutting-edge analytical technologies to provide a reliable structural characterisation of materials at the nanoscale. Such technologies are particularly important to probe molecular properties of cross sections smaller than 100 nm in

• all three dimensions, which is of rapidly growing interest in the field of nanotechnology. Electronic chip manufacturing is currently introducing the sub-10 nm fabrication node (a half pitch of a grating pattern) in the development of 3D fin-gates of field-effect transistors. Nanofabrication

Fabrication of silver nanoisland films by pulsed laser deposition for surface-enhanced Raman spectroscopy

• Bogusław Budner,
• Mariusz Kuźma,
• Barbara Nasiłowska,
• Bartosz Bartosewicz,
• Malwina Liszewska and
• Bartłomiej J. Jankiewicz

Beilstein J. Nanotechnol. 2019, 10, 882–893, doi:10.3762/bjnano.10.89

• . Keywords: nanofabrication; pulsed laser deposition; SERS substrates; silver nanoisland films; surface-enhanced Raman spectroscopy; X-ray photoelectron spectroscopy; Introduction In recent years, SERS has been intensively investigated as a sensing tool in many applications [1][2][3]. Of particular interest