The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o

• -mat are presented. Keywords: automated patterning; focused He ion beam; graphene; magnetic multilayers; mechanical resonator; pattern generation; plasmonic antennas; two-dimensional materials; Introduction Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and

• nanometer range is heavily sought after. One promising candidate for ultraprecise nanofabrication is focused ion beam (FIB) machining. Focused ion beams locally remove material based on physical sputtering with a large degree of flexibility due to advanced beam control. FIB patterning is a direct single

Characterization, bio-uptake and toxicity of polymer-coated silver nanoparticles and their interaction with human peripheral blood mononuclear cells

• Sahar Pourhoseini,
• Reilly T. Enos,
• Angela E. Murphy,
• Bo Cai and
• Jamie R. Lead

Beilstein J. Nanotechnol. 2021, 12, 282–294, doi:10.3762/bjnano.12.23

• the cells after Ag ion treatment and that after treatment with AgNPs (p < 0.05). No significant difference in the uptake of Ag in PBMCs was detected after treatments with AgNP and AgNO3 at lower concentrations (10 and 100 µg·L−1). Ag content was measured in the supernatant after sample digestion using

• of PVP-coated AgNPs was limited in biological media [40][41][42][43][44]. Dissolved oxygen in the solutions tend to oxidize AgNPs resulting in Ag ion release from the NP surface [45] and this was partially observed here. It has been suggested that the toxicity of Ag is linked to Ag ion release and

• recovery of Ag, as it was discussed in [47]. This may lead to decreased Ag ion availability and possible NP surface interactions with the aqueous phase, ultimately reducing toxicity [10][48]. A Ag mass balance was calculated from measurement of filtrate and retentate. Results indicate that the PVP-coated

The nanomorphology of cell surfaces of adhered osteoblasts

• Christian Voelkner,
• Mirco Wendt,
• Regina Lange,
• Max Ulbrich,
• Martina Gruening,
• Susanne Staehlke,
• Barbara Nebe,
• Ingo Barke and
• Sylvia Speller

Beilstein J. Nanotechnol. 2021, 12, 242–256, doi:10.3762/bjnano.12.20

• present a comprehensive characterization of the 3D nanomorphology of living, as well as fixed, osteoblastic cells using scanning ion conductance microscopy (SICM), which is a nanoprobing method that largely avoids mechanical perturbations. Dynamic ruffles are observed, manifesting themselves in

• capability of apical membrane features and fluctuation dynamics in aiding the assessment of adhesion and migration properties on a single-cell basis. Keywords: cell adhesion; membrane fluctuations; osteoblast; plasma membrane nanomorphology; scanning ion conductance microscopy (SICM); Introduction

• remain obscure. A localized ion current flowing through a nanopipette probe represents a suitable non-invasive interaction, which is exploited in scanning ion conductance microscopy (SICM) [19][20][21]. SICM is well suited to probe soft and responsive surfaces, such as those of living cells. The applied

Scanning transmission helium ion microscopy on carbon nanomembranes

• Daniel Emmrich,
• Annalena Wolff,
• Nikolaus Meyerbröker,
• Jörg K. N. Lindner,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 222–231, doi:10.3762/bjnano.12.18

• Technology, 2 George St, Brisbane 4000, QLD, Australia CNM Technologies, Bielefeld, Germany Department of Physics, Paderborn University, Paderborn, Germany 10.3762/bjnano.12.18 Abstract A dark-field scanning transmission ion microscopy detector was designed for the helium ion microscope. The detection

• energy-filtered transmission electron microscopy measurements. Keywords: carbon nanomembranes; dark field; helium ion microscopy (HIM); scanning transmission ion microscopy (STIM); SRIM simulations; Introduction Throughout the past decade, the helium ion microscope (HIM) has emerged as a versatile

• five times more secondary electrons (SE) than an SEM [5]) is advantageous when working with beam-sensitive samples. An overview of the imaging as well as recently added analytical capabilities using secondary ion mass spectroscopy can be found in a recent review [6]. Beyond imaging, the HIM has been

TiO_x/Pt₃Ti(111) surface-directed formation of electronically responsive supramolecular assemblies of tungsten oxide clusters

• Marco Moors,
• Yun An,
• Agnieszka Kuc and
• Kirill Yu. Monakhov

Beilstein J. Nanotechnol. 2021, 12, 203–212, doi:10.3762/bjnano.12.16

• (compare the upper right areas of Figure 3a and Figure 3b). We assume that this effect is caused by the unsealed oxygen ion, which is absorbed by the oxygen-depleted TiOx layer and, thus, locally disturbs the order of the above-lying W3O9 layer. However, the expected high adsorption energy of oxygen in

Toward graphene textiles in wearable eye tracking systems for human–machine interaction

• Ata Jedari Golparvar and
• Murat Kaya Yapici

Beilstein J. Nanotechnol. 2021, 12, 180–189, doi:10.3762/bjnano.12.14

• nowadays, a lithium-ion/polymer battery with a rating of 3.7 V and 500 mAh was chosen to power the system. The battery charge management circuitry and DC–DC boost converter were based on a MCP73831 (Microchip, USA) and a TPS61090 (Texas Instruments, USA), respectively. To split the regulated 5 V, a rail

Imaging of SARS-CoV-2 infected Vero E6 cells by helium ion microscopy

• Natalie Frese,
• Patrick Schmerer,
• Martin Wortmann,
• Matthias Schürmann,
• Matthias König,
• Michael Westphal,
• Friedemann Weber,
• Holger Sudhoff and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 172–179, doi:10.3762/bjnano.12.13

• Helium ion microscopy (HIM) offers the opportunity to obtain direct views of biological samples such as cellular structures, virus particles, and microbial interactions. Imaging with the HIM combines sub-nanometer resolution, large depth of field, and high surface sensitivity. Due to its charge

• virus particles lying on top of the membrane. After prolonged imaging, it was found that ion-induced deposition of hydrocarbons from the vacuum renders the sample sufficiently conductive to allow for imaging even without charge compensation. The presented images demonstrate the potential of the HIM in

• bioimaging, especially for the imaging of interactions between viruses and their host organisms. Keywords: bioimaging; cell membrane; charge compensation; helium ion microscopy; SARS-CoV-2; Vero E6 cells; Introduction The last decade of helium ion microscopy (HIM) was characterized by a rapid exploration

Paper-based triboelectric nanogenerators and their applications: a review

• Jing Han,
• Nuo Xu,
• Yuchen Liang,
• Mei Ding,
• Junyi Zhai,
• Qijun Sun and
• Zhong Lin Wang

Beilstein J. Nanotechnol. 2021, 12, 151–171, doi:10.3762/bjnano.12.12

• there is no output current. Although the origin of the contact electrification has been a matter of debate for a long time, no conclusive model to explain this phenomenon has been proposed. Previous studies investigated whether the electron or ion transfer were dominant in the contact-electrification

Mapping the local dielectric constant of a biological nanostructured system

• Wescley Walison Valeriano,
• Rodrigo Ribeiro Andrade,
• Juan Pablo Vasco,
• Angelo Malachias,
• Bernardo Ruegger Almeida Neves,
• Paulo Sergio Soares Guimarães and
• Wagner Nunes Rodrigues

Beilstein J. Nanotechnol. 2021, 12, 139–150, doi:10.3762/bjnano.12.11

• . The scanning electron microscopy (SEM) image presented in Figure 2 shows the nanostructured section of a fragment of the red region indicated in Figure 1a. The section was partially polished using a focused ion beam (FIB) and the multilayered structure is clearly visible. The corrugated surface is the

• ion mass spectrometry (TOF-SIMS), Carr et al. [18] concluded that the wing layers consist of mostly chitin with an alternating content of melanin. Chitin forms the structure and melanin modulates the relative permittivity along the cross section. From the results shown in Figure 7, we can see that, in

The role of gold atom concentration in the formation of Cu–Au nanoparticles from the gas phase

• Yuri Ya. Gafner,
• Svetlana L. Gafner,
• Darya A. Ryzkova and
• Andrey V. Nomoev

Beilstein J. Nanotechnol. 2021, 12, 72–81, doi:10.3762/bjnano.12.6

• control over the composition of the synthesized bimetallic nanoparticles. The fabrication of Cu–Au bimetallic nanoparticles using ion implantation [11] or thermal evaporation in ultrahigh vacuum [12][13] are typical examples of these techniques. Also, in [14], the Cu–Au nanoalloys were deposited onto

ZnO and MXenes as electrode materials for supercapacitor devices

• Ameen Uddin Ammar,
• Ipek Deniz Yildirim,
• Feray Bakan and
• Emre Erdem

Beilstein J. Nanotechnol. 2021, 12, 49–57, doi:10.3762/bjnano.12.4

• are still too low compared to carbonaceous electrodes. Nanoscale dimensions, the increase of the surface-defect concentration, and metal-ion doping may play a vital role in increasing specific capacitance values as well as cycle life and in mitigating degradation problems. Recently, valuable

• layered thick solids and, thus, do not contain spaces for the penetration of Li ions into the electrode [15]. Therefore, to enhance the performance of MXene supercapacitors an increased ion transfer rate is needed [18][23]. MXenes exhibit two major changes due to the removal of the A layer from the

• ) oxide (Fe2O3), may be used to increase the layer spacing, which directly increases the ion transfer rate [16][17][18]. In other words, the intercalation or modification of MXenes helps to prevent the possibility of stacking, increases ion adsorption sites, and enhances electrochemical properties [19][22

Effect of different silica coatings on the toxicity of upconversion nanoparticles on RAW 264.7 macrophage cells

• Cynthia Kembuan,
• Helena Oliveira and
• Christina Graf

Beilstein J. Nanotechnol. 2021, 12, 35–48, doi:10.3762/bjnano.12.3

• : cytotoxicity; ion release; RAW 264.7 macrophage cell line; silica coating; upconversion nanoparticles; Introduction Upconversion nanoparticles (UCNPs) convert excitation radiation with long wavelengths to a short-wavelength emission. Since biological molecules do not have an upconversion mechanism, imaging

• degrees of the samples in RAW 264.7 cells (the cytotoxicity of the samples was dose-dependent) and by the flow cytometry results (see below). Ion release experiments For the investigation of released lanthanide ions, UC@thin_NH2 and UC@thick_NH2, as representative samples of thin- and thick-shelled

• released ions, which should correlate with the cytotoxicity results. The filtrates were measured by ICP-OES regarding their content of Y3+, Yb3+, and Er3+. Additionally, a certain amount of the three corresponding lanthanide chlorides was dissolved in water to yield lanthanide ion concentration values of

Bio-imaging with the helium-ion microscope: A review

• Matthias Schmidt,
• James M. Byrne and
• Ilari J. Maasilta

Beilstein J. Nanotechnol. 2021, 12, 1–23, doi:10.3762/bjnano.12.1

• of Physics, University of Jyväskylä, P.O. Box 35, FI-40014 Jyväskylä, Finland 10.3762/bjnano.12.1 Abstract Scanning helium-ion microscopy (HIM) is an imaging technique with sub-nanometre resolution and is a powerful tool to resolve some of the tiniest structures in biology. In many aspects, the HIM

• , HIM is not just an imaging technique. The ability to use the instrument for milling biological objects as small as viruses offers unique opportunities which are not possible with more conventional focused ion beams, such as gallium. Several pioneering technical developments, such as methods to couple

• secondary ion mass spectrometry (SIMS) or ionoluminescence with the HIM, also offer the possibility for new and exciting research on biological materials. In this review, we present a comprehensive overview of almost all currently published literature which has demonstrated the application of HIM for

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

• Eduardo Serralta,
• Nico Klingner,
• Olivier De Castro,
• Michael Mousley,
• Santhana Eswara,
• Serge Duarte Pinto,
• Tom Wirtz and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2020, 11, 1854–1864, doi:10.3762/bjnano.11.167

• Eduardo Serralta Nico Klingner Olivier De Castro Michael Mousley Santhana Eswara Serge Duarte Pinto Tom Wirtz Gregor Hlawacek Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, 01328 Dresden, Germany Technische Universität Dresden

• based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the scanning beam position on

• temporal resolution, is sensitive to both ions and neutral particles over a wide energy range, and shows robustness against ion beam-induced damage. A special in-vacuum movable support gives the possibility of moving the detector vertically, placing the detector closer to the sample for the detection of

Unravelling the interfacial interaction in mesoporous SiO₂@nickel phyllosilicate/TiO₂ core–shell nanostructures for photocatalytic activity

• Bridget K. Mutuma,
• Xiluva Mathebula,
• Isaac Nongwe,
• Bonakele P. Mtolo,
• Boitumelo J. Matsoso,
• Rudolph Erasmus,
• Zikhona Tetana and
• Neil J. Coville

Beilstein J. Nanotechnol. 2020, 11, 1834–1846, doi:10.3762/bjnano.11.165

• recombination, leading to faster charge transport and photodegradation. Typically, the photocatalytic degradation efficacy of TiO2 depends on the surface area and metal-ion doping on the surface. Metal-ion doping of TiO2 influences its interfacial charge-transfer properties [51]. Differences in

Self-standing heterostructured NiC_x-NiFe-NC/biochar as a highly efficient cathode for lithium–oxygen batteries

• Shengyu Jing,
• Xu Gong,
• Shan Ji,
• Linhui Jia,
• Bruno G. Pollet,
• Sheng Yan and
• Huagen Liang

Beilstein J. Nanotechnol. 2020, 11, 1809–1821, doi:10.3762/bjnano.11.163

• . The structure of NiCx-NiFe-NC efficiently improved the electron and ion transfer between the cathode and the electrolyte during the electrochemical processes, resulting in superior electrocatalytic properties in lithium–oxygen batteries. This study indicates that nickel carbide supported on N-doped

• structure. As shown in the inset of Figure 2d, the main diffraction peaks of the Ni–Fe PBA precursor are consistent with the standard patterns of Ni3[Fe(CN)6]2 (JCPDS: 51-1897). During a hydrothermal pretreatment, the ion-exchange reaction of OH−/[Fe(CN)6]3− occurred at the interface between NiFe-PBA cubes

• activity. In this work, during hydrothermal pretreatment, the ion-exchange reaction of OH−/[Fe(CN)6]3− occurred at the interface between NiFe-PBA cubes and NaOH solution, resulting in Ni(OH)2/NiFe-PBA core–shell structure [44][45][46]. During the calcination process, Ni(OH)2 was converted to NiCx, and the

Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

• Aya Mahgoub,
• Hang Lu,
• Rachel M. Thorman,
• Konstantin Preradovic,
• Titel Jurca,
• Lisa McElwee-White,
• Howard Fairbrother and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2020, 11, 1789–1800, doi:10.3762/bjnano.11.161

• exceeding the maximum pressure allowed in the SEM chamber (approximately 10−4 mbar). A silicon substrate was used for all deposition experiments, patterned such that circular areas of pristine silicon are surrounded by black silicon (obtained by reactive ion etching). The black silicon area aids in focusing

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

• Nico Klingner,
• Gregor Hlawacek,
• Paul Mazarov,
• Wolfgang Pilz,
• Fabian Meyer and
• Lothar Bischoff

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

• Nico Klingner Gregor Hlawacek Paul Mazarov Wolfgang Pilz Fabian Meyer Lothar Bischoff Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany 10.3762

• /bjnano.11.156 Abstract While the application of focused ion beam (FIB) techniques has become a well-established technique in research and development for patterning and prototyping on the nanometer scale, there is still a large underused potential with respect to the usage of ion species other than

• gallium. Light ions in the range of m = 1–28 u (hydrogen to silicon) are of increasing interest due to the available high beam resolution in the nanometer range and their special chemical and physical behavior in the substrate. In this work, helium and neon ion beams from a helium ion microscope are

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• Southern Denmark, Alsion 2, Sønderborg, 6400, Denmark 10.3762/bjnano.11.151 Abstract This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk

• of the polymer. Effects of subsurface and surface processes on the surface morphology have been studied for three polymer materials: poly(methyl methacrylate), polycarbonate, and polydimethylsiloxane, by using focused ion beam irradiation with He+, Ne+, and Ga+. Thin films of a Pt60Pd40 alloy and of

• pristine Au were used to compare the patterning of thin films with different microstructures. We show that the height of Pt60Pd40 thin films deposited onto poly(methyl methacrylate) and polycarbonate substrates can be patterned by He+ ion beams with ultrahigh precision (nanometers) while preserving in

PTCDA adsorption on CaF₂ thin films

• Philipp Rahe

Beilstein J. Nanotechnol. 2020, 11, 1615–1622, doi:10.3762/bjnano.11.144

• that two of the four carbonyl oxygen atoms are displaced out of the PTCDA plane towards a surface calcium ion. An attraction between the molecular oxygen and surface calcium atoms is suggested from an oxygen–calcium distance of about 2.8 Å. Note that this distance is larger than 2.4 Å recently found

Oxidation of Au/Ag films by oxygen plasma: phase separation and generation of nanoporosity

• Abdel-Aziz El Mel,
• Said A. Mansour,
• Mujaheed Pasha,
• Atef Zekri,
• Janarthanan Ponraj,
• Akshath Shetty and
• Yousef Haik

Beilstein J. Nanotechnol. 2020, 11, 1608–1614, doi:10.3762/bjnano.11.143

• increased in size (Figure 3e,f). To investigate whether the formed nanoporous microspheres have a hollow interior or not, a cross-section SEM specimen from the sample oxidized for 30 min was prepared using focused ion beam (FIB) (Figure 3e). According to the results, the microspheres were not hollow and the

Walking energy harvesting and self-powered tracking system based on triboelectric nanogenerators

• Mingliang Yao,
• Guangzhong Xie,
• Qichen Gong and
• Yuanjie Su

Beilstein J. Nanotechnol. 2020, 11, 1590–1595, doi:10.3762/bjnano.11.141

• transportation control, and for environmental monitoring. Experimental Surface modification of a PTFE film The surface modification of a PTFE film was performed in a similar manner as described previously [34]. Deep reactive ion etching was employed to construct PTFE nanowires aligned on the surface. Isopropyl

• electrode. Through deep reactive ion etching, polymer nanowires (average diameter of ≈150 nm and length values ranging from 410 to 680 nm) were created to vertically align on the surface of the PTFE film, as shown in Figure 1b. This modification on the PTFE surface not only enhances the effective contact

Fabrication of nano/microstructures for SERS substrates using an electrochemical method

• Jingran Zhang,
• Tianqi Jia,
• Xiaoping Li,
• Junjie Yang,
• Zhengkai Li,
• Guangfeng Shi,
• Xinming Zhang and
• Zuobin Wang

Beilstein J. Nanotechnol. 2020, 11, 1568–1576, doi:10.3762/bjnano.11.139

• lithography (EBL) and wet etching consists of 1 μm deep square-based pyramidal pits in the silicon surface. A rhodamine solution (10−4 mol·L−1) is then detected using the Klarite substrate. Candeloro et al. [24] employed EBL and reactive ion etching to machine nanoholes of 400 nm diameter and 50 nm depth

• and reactive ion etching methods [25]. The Raman intensities of R6G and 4-mercaptopyridine molecules were measured by using different substrates. In addition, the Raman intensity of R6G on the pyramid structures was higher than that of R6G on the other structures in the experiment, and the enhancement

• ion beam (FIB) technology can also be used to directly fabricate high-precision nanostructures on surfaces made of silicon, silicon dioxide and metal [27][28][29][30][31][32][33]. FIB technology is therefore used as a processing method for SERS substrates. Using the FIB method, Lin et al. [29

Adsorption and self-assembly of porphyrins on ultrathin CoO films on Ir(100)

• Feifei Xiang,
• Tobias Schmitt,
• Marco Raschmann and
• M. Alexander Schneider

Beilstein J. Nanotechnol. 2020, 11, 1516–1524, doi:10.3762/bjnano.11.134

• molecules were carefully outgassed for 2 to 5 h prior to deposition at ±10 K of the evaporation temperature. CoO was prepared on an Ir(100) single crystal surface cleaned by ion sputtering and annealing. The Ir(100)-(1 × 1) surface was prepared according to [31]. We employ thin films of two distinct

• involved aromatic systems. Similar values are found on the metal surfaces. The details of these compact structures on different substrates are therefore regulated by the substrate lattice. Furthermore, similar to what is observed for many metal substrates, the central metal ion of the molecule is not

• bent such that a bond between the cyano group and a Co ion of the substrate could be formed. However, the structure always relaxed into a state in which the N–Co distance exceeded 3.1 Å. While the STM simulation of that configuration shown in Figure 7d matches well with some of the molecules depicted

Helium ion microscope – secondary ion mass spectrometry for geological materials

• Matthew R. Ball,
• Richard J. M. Taylor,
• Joshua F. Einsle,
• Fouzia Khanom,
• Christelle Guillermier and
• Richard J. Harrison

Beilstein J. Nanotechnol. 2020, 11, 1504–1515, doi:10.3762/bjnano.11.133

• Carl Zeiss SMT Inc., Peabody, MA, USA 10.3762/bjnano.11.133 Abstract The helium ion microscope (HIM) is a focussed ion beam instrument with unprecedented spatial resolution for secondary electron imaging but has traditionally lacked microanalytical capabilities. With the addition of the secondary ion

• well as practicalities for geological sample analyses of Li alongside a discussion of potential geological use cases of the HIM–SIMS instrument. Keywords: geoscience; helium ion microscopy (HIM); lithium; secondary ion mass spectrometry (SIMS); Introduction The helium ion microscope (HIM) is a

• focussed ion beam (FIB) instrument, which uses a gas field ion source (GFIS) to create highly focussed beams of noble gas ions, utilising the same working principle as the field ion microscope (FIM). This was originally used to form a primary helium beam [1], but the principle of the GFIS has since been